公开(公告)号：US09897926B2

公开(公告)日：2018-02-20

申请号：US15115876

申请日：2015-01-20

Applicant: ASML Netherlands B.V.

Inventor： Wilhelmus Henricus Theodorus Maria Aangenent ,  Lucas Franciscus Koorneef ,  Theo Anjes Maria Ruijl ,  Stanley Constant Johannes Martinus Van Den Berg ,  Stan Henricus Van Der Meulen ,  Jan Van Eijk ,  Pieter Hubertus Godefrida Wullms ,  Richard Henricus Adrianus Van Lieshout

IPC: B64C17/06 ,  F16M7/00 ,  G03B27/58 ,  G03B27/62 ,  H02K41/02 ,  G03F7/20 ,  H01L21/68

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  G03F7/709 ,  H01L21/68

Abstract: A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.