公开(公告)号：US20240184219A1

公开(公告)日：2024-06-06

申请号：US18284974

申请日：2022-04-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Giulio BOTTEGAL ,  Xingang CAO

IPC: G03F7/00

CPC classification number: G03F7/706839 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/7065 ,  G03F7/706837

Abstract: Methods and systems for determining a model configured to predict values of physical characteristics (e.g., overlay, CD) associated with a patterned substrate measured using different measurement tools. The method involves obtaining a first set of measured data for a first one or more patterned substrates using a first one or more measurement tools, and reference measurements of a physical characteristic. Also, a second set of measured data and virtual data for a second one or more patterned substrates measured using a second one or more measurement tools is obtained. A set of mapping functions between the second set and the virtual data are generated. The set of mapping functions is used to convert the first set. Then, a model is determined based on the reference measurements and the converted data such that the model predicts values of the physical characteristic that are within an acceptable threshold of the reference measurements.

公开(公告)号：US20250021021A1

公开(公告)日：2025-01-16

申请号：US18712649

申请日：2022-11-14

Applicant: ASML NETHERLANDS B.V.

Inventor： Giulio BOTTEGAL ,  Gonzalo Roberto SANGUINETTI

IPC: G03F7/00

Abstract: A method of calibrating a model for inferring a value for a parameter of interest from a measurement signal including obtaining a first set of metrology signals, corresponding known reference values for the parameter of interest; and at least first and second constraining sets of metrology signals relating to the same application as the first set of metrology signals. The first set of metrology signals and corresponding reference data is used to train at least one model to infer a value for the parameter of interest from the first set of metrology signals subject to a constraint that a difference between first inferred values for the parameter of interest using the model on at least the first constraining set of metrology signals and second inferred values for the parameter of interest using the model on the second constraining set of metrology signals is below a threshold value.

公开(公告)号：US20240337954A1

公开(公告)日：2024-10-10

申请号：US18575518

申请日：2022-06-10

Applicant: ASML Netherlands B.V.

Inventor： Giulio BOTTEGAL ,  Martijn JONGEN

IPC: G03F7/00

CPC classification number: G03F7/706841 ,  G03F7/70633

Abstract: Disclosed is a method of determining a reliability metric describing a reliability of metrology signal and/or a parameter of interest value derived therefrom and associated apparatuses. The method comprises obtaining a trained inference model for inferring a value for a parameter of interest from a measurement signal and one or more measurement signals and/or respective one or more values of a parameter of interest derived therefrom using said trained inference model. At least one reliability metric value is determined for the one or more measurement signals and/or respective one or more values of a parameter of interest, the reliability metric describing a reliability of one or more measurement signals and/or respective one or more values of a parameter of interest with respect to an accurate prediction space associated with the trained inference model.