公开(公告)号：US20240184219A1

公开(公告)日：2024-06-06

申请号：US18284974

申请日：2022-04-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Giulio BOTTEGAL ,  Xingang CAO

IPC: G03F7/00

CPC classification number: G03F7/706839 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/7065 ,  G03F7/706837

Abstract: Methods and systems for determining a model configured to predict values of physical characteristics (e.g., overlay, CD) associated with a patterned substrate measured using different measurement tools. The method involves obtaining a first set of measured data for a first one or more patterned substrates using a first one or more measurement tools, and reference measurements of a physical characteristic. Also, a second set of measured data and virtual data for a second one or more patterned substrates measured using a second one or more measurement tools is obtained. A set of mapping functions between the second set and the virtual data are generated. The set of mapping functions is used to convert the first set. Then, a model is determined based on the reference measurements and the converted data such that the model predicts values of the physical characteristic that are within an acceptable threshold of the reference measurements.