公开(公告)号：US20240337954A1

公开(公告)日：2024-10-10

申请号：US18575518

申请日：2022-06-10

Applicant: ASML Netherlands B.V.

Inventor： Giulio BOTTEGAL ,  Martijn JONGEN

IPC: G03F7/00

CPC classification number: G03F7/706841 ,  G03F7/70633

Abstract: Disclosed is a method of determining a reliability metric describing a reliability of metrology signal and/or a parameter of interest value derived therefrom and associated apparatuses. The method comprises obtaining a trained inference model for inferring a value for a parameter of interest from a measurement signal and one or more measurement signals and/or respective one or more values of a parameter of interest derived therefrom using said trained inference model. At least one reliability metric value is determined for the one or more measurement signals and/or respective one or more values of a parameter of interest, the reliability metric describing a reliability of one or more measurement signals and/or respective one or more values of a parameter of interest with respect to an accurate prediction space associated with the trained inference model.