公开(公告)号：US11842908B2

公开(公告)日：2023-12-12

申请号：US17152241

申请日：2021-01-19

申请人： ASM IP HOLDING B.V.

发明人： Shiva K. T. Rajavelu Muralidhar ,  Sam Kim

IPC分类号： H01K1/14 ,  H01K7/00 ,  H05B3/44 ,  F27B17/00 ,  H01L21/324 ,  H01L21/67 ,  H05B3/00 ,  F27D5/00

CPC分类号： H01L21/67115 ,  F27B17/0025 ,  H01K1/14 ,  H01K7/00 ,  H01L21/324 ,  H05B3/0047 ,  F27D5/0037

摘要： An arrangement of linear heat lamps is provided which allows for localized control of temperature nonuniformities in a substrate during semiconductor processing. A reactor includes a substrate holder positioned between a top array and a bottom array of linear heat lamps. At least one lamp of the arrays includes a filament having a varying density and power output along the length of the lamp. In particular, at least one lamp of the arrays includes a filament having a higher filament winding density within a central portion of the lamp relative to peripheral portions of the lamp. In some embodiments, the at least one lamp is a central lamp extending across a central portion of the substrate heated by the lamp. Furthermore, at least one lamp of the arrays has a higher power output within a central portion of the lamp than at peripheral portions of the lamp.

公开(公告)号：US11764101B2

公开(公告)日：2023-09-19

申请号：US17075504

申请日：2020-10-20

申请人： ASM IP HOLDING B.V.

发明人： Saket Rathi ,  Shiva K. T. Rajavelu Muralidhar ,  Siyao Luan ,  Alexandros Demos ,  Xing Lin

IPC分类号： H01L21/324 ,  H01L21/687 ,  H01L21/67 ,  H01L21/268 ,  H01L21/683

CPC分类号： H01L21/6875 ,  H01L21/2686 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67253 ,  H01L21/68735 ,  H01L21/67248

摘要： A susceptor for semiconductor substrate processing is disclosed herein. In some embodiments, the susceptor may comprise an inner susceptor portion and an outer susceptor portion. The susceptor portions may self-align via complementary features, such as tabs on the outer susceptor and recesses on the inner susceptor portion. The inner susceptor portion may contain several contact pads with which to support a wafer during semiconductor processing. In some embodiments, the contact pads are hemispherical to reduce contact area with the wafer, thereby reducing risk of backside damage. The inner susceptor portion may contain a cavity with which to receive a thermocouple. In some embodiments, the diameter of the cavity is greater than the diameter of the thermocouple such that the thermocouple does not contact the walls of the cavity during processing, thereby providing highly accurate temperature measurements.

公开(公告)号：US11946137B2

公开(公告)日：2024-04-02

申请号：US17549022

申请日：2021-12-13

申请人： ASM IP Holding B.V.

发明人： Aniket Nitin Patil ,  Saket Rathi ,  Sam Kim ,  Shiva K. T. Rajavelu Muralidhar

IPC分类号： B23Q3/00 ,  C23C16/455 ,  C23C16/458 ,  C23C16/52

CPC分类号： C23C16/455 ,  B23Q3/00 ,  C23C16/4582 ,  C23C16/52

摘要： A fixture is provided. The fixture includes a base, a turntable, a first sensor, and a second sensor. The turntable is supported on the base, is rotatable about a rotation axis, and is configured to slidably seat a susceptor assembly for rotation about the rotation axis. The first sensor is fixed relative to the base, is radially offset from the rotation axis, and is configured to determine ex-situ runout of the susceptor assembly. The second sensor is fixed relative to the first sensor, is axially offset from the first sensor, and is configured to determine ex-situ wobble of the susceptor assembly. Fixture arrangements and methods of determining ex-situ runout and ex-situ wobble of susceptor assemblies for semiconductor processing systems are also described.

公开(公告)号：US11885023B2

公开(公告)日：2024-01-30

申请号：US16584283

申请日：2019-09-26

申请人： ASM IP Holding B.V.

发明人： Shiva K. T. Rajavelu Muralidhar ,  Sam Kim ,  Jeffrey Barrett Robinson ,  James King Wilson, Jr. ,  Ninad Vijay Sonje

IPC分类号： C23C16/46 ,  H01L21/67 ,  H01L21/687 ,  C23C16/458 ,  C23C16/44

CPC分类号： C23C16/466 ,  C23C16/4411 ,  C23C16/4586 ,  H01L21/67201 ,  H01L21/68757

摘要： A substrate retaining apparatus, a load lock assembly comprising the substrate retaining apparatus, and a system including the substrate retaining apparatus are disclosed. The substrate retaining apparatus can include at least one sidewall and one or more heat shields. One or more of the at least one sidewall can include a cooling fluid conduit to facilitate cooling of substrates retained by the substrate retaining apparatus. Additionally or alternatively, one or more of the at least one sidewall can include a gas conduit to provide gas to a surface of a retained substrate.

公开(公告)号：US11828707B2

公开(公告)日：2023-11-28

申请号：US17157507

申请日：2021-01-25

申请人： ASM IP Holding B.V.

发明人： Shiva K. T. Rajavelu Muralidhar ,  Youness Alvandi-Tabrizi ,  John DiSanto ,  Sam Kim

IPC分类号： G01N21/59 ,  G01N21/958 ,  G01B11/02 ,  G01N33/207

CPC分类号： G01N21/59 ,  G01B11/028 ,  G01N21/958 ,  G01N33/207 ,  G01N2201/021

摘要： Methods and apparatus for measuring light intensity are disclosed. The methods and apparatus can be used to verify an article, such as a reaction chamber. Exemplary apparatus include a first arm, a light source coupled to the first arm, a second arm, and a sensor coupled to the second arm. The sensor can receive light from the light source that is transmitted through at least a portion of the article.