公开(公告)号：US11473978B2

公开(公告)日：2022-10-18

申请号：US16560566

申请日：2019-09-04

Applicant: APPLIED Materials, Inc.

Inventor： Dawei Sun ,  D. Jeffrey Lischer ,  Qin Chen ,  Dale K. Stone ,  Lyudmila Stone ,  Steven Anella ,  Ron Serisky ,  Chi-Yang Cheng

IPC: G01K1/16 ,  G01J5/02 ,  G01J5/10 ,  G01K7/02

Abstract: A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.

公开(公告)号：US20200381271A1

公开(公告)日：2020-12-03

申请号：US16560326

申请日：2019-09-04

Applicant: APPLIED Materials, Inc.

Inventor： Dawei Sun ,  Dale K. Stone ,  D. Jeffrey Lischer ,  Lyudmila Stone ,  Steven Anella ,  Julian G. Blake ,  Ron Serisky ,  Daniel A. Hall ,  Robert H. Bettencourt

IPC: H01L21/67 ,  H05B1/02

Abstract: A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes.

公开(公告)号：US11543296B2

公开(公告)日：2023-01-03

申请号：US16551128

申请日：2019-08-26

Applicant: Applied Materials, Inc.

Inventor： Eric D. Wilson ,  Steven Anella ,  D. Jeffrey Lischer ,  James McLane ,  Bradley M. Pomerleau ,  Dawei Sun

IPC: G01J5/00 ,  H01L21/67 ,  G01J5/80 ,  G01J5/02 ,  G01K7/02 ,  H01L21/687

Abstract: A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.

公开(公告)号：US20200378837A1

公开(公告)日：2020-12-03

申请号：US16560566

申请日：2019-09-04

Applicant: APPLIED Materials, Inc.

Inventor： Dawei Sun ,  D. Jeffrey Lischer ,  Qin Chen ,  Dale K. Stone ,  Lyudmila Stone ,  Steven Anella ,  Ron Serisky ,  Chi-Yang Cheng

IPC: G01K1/16 ,  G01K7/02 ,  G01J5/10 ,  G01J5/02

Abstract: A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.

公开(公告)号：US20200378832A1

公开(公告)日：2020-12-03

申请号：US16551128

申请日：2019-08-26

Applicant: Applied Materials, Inc.

Inventor： Eric D. Wilson ,  Steven Anella ,  D. Jeffrey Lischer ,  James McLane ,  Bradley M. Pomerleau ,  Dawei Sun

IPC: G01J5/00 ,  H01L21/67

Abstract: A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.