公开(公告)号：US11543296B2

公开(公告)日：2023-01-03

申请号：US16551128

申请日：2019-08-26

Applicant: Applied Materials, Inc.

Inventor： Eric D. Wilson ,  Steven Anella ,  D. Jeffrey Lischer ,  James McLane ,  Bradley M. Pomerleau ,  Dawei Sun

IPC: G01J5/00 ,  H01L21/67 ,  G01J5/80 ,  G01J5/02 ,  G01K7/02 ,  H01L21/687

Abstract: A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.

公开(公告)号：US20200378832A1

公开(公告)日：2020-12-03

申请号：US16551128

申请日：2019-08-26

Applicant: Applied Materials, Inc.

Inventor： Eric D. Wilson ,  Steven Anella ,  D. Jeffrey Lischer ,  James McLane ,  Bradley M. Pomerleau ,  Dawei Sun

IPC: G01J5/00 ,  H01L21/67

Abstract: A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.