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公开(公告)号：US09958670B2
公开(公告)日：2018-05-01
申请号：US15270311
申请日：2016-09-20
发明人： Ron Naftail , Boris Golberg , Rami Elichai
CPC分类号： G02B26/10 , G01N21/8806 , G01N21/9501 , G01N2201/105 , G02B21/002 , G02B27/0966
摘要： A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.
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公开(公告)号：US20180081166A1
公开(公告)日：2018-03-22
申请号：US15270311
申请日：2016-09-20
发明人： Ron Naftail , Boris Golberg , Rami Elichai
CPC分类号： G02B26/10 , G01N21/8806 , G01N21/9501 , G01N2201/105 , G02B21/002 , G02B27/0966
摘要： A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.
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