Invention Grant
- Patent Title: Scanning system and method for scanning an object
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Application No.: US15270311Application Date: 2016-09-20
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Publication No.: US09958670B2Publication Date: 2018-05-01
- Inventor: Ron Naftail , Boris Golberg , Rami Elichai
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01J40/14
- IPC: H01J40/14 ; G02B26/10 ; G02B27/09 ; G01N21/95 ; G01N21/88

Abstract:
A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.
Public/Granted literature
- US20180081166A1 SCANNING SYSTEM AND METHOD FOR SCANNING AN OBJECT Public/Granted day:2018-03-22
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