- 专利标题: SCANNING SYSTEM AND METHOD FOR SCANNING AN OBJECT
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申请号: US15270311申请日: 2016-09-20
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公开(公告)号: US20180081166A1公开(公告)日: 2018-03-22
- 发明人: Ron Naftail , Boris Golberg , Rami Elichai
- 申请人: APPLIED MATERIALS ISRAEL LTD.
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G02B27/09 ; G01N21/95 ; G01N21/88
摘要:
A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.
公开/授权文献
- US09958670B2 Scanning system and method for scanning an object 公开/授权日:2018-05-01
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