公开(公告)号：US10452039B2

公开(公告)日：2019-10-22

申请号：US15663068

申请日：2017-07-28

Applicant: APPLIED MATERIALS, INC.

Inventor： Daniel O. Clark ,  Youssef A. Loldj ,  Shaun W. Crawford ,  Maxime Cayer ,  Tony H. Tong ,  Eric Rieske

IPC: G05B15/02 ,  G05B23/02

Abstract: Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.

公开(公告)号：US09740182B2

公开(公告)日：2017-08-22

申请号：US13895978

申请日：2013-05-16

Applicant: APPLIED MATERIALS, INC.

Inventor： Daniel O. Clark ,  Youssef A. Loldj ,  Shaun W. Crawford ,  Maxime Cayer ,  Tony H. Tong ,  Eric Rieske

IPC: G05B15/02 ,  G05B23/02

CPC classification number: G05B15/02 ,  G05B23/0291 ,  Y02P90/14 ,  Y02P90/86

Abstract: Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.

公开(公告)号：US12203828B2

公开(公告)日：2025-01-21

申请号：US17240677

申请日：2021-04-26

Applicant: Applied Materials, Inc.

Inventor： Ryan T. Downey ,  Hemant P. Mungekar ,  James L'Heureux ,  Andreas Neuber ,  Michael W. Johnson ,  Joseph A. Van Gompel ,  Gino Gerardo Crispieri ,  Tony H. Tong ,  Maxime Cayer ,  John L Koenig ,  Mike M. Huang

IPC: G01M99/00

Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.