公开(公告)号：US12203828B2

公开(公告)日：2025-01-21

申请号：US17240677

申请日：2021-04-26

Applicant: Applied Materials, Inc.

Inventor： Ryan T. Downey ,  Hemant P. Mungekar ,  James L'Heureux ,  Andreas Neuber ,  Michael W. Johnson ,  Joseph A. Van Gompel ,  Gino Gerardo Crispieri ,  Tony H. Tong ,  Maxime Cayer ,  John L Koenig ,  Mike M. Huang

IPC: G01M99/00

Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.