公开(公告)号：US20200234991A1

公开(公告)日：2020-07-23

申请号：US16746285

申请日：2020-01-17

Applicant: APPLIED MATERIALS, INC.

Inventor： FRED ERIC RUHLAND ,  SUMIT S. PATANKAR ,  VIJAY D. PARKHE ,  DANIEL LEE DIEHL ,  MINGWEI ZHU ,  HIROYUKI TAKAHAMA ,  RANDY D. SCHMIEDING

IPC: H01L21/677

Abstract: Embodiments of a substrate carrier are provided herein. In some embodiments, a substrate carrier includes a base plate, wherein the base plate is a thin, solid plate with no through holes or embedded components; and a plurality of raised portions extending from the base plate, wherein the plurality of raised portions include first raised portions and second raised portions, the first raised portions disposed radially inward from the second raised portions, wherein the base plate and the plurality of raised portions define pockets configured to retain a plurality of substrates, and wherein an upper surface of the second raised portions have a greater surface area than an upper surface of the first raised portions.

公开(公告)号：US20180112310A1

公开(公告)日：2018-04-26

申请号：US15827845

申请日：2017-11-30

Applicant: APPLIED MATERIALS, INC.

Inventor： SRISKANTHARAJAH THIRUNAVUKARASU ,  KARTHIK ELUMALAI ,  JEN SERN LEW ,  MINGWEI ZHU

IPC: C23C16/458 ,  H01L21/687 ,  H01L21/683 ,  C23C16/30

CPC classification number: C23C16/4586 ,  C23C16/303 ,  H01L21/6831 ,  H01L21/68771

Abstract: Embodiments of improved substrate carriers are provided herein. In some embodiments, a substrate carrier, includes: a multi-layered disk having upper and lower layers formed of a continuous material and an electrostatic electrode structure disposed therebetween, wherein the multi-layered disk is dimensioned and arranged so as to have a nominal dimension which exceeds a nominal dimension of a standard substrate size used in the manufacture of light emitting diode devices, and wherein the multi-layered disk is formed symmetrically about a central axis and defines a substantially planar upper surface.

公开(公告)号：US20150293363A1

公开(公告)日：2015-10-15

申请号：US14291712

申请日：2014-05-30

Applicant: APPLIED MATERIALS, INC.

Inventor： DANIEL LEE DIEHL ,  YONG CAO ,  MINGWEI ZHU ,  TAI-CHOU PAPO CHEN

IPC: G02B27/10 ,  C23C14/06 ,  G02B5/28

CPC classification number: G02B27/1013 ,  C23C14/0676 ,  G02B5/285

Abstract: Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROXNY, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OXNY, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.

Abstract translation: 本文提供光波分离晶格和形成方法。 在一些实施例中，光波分离晶格包括具有式ROXNY的第一层，其中第一层具有第一折射率; 和与第一层不同的第二层，设置在第一层上，并具有式R'OXNY，其中第二层具有不同于第一折射率的第二折射率，并且其中R和R'各自为一个 的金属或介电材料。 在一些实施例中，形成光波分离晶格的方法包括通过物理气相沉积工艺沉积具有预定折射率的第一层; 以及在所述第一层的顶部上沉积与所述第一层不同的第二层，其中所述第二层具有与所述第一折射率不同的预定的第二折射率。

公开(公告)号：US20180011331A1

公开(公告)日：2018-01-11

申请号：US15687827

申请日：2017-08-28

Applicant: APPLIED MATERIALS, INC.

Inventor： DANIEL LEE DIEHL ,  YONG CAO ,  MINGWEI ZHU ,  TAI-CHOU PAPO CHEN

IPC: G02B27/10 ,  G02B5/28 ,  C23C14/06

CPC classification number: G02B27/1013 ,  C23C14/0676 ,  G02B5/285

Abstract: Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROxNy, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OxNy, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.

公开(公告)号：US20160133782A1

公开(公告)日：2016-05-12

申请号：US14538769

申请日：2014-11-11

Applicant: APPLIED MATERIALS, INC.

Inventor： SRISKANTHARAJAH THIRUNAVUKARASU ,  KARTHIK ELUMALAI ,  JEN SERN LEW ,  MINGWEI ZHU

IPC: H01L33/00 ,  C23C16/458

CPC classification number: C23C16/4586 ,  C23C16/303 ,  H01L21/6831 ,  H01L21/68771

Abstract: Embodiments of improved substrate carriers are provided herein. In some embodiments, a substrate carrier, includes: a multi-layered disk having upper and lower layers formed of a continuous material and an electrostatic electrode structure disposed therebetween, wherein the multi-layered disk is dimensioned and arranged so as to have a nominal dimension which exceeds a nominal dimension of a standard substrate size used in the manufacture of light emitting diode devices, and wherein the multi-layered disk is formed symmetrically about a central axis and defines a substantially planar upper surface.

Abstract translation: 本文提供了改进的衬底载体的实施例。 在一些实施例中，衬底载体包括：多层盘，其具有由连续材料形成的上层和下层以及设置在其间的静电电极结构，其中所述多层盘的尺寸和布置为具有标称尺寸 其超过了用于制造发光二极管器件的标准衬底尺寸的标称尺寸，并且其中所述多层盘围绕中心轴对称地形成并且限定了基本平坦的上表面。