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1.发明申请LIGHT WAVE SEPARATION LATTICES AND METHODS OF FORMING LIGHT WAVE SEPARATION LATTICES 有权光波分离光栅和形成光波分离光栅的方法公开(公告)号：US20150293363A1
公开(公告)日：2015-10-15
申请号：US14291712
申请日：2014-05-30
Applicant: APPLIED MATERIALS, INC.
Inventor： DANIEL LEE DIEHL , YONG CAO , MINGWEI ZHU , TAI-CHOU PAPO CHEN
CPC classification number: G02B27/1013 , C23C14/0676 , G02B5/285
Abstract: Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROXNY, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OXNY, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.
Abstract translation: 本文提供光波分离晶格和形成方法。 在一些实施例中，光波分离晶格包括具有式ROXNY的第一层，其中第一层具有第一折射率; 和与第一层不同的第二层，设置在第一层上，并具有式R'OXNY，其中第二层具有不同于第一折射率的第二折射率，并且其中R和R'各自为一个 的金属或介电材料。 在一些实施例中，形成光波分离晶格的方法包括通过物理气相沉积工艺沉积具有预定折射率的第一层; 以及在所述第一层的顶部上沉积与所述第一层不同的第二层，其中所述第二层具有与所述第一折射率不同的预定的第二折射率。
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公开(公告)号：US20180011331A1
公开(公告)日：2018-01-11
申请号：US15687827
申请日：2017-08-28
Applicant: APPLIED MATERIALS, INC.
Inventor： DANIEL LEE DIEHL , YONG CAO , MINGWEI ZHU , TAI-CHOU PAPO CHEN
CPC classification number: G02B27/1013 , C23C14/0676 , G02B5/285
Abstract: Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROxNy, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OxNy, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.
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