公开(公告)号：US20180011331A1

公开(公告)日：2018-01-11

申请号：US15687827

申请日：2017-08-28

Applicant: APPLIED MATERIALS, INC.

Inventor： DANIEL LEE DIEHL ,  YONG CAO ,  MINGWEI ZHU ,  TAI-CHOU PAPO CHEN

IPC: G02B27/10 ,  G02B5/28 ,  C23C14/06

CPC classification number: G02B27/1013 ,  C23C14/0676 ,  G02B5/285

Abstract: Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROxNy, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OxNy, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.

公开(公告)号：US20200234991A1

公开(公告)日：2020-07-23

申请号：US16746285

申请日：2020-01-17

Applicant: APPLIED MATERIALS, INC.

Inventor： FRED ERIC RUHLAND ,  SUMIT S. PATANKAR ,  VIJAY D. PARKHE ,  DANIEL LEE DIEHL ,  MINGWEI ZHU ,  HIROYUKI TAKAHAMA ,  RANDY D. SCHMIEDING

IPC: H01L21/677

Abstract: Embodiments of a substrate carrier are provided herein. In some embodiments, a substrate carrier includes a base plate, wherein the base plate is a thin, solid plate with no through holes or embedded components; and a plurality of raised portions extending from the base plate, wherein the plurality of raised portions include first raised portions and second raised portions, the first raised portions disposed radially inward from the second raised portions, wherein the base plate and the plurality of raised portions define pockets configured to retain a plurality of substrates, and wherein an upper surface of the second raised portions have a greater surface area than an upper surface of the first raised portions.

公开(公告)号：US20200211769A1

公开(公告)日：2020-07-02

申请号：US16289328

申请日：2019-02-28

Applicant: APPLIED MATERIALS, INC.

Inventor： DANIEL LEE DIEHL ,  ALEXANDER LERNER ,  ROEY SHAVIV

IPC: H01F41/34 ,  H01F41/18 ,  C23C14/04

Abstract: Methods and apparatus for a magnetized substrate carrier apparatus are described herein. In some embodiments, a substrate carrier apparatus includes: a carrier plate having a support surface to support a substrate, a mask assembly disposed above the support surface, wherein the mask assembly includes an annular frame and a shadow mask disposed within the annular frame, and wherein the shadow mask includes one or more openings arranged in a predetermined pattern and disposed through the shadow mask, and one or more magnets disposed on or embedded within at least one of the carrier plate and the shadow mask to create a magnetic field above the support surface.

公开(公告)号：US20150293363A1

公开(公告)日：2015-10-15

申请号：US14291712

申请日：2014-05-30

Applicant: APPLIED MATERIALS, INC.

Inventor： DANIEL LEE DIEHL ,  YONG CAO ,  MINGWEI ZHU ,  TAI-CHOU PAPO CHEN

IPC: G02B27/10 ,  C23C14/06 ,  G02B5/28

CPC classification number: G02B27/1013 ,  C23C14/0676 ,  G02B5/285

Abstract: Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROXNY, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OXNY, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.

Abstract translation: 本文提供光波分离晶格和形成方法。 在一些实施例中，光波分离晶格包括具有式ROXNY的第一层，其中第一层具有第一折射率; 和与第一层不同的第二层，设置在第一层上，并具有式R'OXNY，其中第二层具有不同于第一折射率的第二折射率，并且其中R和R'各自为一个 的金属或介电材料。 在一些实施例中，形成光波分离晶格的方法包括通过物理气相沉积工艺沉积具有预定折射率的第一层; 以及在所述第一层的顶部上沉积与所述第一层不同的第二层，其中所述第二层具有与所述第一折射率不同的预定的第二折射率。