公开(公告)号：US20070026150A1

公开(公告)日：2007-02-01

申请号：US10559669

申请日：2004-06-30

Applicant: Takao Horiuchi ,  Azumi Horiuchi ,  Hiroaki Ogamino ,  Yasuhiro Niimura ,  Hiroshi Hattori

Inventor： Takao Horiuchi ,  Azumi Horiuchi ,  Hiroaki Ogamino ,  Yasuhiro Niimura ,  Hiroshi Hattori

IPC: C23C16/00 ,  H01L21/302

CPC classification number: C23C16/45593 ,  C23C16/4412 ,  C30B25/02 ,  H01L21/67017

Abstract: A substrate processing system is provided, which efficiently utilizes reactive substances or carrier gases necessary for the surface processing of a substrate, simplifies equipment for the gas transfer and effects energy saving. This system comprises a gas supply source 12 for supplying a process gas containing a reactive substance, a reservoir tank 14 connected to the gas supply source 12 for reserving the process gas, a reactor 10 for exposing a substrate placed therein to the process gas, a first circulation pipe 38 for introducing the process gas inside the reactor 10 into the reservoir tank 14, a second circulation pipe 42 for introducing at least part of the process gas in the reservoir tank 14 into the reactor 10, and a flow regulating valve 44 disposed in the second circulation pipe 42 for regulating the amount of process gas to be introduced into the reactor 10.

Abstract translation: 提供了一种基板处理系统，其有效利用基板表面处理所需的反应物质或载气，简化了用于气体传递的设备并且实现了节能。 该系统包括用于供给含有反应性物质的处理气体的气体供给源12，与气体供给源12连接以用于储存处理气体的储存罐14，将放置在其中的基板暴露于处理气体的反应器10， 用于将反应器10内的处理气体引入储存槽14的第一循环管38，用于将储存罐14中的至少一部分处理气体引入反应器10的第二循环管42和设置在流化床 在第二循环管42中，用于调节要引入反应器10的工艺气体的量。

公开(公告)号：US20140112815A1

公开(公告)日：2014-04-24

申请号：US14119858

申请日：2012-05-29

Applicant: Soichi Kudara ,  Yasuhiro Niimura ,  Masami Nagayama

Inventor： Soichi Kudara ,  Yasuhiro Niimura ,  Masami Nagayama

IPC: F04C13/00 ,  F04C18/12

CPC classification number: F04C13/007 ,  F04C18/126 ,  F04C23/001 ,  F04C25/02 ,  F04C27/009 ,  F04C2220/12 ,  F04C2220/30 ,  F04C2220/40 ,  F04C2240/30 ,  F04C2280/02

Abstract: A vacuum pump (10) includes a pump casing (56) having an inlet port (54a), an outlet port (54b), and pump chambers (50a-50f) defined therein, rotational shafts 60 having opposite ends rotatably supported by bearings (84a, 84b) on the pump casing (56) and extending longitudinally in the pump casing (56), and rotors (62a-62f) housed in the pump chambers (50a-50f) and coupled to the rotational shafts (60) for rotation in unison with the rotational shafts (60). The pump casing (56) has an atmosphere-vented compartment (52) defined therein which is held in fluid communication with the outlet port (54b) of the pump casing (56) and vented to the atmosphere.

Abstract translation: 真空泵（10）包括具有入口（54a），出口（54b）和限定在其中的泵室（50a-50f）的泵壳（56），具有由轴承可旋转地支撑的相对端的旋转轴60 84a，84b），并且在泵壳体（56）中纵向延伸，以及容纳在泵室（50a-50f）中并且联接到旋转轴（60）以旋转的转子（62a-62f） 与旋转轴（60）一致。 泵壳体（56）具有限定在其中的大气排放室（52），其与泵壳体（56）的出口（54b）保持流体连通并排放到大气中。

公开(公告)号：US5312192A

公开(公告)日：1994-05-17

申请号：US68173

申请日：1993-05-28

Applicant: Noburu Shimuzu ,  Yasuhiro Niimura

Inventor： Noburu Shimuzu ,  Yasuhiro Niimura

IPC: F04C18/06 ,  F04B39/02 ,  F04C18/02 ,  F04C29/02 ,  F16C33/66 ,  F16N7/18 ,  F16N7/36

CPC classification number: F16C33/6659 ,  F16N7/363 ,  F16N7/18

Abstract: A bearing lubricating structure for rotary machinery having a rotor rotatably supported by a bearing in a casing, an oil reservoir provided in a lower part of a bearing chamber accommodating the bearing, and an oil disk attached to an end of a rotating shaft of the rotor and immersed in lubricating oil in the oil reservoir so as to supply the bearing with lubricating oil splashed by the oil disk, wherein a guide groove is provided to collect lubricating oil flowing down an inner wall of a cover attached to an end of the casing; a suction nozzle is inserted into the guide groove to suck lubricating oil collected in the guide groove; a lubricant passage extends through the inside of the rotating shaft to supply the bearing with lubricating oil sucked through the suction nozzle; and an oiling nozzle is communicated with the lubricant passage and performs a pumping action induced by the rotation of the shaft, whereby a sufficiently large amount of lubricating oil is supplied to the bearing.

Abstract translation: 一种用于旋转机械的轴承润滑结构，其具有由壳体中的轴承可旋转地支撑的转子，设置在容纳轴承的轴承室的下部的储油器，以及附接到转子的旋转轴的端部的油盘 浸渍在储油器中的润滑油中，为轴承提供由油盘溅出的润滑油，其中设置有引导槽以收集沿附接到壳体的端部的盖的内壁流下的润滑油; 将吸嘴插入引导槽中以吸收在引导槽中收集的润滑油; 润滑剂通道延伸穿过旋转轴的内部，为轴承提供通过吸嘴吸入的润滑油; 并且上油嘴与润滑剂通道连通，并且进行由轴的旋转引起的泵送作用，从而向轴承供给足够大量的润滑油。

公开(公告)号：US20090087564A1

公开(公告)日：2009-04-02

申请号：US12289066

申请日：2008-10-20

Applicant: Takao Horiuchi ,  Azumi Horiuchi ,  Hiroaki Ogamino ,  Yasuhiro Niimura ,  Hiroshi Hattori

Inventor： Takao Horiuchi ,  Azumi Horiuchi ,  Hiroaki Ogamino ,  Yasuhiro Niimura ,  Hiroshi Hattori

IPC: C23C16/455

CPC classification number: C23C16/45593 ,  C23C16/4412 ,  C30B25/02 ,  H01L21/67017

Abstract: A substrate processing system which utilizes reactive substances or carrier gases to process the surface of a substrate is provided. The system includes a gas supply source for supplying a process gas containing a reactive substance, a reservoir tank connected to the gas supply source for reserving the process gas, a reactor for exposing a substrate placed therein to the process gas, a first circulation pipe for circulating the process gas inside the reactor to the reservoir tank, a second circulation pipe for circulating at least part of the process gas in the reservoir tank to the reactor, and a flow regulating valve disposed in the second circulation pipe for controlling the amount of process gas introduced into the reactor.

Abstract translation: 提供了利用反应物质或载气来处理基板表面的基板处理系统。 该系统包括用于供应包含反应物质的处理气体的气体供应源，连接到用于储存处理气体的气体供应源的储存罐，用于将放置在其中的基板暴露于处理气体的反应器，用于 将反应器内的工艺气体循环到储罐中，将第二循环管道循环到储罐中的至少一部分处理气体到达反应器;以及流量调节阀，其设置在第二循环管道中，用于控制处理量 气体引入反应器。

公开(公告)号：US5746790A

公开(公告)日：1998-05-05

申请号：US696228

申请日：1996-08-13

Applicant: Yasuhiro Niimura ,  Tetsuma Ikegami ,  Naoya Hanafusa ,  Masaru Nakaniwa

Inventor： Yasuhiro Niimura ,  Tetsuma Ikegami ,  Naoya Hanafusa ,  Masaru Nakaniwa

IPC: B01D45/16 ,  B01D45/18

CPC classification number: B01D45/16

Abstract: A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap includes a casing, a passage defining member disposed in the casing and defining a gas passage in the casing, and an intermediate member disposed between the casing and the passage defining member. The intermediate member is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing.

Abstract translation: 用于收集固体的陷阱连接到真空泵的排气口或吸入口，用于捕获与由真空泵排出的升华气体分离的固体材料。 捕集器包括壳体，设置在壳体中并限定在壳体中的气体通道的通道限定构件以及设置在壳体和通道限定构件之间的中间构件。 中间构件由形成为管状构件的扁平薄片制成，并且当从壳体中取出时，管状构件能够扩展。

公开(公告)号：US5173041A

公开(公告)日：1992-12-22

申请号：US757954

申请日：1991-09-12

Applicant: Yasuhiro Niimura ,  Harumitsu Saito

Inventor： Yasuhiro Niimura ,  Harumitsu Saito

IPC: F04C23/00 ,  F04C25/02 ,  F04C28/28 ,  F04C29/00

CPC classification number: F04C28/28 ,  F04C23/001 ,  F04C29/0092

Abstract: A multistage vacuum pump including a plural set of two lobe type vacuum pumps arranged on a common shaft for rotors and in a common casing. The adjacent pumps are connected in series with each other through a communicating passage formed in a pump casing. A solid material collector having a cooling device is provided in the communicating passage so that it is dismountable from the pump casing. A solid component in a compressed gas is forcibly produced by and adhered to the solid material collector. Thus, it is not necessary to disassemble the pump casing for cleaning the same.

公开(公告)号：US06332925B1

公开(公告)日：2001-12-25

申请号：US08861007

申请日：1997-05-21

Applicant: Nobuharu Noji ,  Yasuhiro Niimura ,  Hiroaki Ogamino ,  Hiroshi Hattori ,  Norihiko Nomura ,  Tetsuro Sugiura ,  Yuji Matsuoka

Inventor： Nobuharu Noji ,  Yasuhiro Niimura ,  Hiroaki Ogamino ,  Hiroshi Hattori ,  Norihiko Nomura ,  Tetsuro Sugiura ,  Yuji Matsuoka

IPC: C23C1600

CPC classification number: C23C16/4412 ,  B01D53/002 ,  F25B21/02 ,  Y02C20/30

Abstract: An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.

Abstract translation: 公开了一种使用寿命长，结构紧凑，可靠性高的疏散系统。 该系统能够使工艺气体重复使用，从而降低资本投资和运营的总体成本。 该系统包括处理室和通过用于抽空处理室的抽空管道与处理室连通的真空泵。 排气管设有不少于两个串联布置的捕集装置，并在不同温度下操作，用于捕获从处理室排出的废气中所含的不同组分。

公开(公告)号：US06251192B1

公开(公告)日：2001-06-26

申请号：US09252236

申请日：1999-02-18

Applicant: Takeshi Kawamura ,  Yasuhiro Niimura

Inventor： Takeshi Kawamura ,  Yasuhiro Niimura

IPC: C23C1600

CPC classification number: C23C16/54 ,  C23C16/4412

Abstract: A vacuum exhaust system can improve the operating efficiency of the vacuum exhaust system while reducing the system cost, to quickly attain a vacuum in the auxiliary chambers without increasing the size of the vacuum pumps. The vacuum exhaust system comprises a first pumping section and a second pumping section disposed downstream of and in series with the first pumping section. A main exhaust passage is provided to communicate a main chamber with a suction port of the first pumping section, and an auxiliary exhaust passage is provided to communicate an auxiliary chamber with a suction port of the second pumping section.

Abstract translation: 真空排气系统可以在降低系统成本的同时提高真空排气系统的运行效率，从而在不增加真空泵的尺寸的情况下在辅助室中快速获得真空。 真空排气系统包括设置在第一泵送部分下游并与第一泵送部分串联的第一泵送部分和第二泵送部分。 主排气通道设置成使主室与第一抽水部分的吸入口连通，并且设置辅助排气通道以使辅助室与第二抽水部分的吸入口连通。