Variable optical attenuator derived from sol-gel material and manufacturing method thereof
    5.
    发明授权
    Variable optical attenuator derived from sol-gel material and manufacturing method thereof 有权
    衍生自溶胶 - 凝胶材料的可变光衰减器及其制造方法

    公开(公告)号:US07142766B2

    公开(公告)日:2006-11-28

    申请号:US10940083

    申请日:2004-09-14

    CPC classification number: G02F1/011 G02B6/266 G02F2203/48

    Abstract: A variable optical attenuator and a method of manufacturing thereof are described. First, a bottom cladding is formed on a substrate. A waveguide structure having a core region and an attenuation region is subsequently formed on the bottom cladding by photolithography. A top cladding is then formed on the bottom cladding and the waveguide structure, and an electrode is next disposed thereon and is aligned above the attenuation region of the waveguide structure. Further, the waveguide structure is composed of a sol-gel material, which is obtained by mixing a solution of metal alkoxide with a solution of organically modified Si-alkoxide and heating the same.

    Abstract translation: 描述了可变光衰减器及其制造方法。 首先,在基板上形成底部包层。 随后通过光刻法在底部包层上形成具有芯区域和衰减区域的波导结构。 然后在底部包层和波导结构上形成顶部包层,并且接着将电极放置在其上并且在波导结构的衰减区域的上方对齐。 此外,波导结构由溶胶 - 凝胶材料组成,其通过将金属醇盐溶液与有机改性的Si-醇盐溶液混合并加热而获得。

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