摘要:
The present invention provides a method for controlling a critical dimension of shallow trench isolations in a STI etch process, comprises the following steps: before the STI etch process, pre-establishing a mapping relation between a post-etch and pre-etch critical dimension difference of a BARC layer and a thickness of the BARC layer; and during the STI etch process after coating the BARC layer, measuring the thickness of the BARC layer and determining a trimming time for a hard mask layer according to a critical dimension difference corresponding to the measured thickness in the mapping relation and a critical dimension of a photoresist pattern, then performing a trimming process for the hard mask layer lasting the trimming time to make a critical dimension of the hard mask layer equal to a required critical dimension of an active area, and etching a substrate to form shallow trenches with a predetermined critical dimension.
摘要:
The present invention provides a method for controlling a critical dimension of shallow trench isolations in a STI etch process, comprises the following steps: before the STI etch process, pre-establishing a mapping relation between a post-etch and pre-etch critical dimension difference of a BARC layer and a thickness of the BARC layer; and during the STI etch process after coating the BARC layer, measuring the thickness of the BARC layer and determining a trimming time for a hard mask layer according to a critical dimension difference corresponding to the measured thickness in the mapping relation and a critical dimension of a photoresist pattern, then performing a trimming process for the hard mask layer lasting the trimming time to make a critical dimension of the hard mask layer equal to a required critical dimension of an active area, and etching a substrate to form shallow trenches with a predetermined critical dimension.
摘要:
Techniques are described for distinguishing between treatable and non-treatable heart rhythms. A medical device that operates in accordance with the techniques analyzes characteristics over several cardiac event intervals to detect initiation of a sudden rate onset. After detection of the initiation of the sudden rate onset, the IMD analyzes a morphology of an EGM associated with a selected cardiac event within the first several beats after the initiation of sudden rate onset. In one example, the IMD analyzes the morphology of the EGM associated with the first cardiac event immediately subsequent to the initiation of the sudden rate onset. If the morphology of the EGM of the selected cardiac event is abnormal compared to template EGM, the rhythm is classified as treatable. Otherwise, the rhythm is classified as non-treatable.
摘要:
Techniques for reducing inappropriate tachyarrhythmia therapy and associated medical device systems are described. In some examples a processor is enabled to receive a cardiac electrical signal representative of electrical activity of a heart of a patient and provide an indication of cardiac electrical signal reliability. A heart sound analyzing module is enabled to receive the indication of cardiac electrical signal reliability and a heart sound signal representing sounds generated by the heart of the patient and generated by a heart sound sensor. The heart sound analyzing module selectively determines an ensemble averaged heart sound signal or detects a plurality of heart sounds from the heart sound signal in response to the indication of cardiac electrical signal reliability.
摘要:
An implantable medical device receives both heart sound and electrogram signals. A processor within the implantable medical device extracts physiologically relevant information from both the heart sound signal and the electrogram signal. Based on the extracted physiologically relevant information a set of pacing parameters is evaluated. In certain examples, the values of the pacing parameters may be changed by the implantable medical device in response to the physiologically relevant information extracted from the heart sound signal and the electrogram signal.
摘要:
A medical device and associated method for monitoring a patient's heart rhythm sense cardiac events and detect a sudden change in the heart rhythm in response to the sensed cardiac events. Detecting the sudden change includes determining a variability of intervals between the sensed cardiac events and switching between a low variability mode of operation and a high variability mode of operation in response to the variability of intervals. During the low variability mode, detecting the sudden change includes detecting an increase in the rate of cardiac events. During the high variability mode, detecting the sudden change includes detecting a sudden decrease in the variability of the cardiac event intervals. A concerning cardiac rhythm is detected in response to detecting the sudden change.
摘要:
A method of detecting a cardiac event that includes sensing cardiac signals from a plurality of electrodes, determining rates of change of the sensed cardiac signals, and determining a range of the sensed cardiac signals. The sensed cardiac signals are detected as being associated with the cardiac event in response to the determined rates of change and the determined range.
摘要:
A system and method for use in a medical device for discriminating cardiac events establishes population-based thresholds corresponding to cardiac signal morphology metrics for discriminating between a first cardiac event and a second cardiac event. A population-based threshold criterion for discriminating cardiac events is established. The population-based threshold criterion is applied to a cardiac signal segment and the segment is classified if the criterion is satisfied. A patient-specific threshold is established in response to the sensed cardiac signal segment not being classified after applying the population-based threshold criterion. The sensed signal segment is classified in response to the patient-specific threshold comparison.
摘要:
Techniques for detecting heart sounds to reduce inappropriate tachyarrhythmia therapy are described. In some examples, a medical device determines that a cardiac rhythm of the patient is treatable with a therapy, such as a defibrillation pulse, based on a cardiac electrogram (EGM). The medical device analyzes detected heart sounds, and withholds or allows the therapy based on the analysis of the heart sounds.
摘要:
A method and apparatus for detecting a cardiac event in a medical device determine an activity level count from an activity sensor signal for each of a number of time segments, store an activity level count for each of the time segments in a histogram, and accumulate the stored activity level counts to determine a percentage of time segments having an activity level count above a given activity level count.