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1.发明申请Fluorinated polymers useful as photoresists, and processes for microlithography 失效用作光致抗蚀剂的氟化聚合物，以及微光刻法公开(公告)号：US20060166129A1
公开(公告)日：2006-07-27
申请号：US10523490
申请日：2003-08-19
IPC分类号： C08F16/24
CPC分类号： C08F232/00 , C08F8/12 , C08F214/18 , C08F214/26 , C08F220/24 , C08F220/26 , C08F232/08 , C08F2800/20 , G03F7/0046 , G03F7/0395
摘要： This invention provides a fluorine-containing copolymer having a repeat unit derived from at least one fluorinated olefin and a repeat unit derived from at least one polycyclic ethylenically unsaturated monomer having pendant hydroxyl or esterified hydroxyl groups, and optionally other repeat units, typically derived from an acrylate. These polymers have high transparency at short wavelengths such as 193 nm and 157 nm, and provide good plasma etch resistance and adhesive properties. Also provided are photoresist compositions and substrates coated therewith.
摘要翻译： 本发明提供了含有至少一种氟化烯烃的重复单元和衍生自至少一种具有羟基或酯化羟基的多环烯属不饱和单体的重复单元的含氟共聚物，以及任选的其它重复单元，通常衍生自 丙烯酸酯。 这些聚合物在短波长如193nm和157nm处具有高透明度，并且提供良好的等离子体耐蚀刻性和粘合性。 还提供了光刻胶组合物和其上涂覆的基材。
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2.发明申请Fluorinated polymers having polycyclic groups with fused 4-membered carbocyclic rings, useful as photoresists, and processes for microlithography 失效具有稠合的4元碳环多环基团的氟化聚合物，可用作光致抗蚀剂，以及用于微光刻公开(公告)号：US20050277052A1
公开(公告)日：2005-12-15
申请号：US10523491
申请日：2003-08-08
IPC分类号： C08F8/00 , C08F214/18 , C08F214/26 , C08F216/12 , C08F220/24 , C08F232/00 , C08F232/08 , G03C1/492 , G03F7/004 , G03F7/038 , G03F7/039 , H01L21/027
CPC分类号： C08F214/18 , C08F214/26 , C08F220/24 , C08F232/08 , G03F7/0046 , G03F7/0382 , G03F7/0395 , Y10S430/106 , Y10S430/108 , Y10S430/111
摘要： This invention provides novel fluorine containing polymers which comprise at least one fluorinated olefin, at least one polycyclic ethylenically unsaturated monomer with a fused 4-membered carbocyclic ring and, optionally, other components. The polymers are useful for photoimaging compositions and, in particular, photoresist compositions (positive-working and/or negative-working) for imaging in the production of semiconductor devices. The polymers are especially useful in photoresist compositions having high UV transparency (particularly at short wavelengths, e.g., 157 nm) which are useful as base resins in resists and potentially in many other applications.
摘要翻译： 本发明提供新颖的含氟聚合物，其包含至少一种氟化烯烃，至少一种具有稠合的4元碳环的多烯键式不饱和单体和任选的其它组分。 聚合物可用于光成像组合物，特别是用于制造半导体器件的成像的光致抗蚀剂组合物（正性和/或负性）。 聚合物特别适用于具有高UV透明度（特别是短波长，例如157nm）的光致抗蚀剂组合物，其可用作抗蚀剂中的基础树脂并且潜在地在许多其它应用中。
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3.发明申请Fluorinated monomers, fluorinated polymers having polycyclic groups with fused 4-membered heterocyclic rings, useful as photoresists, and processes for microlithography 失效氟化单体，具有稠合4-元杂环的多环基的氟化聚合物，可用作光致抗蚀剂，以及用于微光刻公开(公告)号：US20060167284A1
公开(公告)日：2006-07-27
申请号：US10523489
申请日：2003-08-08
IPC分类号： C07D311/74 , C07D205/12
CPC分类号： G03F7/0046 , C07D205/12 , C07D305/14 , C07D493/10 , C08F232/08 , G03F7/0382 , G03F7/0395
摘要： The present invention provides novel fluorine-containing copolymers which comprise at least one fluorinated olefin, at least one polycyclic ethylenically unsaturated monomer with a fused 4-membered heterocyclic ring and, optionally, other components. The copolymers are useful for photoimaging compositions and, in particular, photoresist compositions (positive-working and/or negative-working) for imaging in the production of semiconductor devices. The copolymers are especially useful in photoresist compositions having high UV transparency (particularly at short wavelengths, e.g., 157 nm) which are useful as base resins in resists and potentially in many other applications.
摘要翻译： 本发明提供新的含氟共聚物，其包含至少一种氟化烯烃，至少一种具有稠合的4-元杂环的多环烯属不饱和单体和任选的其它组分。 共聚物可用于光成像组合物，特别是用于制造半导体器件的成像的光致抗蚀剂组合物（正性和/或负性）。 该共聚物特别可用于具有高UV透明度（特别是短波长，例如157nm）的光致抗蚀剂组合物，其可用作抗蚀剂中的潜在的许多其它应用中的基础树脂。
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公开(公告)号：US20080039651A1
公开(公告)日：2008-02-14
申请号：US11578268
申请日：2005-05-11
申请人： William Farnham
发明人： William Farnham
IPC分类号： C07C327/00 , C07C315/00
CPC分类号： C08F2/38 , C07C329/00
摘要： This invention provides an efficient method for synthesizing trithiocarbonate RAFT agents, RSC(S)SR′, that can be used in the living polymerization of methacrylates and other olefinic monomers. This invention also provides an efficient method of synthesizing bis(alkylsulfanylthiocarbonyl) disulfides that are useful as intermediates in the synthesis of trithiocarbonate RAFT agents.
摘要翻译： 本发明提供了可用于甲基丙烯酸酯和其它烯烃单体的活性聚合中的三硫代碳酸酯RAFT试剂RSC（S）SR'的有效方法。 本发明还提供了合成双（烷基硫烷基硫代羰基）二硫化物的有效方法，其可用作合成三硫代碳酸酯RAFT试剂的中间体。
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5.发明申请Low-polydispersity photoimageable acrylic polymers, photoresists and processes for microlithography 有权低分散度可光成像丙烯酸聚合物，光致抗蚀剂和微光刻工艺公开(公告)号：US20050119378A1
公开(公告)日：2005-06-02
申请号：US10943063
申请日：2004-09-16
申请人： William Farnham , Michael Fryd , Frank Schadt
发明人： William Farnham , Michael Fryd , Frank Schadt
IPC分类号： C07C35/29 , C07C69/54 , C08F2/38 , C08F20/10 , C08F20/22 , C09D133/14 , G03F7/004 , G03F7/038 , G03F7/039 , C08K5/34 , C08F4/00 , C08K5/00
CPC分类号： G03F7/0046 , C07C35/29 , G03F7/0382 , G03F7/0397 , Y10S430/108
摘要： The invention pertains to low polydispersity acrylic polymers useful for photoimaging and photoresist compositions, and to the photoimaging processes which use these compositions. The low polydispersity polymers of this invention are prepared using controlled radical polymerization (CRP) techniques, such as RAFT (reversible addition fragmentation chain transfer) polymerization.
摘要翻译： 本发明涉及用于光成像和光致抗蚀剂组合物的低分散性丙烯酸聚合物以及使用这些组合物的光成像方法。 使用可控自由基聚合（CRP）技术如RAFT（可逆加成断裂链转移）聚合制备本发明的低多分散性聚合物。
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公开(公告)号：US20070225447A1
公开(公告)日：2007-09-27
申请号：US11578226
申请日：2005-05-11
申请人： William Farnham , Graeme Moad , San Hoa Thang , Ezio Rizzardo , Michael Fryd
发明人： William Farnham , Graeme Moad , San Hoa Thang , Ezio Rizzardo , Michael Fryd
IPC分类号： C08F8/00
CPC分类号： C08F8/04 , C08F2438/03 , C08F2800/10 , C08F2800/20 , C08F2220/281 , C08F2220/1833 , C08F212/14 , C08F2220/1825 , C08F220/14 , C08F212/08
摘要： This invention provides a method for removing certain sulfur-containing groups from polymers, especially those made via RAFT polymerization processes.
摘要翻译： 本发明提供从聚合物中去除某些含硫基团的方法，特别是通过RAFT聚合方法制备的那些。
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公开(公告)号：US20070123729A1
公开(公告)日：2007-05-31
申请号：US11289108
申请日：2005-11-29
申请人： William Farnham
发明人： William Farnham
IPC分类号： C07C329/00
CPC分类号： C07C329/00
摘要： This invention provides an efficient method for synthesizing trithiocarbonates, RSC(S)SR′ that can be used, for example, as RAFT agents in the living polymerization of styrenics, acrylates, and other olefinic monomers.
摘要翻译： 本发明提供了一种用于合成三硫代碳酸酯RSC（S）SR'的有效方法，其可以用作例如苯乙烯类，丙烯酸酯和其它烯烃单体的活性聚合中的RAFT试剂。
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8.发明申请公开(公告)号：US20050239984A1
公开(公告)日：2005-10-27
申请号：US10523492
申请日：2003-08-08
IPC分类号： C08F8/00 , C08F12/20 , C08F214/18 , C08F214/26 , C08F232/00 , C08F232/08 , G03F7/00 , G03F7/004 , G03F7/038 , G03F7/039 , H01L21/027
CPC分类号： C08F214/26 , C08F214/18 , C08F232/08 , G03F7/0046 , G03F7/0382 , G03F7/0395
摘要： The invention provides a polymer having (a) at least one repeat unit derived from an ethylenically unsaturated compound having at least one fluorine atom covalently attached to an ethylenically unsaturated carbon atom; and (b) at least one repeat unit derived from an ethylenically unsaturated cyclic compound of structure: (I) wherein n is 0, 1, or 2; and R2 to R4 are independently H; C1-C10 alkyl or alkoxy, optionally substituted by halogen or ether oxygens; or C6-C20 aryl. These polymers can be used in making photoresist compositions and coated substrates.
摘要翻译： 本发明提供了一种聚合物，其具有（a）至少一种衍生自具有至少一个与烯属不饱和碳原子共价连接的氟原子的烯属不饱和化合物的重复单元; 和（b）衍生自以下结构的烯属不饱和环状化合物的至少一个重复单元：（I）其中n为0,1或2; R 2和R 4独立地是H; C 1 -C 10烷基或烷氧基，任选被卤素或醚氧取代; 或C 6 -C 20芳基。 这些聚合物可用于制备光致抗蚀剂组合物和涂覆的基材。
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公开(公告)号：US20050153014A1
公开(公告)日：2005-07-14
申请号：US10754209
申请日：2004-01-09
CPC分类号： C12G3/04
摘要： The invention is directed to creamy alcoholic beverages comprising wine and/or spirits and creamer, wherein the creamer is emulsified within the wine and/or spirit and the creamy alcoholic beverage is storage stable at a temperature of about 20° C. to about 25° C. for at least one year. Optionally, the creamy alcoholic beverage may include pectin and does not excessively foam. The wine may be treated to substantially remove or deactivate proteolytic enzymes within the wine using at least one of heat treatment, column adsorption, clay adsorption, tangential filtration, or ultra-filtration.
摘要翻译： 本发明涉及包含葡萄酒和/或烈酒和奶精的乳状含酒精饮料，其中奶精在葡萄酒和/或精神内乳化，并且奶油醇饮料在约20℃至约25℃的温度下储存稳定 C.至少一年。 任选地，乳状酒精饮料可以包括果胶，并且不会过度发泡。 可以使用热处理，柱吸附，粘土吸附，切向过滤或超滤中的至少一种来处理酒以基本上去除或去活葡萄酒中的蛋白水解酶。
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