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公开(公告)号:US06548162B1
公开(公告)日:2003-04-15
申请号:US09490894
申请日:2000-01-27
申请人: Mitsuyoshi Machida , Koichi Hayashi , Hirotaka Ishibashi , Tomoyasu Ichiki , Masaaki Ito , Masami Ando , Atsushi Kitamura , Toshihiro Aoshima , Katsuhiro Kawakami , Satoshi Horiuchi , Makoto Hayakawa
发明人: Mitsuyoshi Machida , Koichi Hayashi , Hirotaka Ishibashi , Tomoyasu Ichiki , Masaaki Ito , Masami Ando , Atsushi Kitamura , Toshihiro Aoshima , Katsuhiro Kawakami , Satoshi Horiuchi , Makoto Hayakawa
IPC分类号: B32B516
CPC分类号: C04B41/009 , C04B41/5022 , C04B41/86 , C04B2111/00336 , Y10T428/24926 , Y10T428/265 , Y10T428/2982 , Y10T428/31 , C04B33/00
摘要: Sanitary wares having a controlled surface are disclosed which are less likely to be stained or soiled and/or possess excellent gloss. The first sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface glaze layer has a center line average roughness Ra of less than 0.07 &mgr;m. This sanitary ware is advantageous in that stains or soils are much less likely to be adhered to the surface thereof and, even when adhered to the surface thereof, can be removed by a weak water stream. The second sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface glaze layer has a kurtosis Rku of less than 2.70. This sanitary ware advantageously possesses excellent surface gloss. The third sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body, wherein the surface of the surface glaze layer consists essentially of a vitreous component and is free from silica particles having a particle diameter of not less than 10 &mgr;m. This sanitary ware is advantageous in that stains or soils are less likely to be adhered to the surface thereof.
摘要翻译: 公开了具有受控表面的卫生用品,其不太可能被染色或污染和/或具有优异的光泽。 第一卫生洁具包括卫生洁具主体和设置在卫生洁具主体上的表面釉层,其中表面釉层的中心线平均粗糙度Ra小于0.07μm。 这种卫生洁具的优点在于,污渍或土壤不太可能附着在其表面上,并且即使当粘附到其表面时也可以通过弱水流除去。 第二卫生洁具包括卫生洁具主体和设置在卫生洁具主体上的表面釉层,其中表面釉层的峭度Rku小于2.70。 这种卫生洁具有利地具有优异的表面光泽度。 第三卫生洁具包括卫生洁具主体和设置在卫生洁具主体上的表面釉层,其中表面釉层的表面主要由玻璃质成分组成,不含粒径不小于10的二氧化硅颗粒 妈妈 这种卫生洁具的优点在于,污渍或污垢不太可能附着在其表面上。
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公开(公告)号:US20130201597A1
公开(公告)日:2013-08-08
申请号:US13816037
申请日:2011-08-11
IPC分类号: H01L21/683
CPC分类号: H01L21/6833 , B23Q3/15 , B32B3/30 , B32B5/14 , B32B5/142 , B32B5/147 , H01L21/6875 , H02N13/00 , Y10T279/23 , Y10T428/24182 , Y10T428/24355 , Y10T428/24479 , Y10T428/24942 , Y10T428/26
摘要: An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface.
摘要翻译: 静电卡盘包括:具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面,并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分,并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生,并且可以容易地恢复静电卡盘表面的清洁状态。
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公开(公告)号:US20090284893A1
公开(公告)日:2009-11-19
申请号:US12454030
申请日:2009-05-11
申请人: Masami Ando , Toshihiro Aoshima
发明人: Masami Ando , Toshihiro Aoshima
IPC分类号: H01L21/683
CPC分类号: H01L21/6833 , B82Y30/00 , C04B35/111 , C04B35/6455 , C04B2235/3217 , C04B2235/3232 , C04B2235/5445 , C04B2235/5454 , C04B2235/652 , C04B2235/6582 , C04B2235/661 , C04B2235/77 , C04B2235/786 , C04B2235/963
摘要: An electrostatic chuck of the invention includes a ceramic dielectric made of a sintered body containing alumina and titanium oxide, with maximum particle size of segregation bodies of titanium compounds being smaller than average particle size of alumina, the ceramic dielectric having a volume resistivity of 108 Ωcm or more and 1013 Ωcm or less at room temperature.
摘要翻译: 本发明的静电吸盘包括由包含氧化铝和氧化钛的烧结体制成的陶瓷电介质,钛化合物的偏析体积的最大粒度小于氧化铝的平均粒度,陶瓷电介质的体积电阻率为108欧姆 或更高,在室温下为1013Ω或更小。
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公开(公告)号:US20130201598A1
公开(公告)日:2013-08-08
申请号:US13816050
申请日:2011-08-11
IPC分类号: H02N13/00
CPC分类号: H02N13/00 , B23Q3/152 , H01L21/6833
摘要: An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and a method for manufacturing the electrostatic chuck is provided.
摘要翻译: 静电卡盘包括:具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面,并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分,并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生,并且提供了制造静电卡盘的方法。
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公开(公告)号:US09030798B2
公开(公告)日:2015-05-12
申请号:US13816037
申请日:2011-08-11
IPC分类号: H01L21/683 , B32B3/30 , B32B5/14 , H01L21/687 , H02N13/00 , B23Q3/15
CPC分类号: H01L21/6833 , B23Q3/15 , B32B3/30 , B32B5/14 , B32B5/142 , B32B5/147 , H01L21/6875 , H02N13/00 , Y10T279/23 , Y10T428/24182 , Y10T428/24355 , Y10T428/24479 , Y10T428/24942 , Y10T428/26
摘要: An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface.
摘要翻译: 静电卡盘包括:具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面,并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分,并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生,并且可以容易地恢复静电卡盘表面的清洁状态。
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公开(公告)号:US08971010B2
公开(公告)日:2015-03-03
申请号:US13816050
申请日:2011-08-11
IPC分类号: H01T23/00 , H02N13/00 , B23Q3/152 , H01L21/683
CPC分类号: H02N13/00 , B23Q3/152 , H01L21/6833
摘要: An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and a method for manufacturing the electrostatic chuck is provided.
摘要翻译: 静电卡盘包括:具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面,并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分,并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生,并且提供了制造静电卡盘的方法。
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公开(公告)号:US06699606B2
公开(公告)日:2004-03-02
申请号:US10358590
申请日:2003-02-05
申请人: Mitsuyoshi Machida , Koichi Hayashi , Hirotaka Ishibashi , Tomoyasu Ichiki , Masaaki Ito , Masami Ando , Atsushi Kitamura , Toshihiro Aoshima , Katsuhiro Kawakami , Satoshi Horiuchi , Makoto Hayakawa
发明人: Mitsuyoshi Machida , Koichi Hayashi , Hirotaka Ishibashi , Tomoyasu Ichiki , Masaaki Ito , Masami Ando , Atsushi Kitamura , Toshihiro Aoshima , Katsuhiro Kawakami , Satoshi Horiuchi , Makoto Hayakawa
IPC分类号: B32B900
CPC分类号: C04B41/009 , C04B41/5022 , C04B41/86 , C04B2111/00336 , Y10T428/24926 , Y10T428/265 , Y10T428/2982 , Y10T428/31 , C04B33/00
摘要: A sanitary ware comprises a sanitary ware body and a surface glaze layer provided on the sanitary ware body. The surface glaze layer has a center line average roughness Ra of less than 0.07 &mgr;m as measured with a stylus type surface roughness tester according to JIS B 0651-1996.
摘要翻译: 卫生洁具包括卫生洁具主体和设置在卫生洁具主体上的表面釉层。 表面釉层的中心线平均粗糙度Ra小于0.07μm,用根据JIS B 0651-1996的触针式表面粗糙度测试仪测量。
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