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公开(公告)号：US20130201597A1
公开(公告)日：2013-08-08
申请号：US13816037
申请日：2011-08-11
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , B23Q3/15 , B32B3/30 , B32B5/14 , B32B5/142 , B32B5/147 , H01L21/6875 , H02N13/00 , Y10T279/23 , Y10T428/24182 , Y10T428/24355 , Y10T428/24479 , Y10T428/24942 , Y10T428/26
摘要： An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface.
摘要翻译： 静电卡盘包括：具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面，并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分，并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生，并且可以容易地恢复静电卡盘表面的清洁状态。
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公开(公告)号：US20130201598A1
公开(公告)日：2013-08-08
申请号：US13816050
申请日：2011-08-11
IPC分类号： H02N13/00
CPC分类号： H02N13/00 , B23Q3/152 , H01L21/6833
摘要： An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and a method for manufacturing the electrostatic chuck is provided.
摘要翻译： 静电卡盘包括：具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面，并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分，并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生，并且提供了制造静电卡盘的方法。
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公开(公告)号：US09030798B2
公开(公告)日：2015-05-12
申请号：US13816037
申请日：2011-08-11
IPC分类号： H01L21/683 , B32B3/30 , B32B5/14 , H01L21/687 , H02N13/00 , B23Q3/15
CPC分类号： H01L21/6833 , B23Q3/15 , B32B3/30 , B32B5/14 , B32B5/142 , B32B5/147 , H01L21/6875 , H02N13/00 , Y10T279/23 , Y10T428/24182 , Y10T428/24355 , Y10T428/24479 , Y10T428/24942 , Y10T428/26
摘要： An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface.
摘要翻译： 静电卡盘包括：具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面，并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分，并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生，并且可以容易地恢复静电卡盘表面的清洁状态。
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公开(公告)号：US08971010B2
公开(公告)日：2015-03-03
申请号：US13816050
申请日：2011-08-11
IPC分类号： H01T23/00 , H02N13/00 , B23Q3/152 , H01L21/683
CPC分类号： H02N13/00 , B23Q3/152 , H01L21/6833
摘要： An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and a method for manufacturing the electrostatic chuck is provided.
摘要翻译： 静电卡盘包括：具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面，并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分，并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生，并且提供了制造静电卡盘的方法。
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