公开(公告)号：US09030798B2

公开(公告)日：2015-05-12

申请号：US13816037

申请日：2011-08-11

申请人： Kaduko Ishikawa ,  Junji Yonezawa ,  Toshihiro Aoshima ,  Yoshihide Hayashida

发明人： Kaduko Ishikawa ,  Junji Yonezawa ,  Toshihiro Aoshima ,  Yoshihide Hayashida

IPC分类号： H01L21/683 ,  B32B3/30 ,  B32B5/14 ,  H01L21/687 ,  H02N13/00 ,  B23Q3/15

CPC分类号： H01L21/6833 ,  B23Q3/15 ,  B32B3/30 ,  B32B5/14 ,  B32B5/142 ,  B32B5/147 ,  H01L21/6875 ,  H02N13/00 ,  Y10T279/23 ,  Y10T428/24182 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24942 ,  Y10T428/26

摘要： An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface.

摘要翻译： 静电卡盘包括：具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面，并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分，并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生，并且可以容易地恢复静电卡盘表面的清洁状态。

公开(公告)号：US5407639A

公开(公告)日：1995-04-18

申请号：US953356

申请日：1992-09-30

申请人： Toshiya Watanabe ,  Yuji Aso ,  Eiichi Kojima ,  Yoshihide Hayashida

发明人： Toshiya Watanabe ,  Yuji Aso ,  Eiichi Kojima ,  Yoshihide Hayashida

IPC分类号： C01B13/11 ,  H01T23/00

CPC分类号： C01B13/11 ,  C01B2201/22 ,  C01B2201/32 ,  C01B2201/34

摘要： A method of manufacturing a corona discharge device suitable for use as an ozonizer capable of producing a controlled small amount of ozone throughout a prolonged service life. A foreproduct of corona discharge device (50) is first prepared which is provided with first and second planar electrodes (54; 56) capacitively coupled with each other by a third floating electrode (64) which is coated by a protective layer (68) of chemically-resistive electrically-insulatingmaterial. A high frequency alternating voltage having a voltage level higher than an initial minimum flashover voltage level of the foreproduct is then applied until the protective layer is aged. Aging of the protective layer is effective in lowering the initial minimum flashover voltage of the final product thus obtained as well as in reducing any fluctuation of the initial minimum flashover voltage that would otherwise occur from product to product. Various other features are also disclosed.

摘要翻译： 一种电晕放电装置的制造方法，其适用于能够在长时间使用寿命期间产生受控制的少量臭氧的臭氧发生器。 首先制备电晕放电装置（50）的前置产品，其中第一和第二平面电极（54; 56）通过第三浮动电极（64）彼此电容耦合，第三浮动电极（64）被涂覆有保护层 化学电阻电绝缘材料。 然后施加具有高于前产品的初始最小闪络电压电平的电压电平的高频交流电压，直到保护层老化。 保护层的老化可有效降低由此获得的最终产品的初始最小闪络电压以及减少否则从产品到产品发生的初始最小闪络电压的任何波动。 还公开了各种其它特征。

公开(公告)号：US20130201597A1

公开(公告)日：2013-08-08

申请号：US13816037

申请日：2011-08-11

申请人： Kaduko Ishikawa ,  Junji Yonezawa ,  Toshihiro Aoshima ,  Yoshihide Hayashida

发明人： Kaduko Ishikawa ,  Junji Yonezawa ,  Toshihiro Aoshima ,  Yoshihide Hayashida

IPC分类号： H01L21/683

CPC分类号： H01L21/6833 ,  B23Q3/15 ,  B32B3/30 ,  B32B5/14 ,  B32B5/142 ,  B32B5/147 ,  H01L21/6875 ,  H02N13/00 ,  Y10T279/23 ,  Y10T428/24182 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24942 ,  Y10T428/26

摘要： An electrostatic chuck comprises: a dielectric substrate having a protrusion and a planar surface part. The protrusion is formed on a major surface of the dielectric substrate. An adsorption target material is mounted on the major surface. The planar surface part is formed in a periphery of the protrusion. The dielectric substrate is formed from a polycrystalline ceramics sintered body. A top face of the protrusion is a curved surface, and a first recess is formed in the top face to correspond to crystal grains that appear on the surface. The planar surface part has a flat part, and a second recess is formed in the flat part. A depth dimension of the first recess is greater than a depth dimension of the second recess. The electrostatic chuck can suppress the generation of particles and can easily recover a clean state of the electrostatic chuck surface.

摘要翻译： 静电卡盘包括：具有突起和平坦表面部分的电介质基板。 突起形成在电介质基板的主表面上。 吸附目标材料安装在主表面上。 平面部分形成在突起的周边。 电介质基板由多晶陶瓷烧结体形成。 突起的顶面是弯曲表面，并且在顶面形成第一凹部以对应于出现在表面上的晶粒。 平面部分具有平坦部分，并且在平坦部分中形成第二凹部。 第一凹部的深度尺寸大于第二凹部的深度尺寸。 静电卡盘可以抑制颗粒的产生，并且可以容易地恢复静电卡盘表面的清洁状态。