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    Charged particle beam apparatus and contamination removal method therefor
    2.
    发明授权
    Charged particle beam apparatus and contamination removal method therefor 有权
    带电粒子束装置及其污染除去方法

    公开(公告)号：US07375328B2

    公开(公告)日：2008-05-20

    申请号：US11293148

    申请日：2005-12-05

    申请人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

    发明人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

    IPC分类号： G01N23/00 ,  G21K7/00

    CPC分类号： H01J37/185 ,  B08B7/0057 ,  H01J37/28 ,  H01J2237/022

    摘要： A charged particle beam apparatus comprising a preparatory evacuation chamber (15 in FIG. 1A) into which a sample (12) is conveyed and which is preliminarily evacuated, an ultraviolet irradiation unit (21) which is disposed in the preparatory evacuation chamber (15) and which irradiates the surface of the sample (12) conveyed into the preparatory evacuation chamber (15), with ultraviolet rays for a predetermined time period, and a sample chamber (16) into which the sample (12) is conveyed in the preliminarily evacuated state of the preparatory evacuation chamber (15) or from which the sample (12) is conveyed into the preparatory evacuation chamber (15), wherein the ultraviolet irradiation of the sample (12) by the ultraviolet irradiation unit (21) is performed before the conveyance of the sample (12) into the sample chamber (16), or/and after the conveyance thereof from the sample chamber (16), thereby to remove contamination on the surface of the sample (12).

    摘要翻译： 一种带电粒子束装置，包括：预先抽真空室（图1A中的15），其中输送样品（12）并预先抽真空;紫外线照射单元（21），设置在预备抽空室 ），并且用紫外线照射经预定的时间段的被输送到预备抽空室（15）的样品（12）的表面，以及将样品（12）预先传送到的样品室 预备排空室（15）的抽真空状态或将样品（12）从该排空状态输送到预备抽空室（15）中，其中紫外线照射单元（21）对样品（12）的紫外线照射在 将样品（12）输送到样品室（16）中，或者在从样品室（16）传送之后，从而去除样品表面上的污染物 （12）。

    Industrial robot
    3.
    发明授权
    Industrial robot 失效
    工业机器人

    公开(公告)号：US4610598A

    公开(公告)日：1986-09-09

    申请号：US527863

    申请日：1983-08-30

    申请人： Toyohide Hamada ,  Kouichi Sugimoto ,  Hitoshi Kusakawa ,  Tatenori Jinriki ,  Kiyohide Koizumi

    发明人： Toyohide Hamada ,  Kouichi Sugimoto ,  Hitoshi Kusakawa ,  Tatenori Jinriki ,  Kiyohide Koizumi

    IPC分类号： B25J9/04 ,  B25J9/10 ,  B25J19/00 ,  B25J18/00

    CPC分类号： B25J9/044 ,  B25J19/0029 ,  B25J9/042 ,  B25J9/1045

    摘要： An industrial robot comprising: a base; a stand rigidly erected on the base; a shoulder securely mounted on the stand; a first arm consisting of upper and lower levers with the base portion pivoted to the shoulder so that the arm can be turned about a first vertical axis; a second arm having its one end pivoted to the other end of the first arm between the upper and lower levers so that the second arm can be turned about a second vertical axis; a vertically movable shaft so supported by the second arm as to allow the linear movement of the shaft along a third vertical axis; a rack parallel to the vertically movable shaft; a guide means for guiding the rack relative to the second arm in only the vertical direction; a coupling means for connecting the vertically movable shaft and the rack at their both ends; a first drive means secured to the shoulder to rotate, through a first power transmission means, the first arm about the first vertical axis; a second drive means secured to the shoulder to rotate, through a second power transmission means, the second arm about the second vertical axis; and a third drive means secured to the second arm to drive the rack in vertical direction through a third power transmission means.

    摘要翻译： 一种工业机器人，包括：基座; 在基地上竖立的立场; 一个牢固地安装在支架上的肩膀; 第一臂由上下杆构成，其中基部枢转到肩部，使得臂能够围绕第一垂直轴线转动; 第二臂，其一端枢转到第一臂的另一端在上下杆之间，使得第二臂能绕第二垂直轴转动; 一个由第二臂支撑的可垂直移动的轴，以允许轴沿着第三垂直轴的直线运动; 平行于垂直移动轴的齿条; 用于仅在垂直方向上相对于第二臂引导齿条的引导装置; 用于在其两端连接可垂直移动的轴和齿条的联接装置; 第一驱动装置，其通过第一动力传递装置固定到所述肩部以使所述第一臂围绕所述第一竖直轴线旋转; 通过第二动力传递装置固定到肩部以使第二臂围绕第二垂直轴线旋转的第二驱动装置; 以及第三驱动装置，其固定到所述第二臂，以通过第三动力传递装置在垂直方向上驱动所述齿条。

    Wrist mechanism for industrial robot
    5.
    发明授权
    Wrist mechanism for industrial robot 失效
    工业机器人手腕机构

    公开(公告)号：US4696202A

    公开(公告)日：1987-09-29

    申请号：US857103

    申请日：1986-04-29

    申请人： Tatenori Jinriki ,  Fusaaki Kozawa

    发明人： Tatenori Jinriki ,  Fusaaki Kozawa

    IPC分类号： B25J17/02 ,  B66C1/10

    CPC分类号： B25J17/0275 ,  B25J17/0291 ,  Y10T74/20335

    摘要： Disclosed is a wrist mechanism for an industrial robot which includes a first wrist member disposed rotatably at the tip of a robot arm and a second wrist member movable relative to this first wrist member. The movement of the second wrist member relative to the first wrist member is effected not in a bending mode in which the angle of intersection between the members is variable but in a rotating mode in which the second wrist member becomes rotatable. The transmission of the rotational power to the second wrist member is effected through a universal joint. With this arrangement, such backlashes as are conventionally found in the engagement between gears can be reduced, and the mechanical burden on the universal joint can also be reduced.

    摘要翻译： 公开了一种用于工业机器人的手腕机构，其包括可旋转地设置在机器人手臂的尖端处的第一腕部构件和能够相对于该第一手腕构件移动的第二腕构件。 第二腕部件相对于第一腕部件的运动不是在其中构件之间的相交角度可变但是其中第二腕部件可旋转的旋转模式中的弯曲模式中实现的。 旋转动力传递到第二腕部件是通过万向接头进行的。 通过这种布置，可以减少传统上在齿轮啮合中发现的这种齿隙，并且也可以减小万向接头的机械负担。

    Charged particle beam apparatus and contamination removal method therefor
    6.
    发明申请
    Charged particle beam apparatus and contamination removal method therefor 有权
    带电粒子束装置及其污染除去方法

    公开(公告)号：US20060138363A1

    公开(公告)日：2006-06-29

    申请号：US11293148

    申请日：2005-12-05

    申请人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

    发明人： Akira Yonezawa ,  Tatenori Jinriki ,  Jun Nitta ,  Norimichi Anazawa ,  Ryuichi Shimizu

    IPC分类号： G01J3/10

    CPC分类号： H01J37/185 ,  B08B7/0057 ,  H01J37/28 ,  H01J2237/022

    摘要： A charged particle beam apparatus comprising a preparatory evacuation chamber (15 in FIG. 1A) into which a sample (12) is conveyed and which is preliminarily evacuated, an ultraviolet irradiation unit (21) which is disposed in the preparatory evacuation chamber (15) and which irradiates the surface of the sample (12) conveyed into the preparatory evacuation chamber (15), with ultraviolet rays for a predetermined time period, and a sample chamber (16) into which the sample (12) is conveyed in the preliminarily evacuated state of the preparatory evacuation chamber (15) or from which the sample (12) is conveyed into the preparatory evacuation chamber (15), wherein the ultraviolet irradiation of the sample (12) by the ultraviolet irradiation unit (21) is performed before the conveyance of the sample (12) into the sample chamber (16), or/and after the conveyance thereof from the sample chamber (16), thereby to remove contamination on the surface of the sample (12).

    摘要翻译： 一种带电粒子束装置，包括：预先抽真空室（图1A中的15），其中输送样品（12）并预先抽真空;紫外线照射单元（21），设置在预备抽空室 ），并且用紫外线照射经预定的时间段的被输送到预备抽空室（15）的样品（12）的表面，以及将样品（12）预先传送到的样品室 预备排空室（15）的抽真空状态或将样品（12）从该排空状态输送到预备抽空室（15）中，其中紫外线照射单元（21）对样品（12）的紫外线照射在 将样品（12）输送到样品室（16）中，或者在从样品室（16）传送之后，从而去除样品表面上的污染物 （12）。