公开(公告)号：US09138997B2

公开(公告)日：2015-09-22

申请号：US13440282

申请日：2012-04-05

Applicant: Motoki Takabe ,  Takumi Yamaoka ,  Takahiro Kamijo

Inventor： Motoki Takabe ,  Takumi Yamaoka ,  Takahiro Kamijo

IPC: B41J2/16 ,  B41J2/145 ,  B41J2/14 ,  C04B35/499 ,  B81B3/00

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1612 ,  B41J2/1639 ,  B41J2/1646 ,  B41J2002/14491 ,  B81B3/0078 ,  C04B35/499 ,  Y10T29/42 ,  Y10T29/49124 ,  Y10T29/49155 ,  Y10T29/49163 ,  Y10T29/49401

Abstract: A method for manufacturing a liquid ejecting head which includes forming a first electrode on a vibration plate, forming a piezoelectric body on the first electrode, and forming a first layer having a greater thermal expansion rate than the piezoelectric body and the same conductivity as the second electrode, on the piezoelectric body. The method also includes forming a sacrifice layer on the first layer, heating the vibration plate, the first electrode, the piezoelectric body, the first layer, and the sacrifice layer to oxidize the sacrifice layer, and then cooling the vibration plate, the first electrode, the piezoelectric body, the first layer, and the sacrifice layer after the heating. Lastly, a second layer having the same conductivity as the second electrode is formed on the first layer and the sacrifice layer, after the cooling.

Abstract translation: 一种液体喷射头的制造方法，其特征在于，在振动板上形成第一电极，在所述第一电极上形成压电体，形成具有比所述压电体高的热膨胀率的第一层， 电极，在压电体上。 该方法还包括在第一层上形成牺牲层，加热振动板，第一电极，压电体，第一层和牺牲层以氧化牺牲层，然后冷却振动板，第一电极 ，压电体，第一层和牺牲层。 最后，在冷却之后，在第一层和牺牲层上形成具有与第二电极相同导电性的第二层。

公开(公告)号：US20110239423A1

公开(公告)日：2011-10-06

申请号：US13079257

申请日：2011-04-04

Applicant: Masato GODO ,  Takumi YAMAOKA

Inventor： Masato GODO ,  Takumi YAMAOKA

IPC: H01L41/22

CPC classification number: B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  H01L27/20 ,  H01L41/0475 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/332 ,  Y10T29/42

Abstract: After the piezoelectric element forming process, in the etching process, etching is performed on a portion of at least the vibrating plate between the lead-out electrodes formed afterwards in the lead-out electrode forming process in a condition where the upper electrode film etching residual is removed and the vibrating plate is not removed. In the piezoelectric element forming process, even if the upper electrode film etching residual is generated between the lead-out electrodes, the upper electrode film etching residual is divided up due to the etching and it is possible to maintain insulation between the lead-out electrodes formed in the upper electrode film etching residual. Accordingly, it is possible to obtain the manufacturing method of the piezoelectric actuator which reduces driving defects in the piezoelectric actuator generated by short circuiting between the lead-out electrodes.

Abstract translation: 在压电元件形成处理之后，在蚀刻工艺中，在引出电极形成工艺中形成的引出电极之间的至少振动板的一部分上，在上电极膜蚀刻残留 被移除并且振动板不被移除。 在压电元件形成工序中，即使在引出电极之间产生上部电极膜蚀刻残留物，由于蚀刻，上部电极膜蚀刻残留物被分割，并且可以保持引出电极之间的绝缘 形成在上电极膜蚀刻残留。 因此，可以获得减小由引出电极之间的短路产生的压电致动器的驱动缺陷的压电致动器的制造方法。

公开(公告)号：US20090202730A1

公开(公告)日：2009-08-13

申请号：US12361232

申请日：2009-01-28

Applicant: Takumi Yamaoka ,  Mutsuhiko Ota

Inventor： Takumi Yamaoka ,  Mutsuhiko Ota

IPC: B05D1/30 ,  B05C11/00

CPC classification number: H01L21/6715 ,  B05C5/0258 ,  B05C11/1015 ,  B05D1/26

Abstract: A slit coating type application apparatus includes a holding table 20 which holds a substrate 1 on a vertically lower surface, a first liquid tank 30 which is disposed so as to face the surface of the substrate 1 held on the holding table 20 and stores a predetermined coating liquid 2, a coating head 40 which is held so as to be vertically moved in the first liquid tank 30 and has a slit-shaped nozzle 41 for flowing the coating liquid stored in the first liquid tank 30 toward the surface of the substrate 1, a second liquid tank 50 which is supported so as to be vertically moved, communicates with the first liquid tank 30 through a communicating pipe 60, and stores the coating liquid 2, and a height control unit which controls the height of the second liquid tank 50 according to the movement of the coating head 40 when the coating liquid 2 is coated on the substrate 1.

Abstract translation: 狭缝涂布型涂布装置包括：在垂直下表面上保持基板1的保持台20;第一液罐30，其被设置为面对保持在保持台20上的基板1的表面，并存储预定的 涂布液2，被保持为在第一液体罐30中垂直移动的涂布头40，并且具有狭缝状喷嘴41，用于使存储在第一液体槽30中的涂布液朝向基板1的表面流动 通过连通管60与第一液罐30连通的第二液罐50，其被支撑为垂直移动，并且存储涂布液2，并且控制第二液罐的高度的高度控制单元 当涂布液体2涂覆在基板1上时，根据涂覆头40的运动，50。

公开(公告)号：US20120255177A1

公开(公告)日：2012-10-11

申请号：US13440282

申请日：2012-04-05

Applicant: Motoki TAKABE ,  Takumi YAMAOKA ,  Takahiro KAMIJO

Inventor： Motoki TAKABE ,  Takumi YAMAOKA ,  Takahiro KAMIJO

IPC: B23P17/00

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1612 ,  B41J2/1639 ,  B41J2/1646 ,  B41J2002/14491 ,  B81B3/0078 ,  C04B35/499 ,  Y10T29/42 ,  Y10T29/49124 ,  Y10T29/49155 ,  Y10T29/49163 ,  Y10T29/49401

Abstract: The heating and the cooling are conducted. In the heating, atoms of the first layer are rearranged, distortion is removed, and the stress is alleviated. In the cooling, since the first layer has a greater thermal expansion rate than the piezoelectric body, the shrinkage of the first layer caused by the cooling is greater than that of the piezoelectric body, and the thermal stress caused by the difference in thermal expansion is applied to the piezoelectric body. The thermal stress applied to the piezoelectric body serves as a force compressing the piezoelectric body. Therefore, a compressing force is applied to the interface contacting between the first layer and the piezoelectric body to suppress creation of cracks from the interface, and, even though the deformation amount of the piezoelectric body increases, a method for manufacturing an ink jet type recording head with excellent crack resistance may be obtained.

Abstract translation: 进行加热和冷却。 在加热中，第一层的原子被重新排列，去除了变形，并且减轻了应力。 在冷却中，由于第一层具有比压电体更大的热膨胀率，所以由冷却引起的第一层的收缩率大于压电体的收缩，由热膨胀差引起的热应力为 应用于压电体。 施加到压电体的热应力用作压缩体的压力。 因此，压接力被施加到与第一层和压电体之间接触的界面，以抑制从界面产生裂纹，并且即使压电体的变形量增加，也可以使用喷墨型记录方法 可以获得具有优异抗裂性的头部。