Method of manufacturing semiconductor device
    1.
    发明授权
    Method of manufacturing semiconductor device 失效
    制造半导体器件的方法

    公开(公告)号:US08530311B2

    公开(公告)日:2013-09-10

    申请号:US13471798

    申请日:2012-05-15

    Inventor: Takayuki Matsui

    CPC classification number: H01L27/10876 H01L21/2257

    Abstract: Disclosed herein is a method of manufacturing a semiconductor device. The method comprises forming a first silicon film on a semiconductor substrate, forming a second silicon film on the first silicon film, forming a third silicon film on the second silicon film, and forming a first diffusion barrier film on the third silicon film. The method further comprises performing a thermal treatment to diffuse an impurity included in the second silicon film into at least the first silicon film and the semiconductor substrate, respectively.

    Abstract translation: 本文公开了一种制造半导体器件的方法。 该方法包括在半导体衬底上形成第一硅膜,在第一硅膜上形成第二硅膜,在第二硅膜上形成第三硅膜,并在第三硅膜上形成第一扩散阻挡膜。 该方法还包括进行热处理以分别将包含在第二硅膜中的杂质扩散到至少第一硅膜和半导体衬底中。

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    2.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 失效
    制造半导体器件的方法

    公开(公告)号:US20120302050A1

    公开(公告)日:2012-11-29

    申请号:US13471798

    申请日:2012-05-15

    Inventor: Takayuki MATSUI

    CPC classification number: H01L27/10876 H01L21/2257

    Abstract: Disclosed herein is a method of manufacturing a semiconductor device. The method comprises forming a first silicon film on a semiconductor substrate, forming a second silicon film on the first silicon film, forming a third silicon film on the second silicon film, and forming a first diffusion barrier film on the third silicon film. The method further comprises performing a thermal treatment to diffuse an impurity included in the second silicon film into at least the first silicon film and the semiconductor substrate, respectively.

    Abstract translation: 本文公开了一种制造半导体器件的方法。 该方法包括在半导体衬底上形成第一硅膜,在第一硅膜上形成第二硅膜,在第二硅膜上形成第三硅膜,并在第三硅膜上形成第一扩散阻挡膜。 该方法还包括进行热处理以分别将包含在第二硅膜中的杂质扩散到至少第一硅膜和半导体衬底中。

    MOTOR CONTROL DEVICE AND OUT-OF-STEP DETECTING METHOD
    3.
    发明申请
    MOTOR CONTROL DEVICE AND OUT-OF-STEP DETECTING METHOD 有权
    电机控制装置和不合格检测方法

    公开(公告)号:US20120001584A1

    公开(公告)日:2012-01-05

    申请号:US13172206

    申请日:2011-06-29

    CPC classification number: H02P8/38 H02P8/24

    Abstract: A motor control device for a stepping motor including at least two phase coils and a rotor is provided. The motor control device includes a control unit which applies a pulse voltage subjected to pulse width modulation, to each of the at least two phase coils, a back electromotive voltage measuring unit which provides a halt period to temporarily halt the application of the pulse voltage to one of the phase coils when a direction of the coil current flowing in the one phase coil is switched, and which measures a back electromotive voltage induced in the one phase coil during the halt period, an out-of-step detecting unit which detects an out-of-step of the stepping motor if the measured back electromotive voltage satisfies a predetermined criterion, and a voltage control unit which sets a voltage for all phase coils other than the one phase coil to a constant voltage during the halt period.

    Abstract translation: 提供一种用于包括至少两个相位线圈和转子的步进电动机的电动机控制装置。 电动机控制装置包括对至少两个相位线圈中的每一个施加经受脉冲宽度调制的脉冲电压的控制单元,提供停止时间以暂时停止施加脉冲电压的反电动势电压测量单元 切换在一相线圈中流动的线圈电流的方向的相线圈中的一个,并且测量在停止时段期间在一相线圈中感应的反电动势电压的失步检测单元,其检测 如果所测量的反电动势电压满足预定标准,则步进电机的步进失调;以及电压控制单元,其在停止时段期间将除了一相线圈之外的所有相线圈的电压设定为恒定电压。

    Video output apparatus, control method thereof, and video device
    4.
    发明授权
    Video output apparatus, control method thereof, and video device 有权
    视频输出装置,其控制方法和视频装置

    公开(公告)号:US08040433B2

    公开(公告)日:2011-10-18

    申请号:US11678889

    申请日:2007-02-26

    CPC classification number: H04N5/46 H04N9/642 H04N21/43635

    Abstract: A video output apparatus includes a video output unit which outputs a video signal while switching the format of the video signal between a first format and a second format for expressing color differently. The video output apparatus also includes a mute signal generation unit which generates, as a muting video signal, a specialized video signal expressing a color in which the difference between the color displayed when the specialized video signal is interpreted in its own format and the color displayed when the specialized video signal is interpreted in a different format is a minimum. The video output apparatus further includes a selection unit, which selects one of the video signal outputted by said video output unit and the mute signal generated by said mute signal generation unit and outputs the selected signal, and a control unit, which causes the selection unit to select the mute signal in a period including the switch performed by the video output unit.

    Abstract translation: 视频输出装置包括视频输出单元,其在切换第一格式和第二格式之间的视频信号的格式的同时输出视频信号,以表示不同的颜色。 该视频输出装置还包括静音信号产生单元,该静音信号产生单元产生一个专用视频信号,该专用视频信号表示当专用视频信号以其自己的格式被解释时显示的颜色和显示的颜色之间的差异 当专用视频信号以不同的格式被解释是最小的。 视频输出装置还包括选择单元,其选择由所述视频输出单元输出的视频信号中的一个和由所述静音信号产生单元产生的静音信号并输出​​所选择的信号;以及控制单元,其使所述选择单元 在包括由视频输出单元执行的开关的周期中选择静音信号。

    VIDEO/AUDIO TRANSMISSION DEVICE AND VIDEO/AUDIO RECEPTION DEVICE
    5.
    发明申请
    VIDEO/AUDIO TRANSMISSION DEVICE AND VIDEO/AUDIO RECEPTION DEVICE 审中-公开
    视频/音频传输设备和视频/音频接收设备

    公开(公告)号:US20110170614A1

    公开(公告)日:2011-07-14

    申请号:US13119039

    申请日:2009-09-28

    Abstract: A video/audio encoding unit encodes an inputted video/audio signal in a format compliant with a predetermined technical standard. A differential signal output unit outputs the encoded data in the form of a differential signal defined by the predetermined technical standard. The differential signal output unit appends the data encoded by the video/audio encoding unit to a data transmission unallocated region of a communication line defined by the predetermined technical standard and then transmits the resulting data. Because the data transmission unallocated region, which is not directly used in normal data transmission, is thus effectively utilized in data transmission, a larger volume of information can be transmitted and received.

    Abstract translation: 视频/音频编码单元以符合预定技术标准的格式对输入的视频/音频信号进行编码。 差分信号输出单元以由预定技术标准定义的差分信号的形式输出编码数据。 差分信号输出单元将由视频/音频编码单元编码的数据附加到由预定技术标准定义的通信线路的数据传输未分配区域,然后发送所得到的数据。 因为在正常数据传输中不直接使用的数据传输未分配区域因此有效地用于数据传输,所以可以发送和接收更大量的信息。

    Data alteration detecting method, data alteration detecting device and data alteration detecting program
    6.
    发明授权
    Data alteration detecting method, data alteration detecting device and data alteration detecting program 有权
    数据变更检测方法,数据变更检测装置和数据变更检测程序

    公开(公告)号:US07721113B2

    公开(公告)日:2010-05-18

    申请号:US11082113

    申请日:2005-03-17

    Inventor: Takayuki Matsui

    CPC classification number: G06F21/64

    Abstract: An inter-record alteration detection code verification unit 36 calculates an inter-record alteration detection code by merging a record alteration detection code stored in a record to read from a database 34 and a record alteration detection code in the immediately previous record so as to generate a code and applying a predetermined hash operation to the generated code. The verification unit verifies whether the calculated inter-record alteration code coincides with the inter-record alteration detection code stored in the record to read. If they coincide with each other, data is determined to be not altered.

    Abstract translation: 记录间变更检测码验证部36通过将存储在从数据库34读取的记录中的记录变更检测码和紧接在前的记录中的记录变更检测码合并来计算记录间变更检测码,生成 代码,并将预定的散列操作应用于所生成的代码。 验证单元验证所计算的记录间变更代码是否与存储在要读取的记录中的记录间变更检测码一致。 如果它们相互重合,则确定数据不被改变。

    VIDEO/AUDIO OUTPUT APPARATUS
    7.
    发明申请
    VIDEO/AUDIO OUTPUT APPARATUS 审中-公开
    视频/音频输出设备

    公开(公告)号:US20090086089A1

    公开(公告)日:2009-04-02

    申请号:US12239017

    申请日:2008-09-26

    CPC classification number: H04N7/015

    Abstract: A format converter resolution converts first video data input to a video input device, thereby generating second video data. An HDMI converter converts the second video data into an HDMI signal. A first clock generator generates a second clock signal having a frequency corresponding to a resolution of the second video data based on a first clock signal input to the video input device and supplies the second clock signal to the format converter and the HDMI converter. A second clock generator generates a third clock signal having a frequency corresponding to a resolution of the HDMI signal and supplies the third clock signal to the HDMI converter. The format converter converts the first video data into the second video data based on the first clock signal and the second clock signal. The HDMI converter converts the second video data into the HDMI signal based on the second clock signal and the third clock signal.

    Abstract translation: 格式转换器分辨率将输入的第一视频数据转换为视频输入设备,从而产生第二视频数据。 HDMI转换器将第二视频数据转换为HDMI信号。 第一时钟发生器基于输入到视频输入设备的第一时钟信号产生具有对应于第二视频数据的分辨率的频率的第二时钟信号,并将第二时钟信号提供给格式转换器和HDMI转换器。 第二时钟发生器产生具有对应于HDMI信号的分辨率的频率的第三时钟信号,并将第三时钟信号提供给HDMI转换器。 格式转换器基于第一时钟信号和第二时钟信号将第一视频数据转换成第二视频数据。 HDMI转换器基于第二时钟信号和第三时钟信号将第二视频数据转换成HDMI信号。

    PROCESS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
    8.
    发明申请
    PROCESS FOR MANUFACTURING A SEMICONDUCTOR DEVICE 审中-公开
    制造半导体器件的方法

    公开(公告)号:US20080220616A1

    公开(公告)日:2008-09-11

    申请号:US12031275

    申请日:2008-02-14

    CPC classification number: H01L21/31133 H01L21/31138 H01L21/32139

    Abstract: A process for manufacturing a semiconductor device, comprising: preparing a substrate in which a silicon-containing resist pattern is formed on a processed-material layer, dry-etching the processed-material layer using the silicon-containing resist pattern as a mask to form a processed-material layer pattern, ashing the silicon-containing resist pattern to leave a silicon-containing residual resist, immersing the substrate on which the silicon-containing residual resist remains into pure water to swell and deform the silicon-containing residual resist, and immersing the substrate on which the swelled and deformed silicon-containing residual resist remains into diluted hydrofluoric acid to remove the silicon-containing residual resist.

    Abstract translation: 一种半导体器件的制造方法,其特征在于,包括:准备在被处理材料层上形成含硅抗蚀剂图案的基板,使用所述含硅抗蚀剂图案作为掩模对所述被处理材料层进行干蚀刻以形成 加工材料层图案,使含硅抗蚀剂图案灰化以留下含硅残余抗蚀剂,将含有硅的残留抗蚀剂残留在其上的基板浸入纯水中以使含硅残余抗蚀剂溶胀和变形,以及 将其上溶胀和变形的含硅残余抗蚀剂残留在稀释的氢氟酸中的基底浸渍以除去含硅残余抗蚀剂。

    Wireless network having IEEE802.11h-incompliant terminal wireless device communicating with IEEE802.11h-compliant base wireless device
    9.
    发明授权
    Wireless network having IEEE802.11h-incompliant terminal wireless device communicating with IEEE802.11h-compliant base wireless device 有权
    无线网络具有符合IEEE802.11h标准的无线设备与IEEE802.11h不兼容的终端无线设备通信

    公开(公告)号:US07352716B2

    公开(公告)日:2008-04-01

    申请号:US11099452

    申请日:2005-04-06

    CPC classification number: H04W48/16 H04W84/12 H04W88/08

    Abstract: In a wireless network structure which includes a wireless LAN device having a base station function (host device) which is compliant with IEEE802.11h and at least one wireless LAN device having a terminal function (slave device) which is not compliant with IEEE802.11h, the incompliant terminal transmits a probe request to the base station for confirming the presence of the base station. When the base station has dynamically switched its channel (frequency), a probe response is not returned from the base station to the terminal. Thus, the incompliant terminal transmits a probe request through a different channel in order to confirm the presence of the base station. The incompliant terminal repeats the above channel search process till the base station is found.

    Abstract translation: 在包括具有符合IEEE802.11h的基站功能(主机设备)的无线LAN设备和具有不符合IEEE802.11h的终端功能(从设备)的至少一个无线LAN设备的无线网络结构中, ,不合格终端向基站发送探测请求以确认基站的存在。 当基站动态地切换其信道(频率)时,不会从基站向终端返回探测响应。 因此,不合格终端通过不同的信道发送探测请求,以确认基站的存在。 不合格终端重复上述频道搜索过程,直到找到基站。

    In-line wafer cleaning system and method
    10.
    发明申请
    In-line wafer cleaning system and method 审中-公开
    在线晶片清洗系统及方法

    公开(公告)号:US20070125400A1

    公开(公告)日:2007-06-07

    申请号:US11634085

    申请日:2006-12-06

    Inventor: Takayuki Matsui

    CPC classification number: H01L21/02057 H01L21/67051

    Abstract: A wafer cleaning system includes a wafer chuck for holding a wafer top side down and a stage having a top surface opposing the wafer. The top surface of the stage includes thereon a plurality of cleaning liquid nozzles, a plurality of rinsing liquid nozzles, a central drain funnel and a peripheral drain funnel. The cleaning liquid as well as the rinsing liquid is retained in the gap between the wafer surface and the stage by the surface tension of the liquid for effecting a retention cleaning treatment and a retention rinsing treatment.

    Abstract translation: 晶片清洁系统包括用于将晶片顶侧保持向下的晶片卡盘和具有与晶片相对的顶表面的台。 舞台的顶面包括多个清洗液喷嘴,多个冲洗液体喷嘴,中央排水漏斗和外围排水漏斗。 通过液体的表面张力将清洗液以及冲洗液保持在晶片表面与载物台之间的间隙中,用于进行保持清洁处理和保持冲洗处理。

Patent Agency Ranking