Abstract:
Illumination devices (7a) and (7b) which irradiate light having a wavelength of 1.1 μm or less are arranged on a front surface and a rear surface of a cover (8) of a dicing device (1). After a wafer is placed on a dicing stage (3), when the wafer is diced by a blade (4a) attached to a spindle (5), light is irradiated on an entire surface of an upper surface (element forming surface) of the wafer by the illumination devices (7a) and (7b). At this time, an illuminance of light on the wafer is set at 70 lux or more and 2000 lux or less. By this means, during a dicing operation, an area to be a light-shielded area by the spindle (5) or the like is not present on the wafer.
Abstract:
Illumination devices (7a) and (7b) which irradiate light having a wavelength of 1.1 μm or less are arranged on a front surface and a rear surface of a cover (8) of a dicing device (1). After a wafer is placed on a dicing stage (3), when the wafer is diced by a blade (4a) attached to a spindle (5), light is irradiated on an entire surface of an upper surface (element forming surface) of the wafer by the illumination devices (7a) and (7b). At this time, an illuminance of light on the wafer is set at 70 lux or more and 2000 lux or less. By this means, during a dicing operation, an area to be a light-shielded area by the spindle (5) or the like is not present on the wafer.
Abstract:
Illumination devices (7a) and (7b) which irradiate light having a wavelength of 1.1 μm or less are arranged on a front surface and a rear surface of a cover (8) of a dicing device (1). After a wafer is placed on a dicing stage (3), when the wafer is diced by a blade (4a) attached to a spindle (5), light is irradiated on an entire surface of an upper surface (element forming surface) of the wafer by the illumination devices (7a) and (7b). At this time, an illuminance of light on the wafer is set at 70 lux or more and 2000 lux or less. By this means, during a dicing operation, an area to be a light-shielded area by the spindle (5) or the like is not present on the wafer.
Abstract:
A pharmaceutical composition including particles each containing a water-soluble base material and a poorly water-soluble compound, the water-soluble base material containing a rapidly water-soluble compound, wherein the poorly water-soluble compound is a kinase inhibitor and exists in an amorphous state in the water-soluble base material.
Abstract:
A coated seed obtained by coating a seed with a coating material containing an inorganic mineral powder and a thermosetting resin powder having an average particle diameter of 10 to 200 μm, wherein the thermosetting resin powder is a thermosetting resin powder obtained by aggregating a powdery pesticide with a thermosetting resin has an excellent quality.
Abstract:
A battery capable of improving load characteristics, low-temperature characteristics and high-temperature cycle characteristics is provided. A cathode (13) includes a lithium cobalt complex oxide represented by LiaCoxMIyMIIzO2 (MI includes at least one kind selected from the group consisting of Al, Cr, V, Mn and Fe, MII includes at least one kind selected from the group consisting of Mg and Ca, 0.9≦a≦1.1, 0.9≦x
Abstract translation:提供能够改善负载特性,低温特性和高温循环特性的电池。 阴极(13)包括由LiaCoxMIyMIIzO2表示的锂钴复合氧化物(MI包括选自Al,Cr,V,Mn和Fe中的至少一种,MII包括选自Mg Ca,0.9≤a≤1.1,0.9≤x<1,0.00≤y≤0.05,0.001≤z≤0.05,x + y + z = 1),进一步含有Zr作为亚成分元素。 作为在钴酸锂复合氧化物中Zr与Co的比例(Zr / Co),Zr的含量在0.01mol%〜10mol%的范围内。
Abstract:
An air battery containing an electrode and a polymer film, wherein the polymer film is disposed on the air intake side of the electrode, and the polymer film is a film of a polymer comprising a repeating unit represented by the following formula (1), wherein R1, R2, and m are defined in the specification.
Abstract:
The invention provides a rubber composition prepared by mixing, per 100 parts by mass of the rubber component comprising at least 50% by mass of a diene-based rubber, from 20 to 150 parts by mass of a filler, and from 0.05 to 30 parts by mass of a compound A which has a specific amidine structure and has a functional group reactive with the diene-based rubber. The rubber composition improves both a high elastic modulus and a low tan δ. The invention also provides a pneumatic tire using the rubber composition.
Abstract:
Disclosed is a method and apparatus for polishing an edge of an article involving providing at least one carrier including: first and second opposing surfaces defining a groove, the first and second opposing surfaces being spaced apart in a first direction to receive the edge; and magnetic field generator configured to provide a magnetic field in the groove to stiffen magnetorheological (MR) fluid disposed in the groove to provide at least one polishing zone; receiving the edge in the polishing zone; and driving relative motion between the at least one carrier and the edge in a second direction substantially transverse to the first direction.
Abstract:
A switch unit includes a plurality of switches, which are linearly disposed. The movable electrode in one switch and the fixed electrode in another switch are electrically connected to each other.