摘要:
A plurality of movable units is arranged in a matrix. First and second electrodes are used in common in the movable units arranged in a column. A plurality of third electrodes, which commonly connects tabular members of the movable units arranged in a row, is formed for each row. The drive circuit selects, in order and one by one, the third electrodes. Subsequently, the drive circuit swings the tabular member by applying a bias voltage to the selected third electrode and applying an approach voltage or a separating voltage to a plurality of the first electrodes and second electrodes. During a predetermined period of maintaining a swinging posture, the voltage applied to the third electrodes is maintained as the bias voltage. The tabular member is returned to a non-swinging state by changing the voltage applied to the third electrodes to a reset voltage after the lapse of the predetermined period.
摘要:
There are provided a permanent magnet and a manufacturing method thereof capable of decreasing an activity level of a calcined body activated by a calcination process. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M−(OR)x (M represents Dy or Tb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process. Thereafter, through powder compaction and sintering process, the powdery calcined body is formed into a permanent magnet.
摘要:
There are provided a permanent magnet and a manufacturing method thereof capable of densely sintering the entirety of the magnet without making a gap between a main phase and a grain boundary phase in the sintered magnet. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M-(OR)x (M represents V, Mo, Zr, Ta, Ti, W or Nb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process.
摘要:
There are provided a rare-earth permanent magnet and a manufacturing method thereof capable of simplifying manufacturing process and improving productivity through advanced ability to produce net shapes. In the method, magnet material is milled into magnet powder, and the magnet powder and a binder are mixed to prepare a mixture. Next, the prepared mixture is formed into a green sheet. Thereafter, the green sheet is held for predetermined time at binder decomposition temperature in non-oxidizing atmosphere, whereby depolymerization reaction or the like changes the binder into monomer and thus removes the binder. The green sheet with the binder removed therefrom undergoes pressure sintering such as SPS method so as to obtain a rare-earth permanent magnet 1.
摘要:
To realize a high productivity while maintaining excellent film deposition characteristics on a substrate even if a plurality of processing gases of different gas species are used. There are provided the step of loading a plurality of substrates into a processing chamber; supplying a first processing gas to an upper stream side of a gas flow outside of a region where a plurality of substrates loaded into a processing chamber are arranged, supplying a second processing gas to the upper stream side of the gas flow outside of the region where the plurality of substrates loaded into the processing chamber are arranged, supplying the first processing gas to a middle part of the gas flow in the region where the plurality of substrates loaded into the processing chamber are arranged, and causing the first processing gas and the second processing gas to react with each other in the processing chamber, to form an amorphous material and form a thin film on main surfaces of the plurality of substrates; and the step of unloading the substrate after forming the thin film from the processing camber.
摘要:
There are provided a permanent magnet and a manufacturing method thereof capable of densely sintering the entirety of the magnet without making a gap between a main phase and a grain boundary phase in the sintered magnet. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M-(OR)X (M represents Dy or Tb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, X represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process. Thereafter, through powder compaction and sintering process, the powdery calcined body is formed into a permanent magnet.
摘要:
There are provided a permanent magnet and a manufacturing method thereof enabling carbon content contained in magnet particles to be reduced in advance before sintering even when wet milling is employed. Coarsely-milled magnet powder is further milled by a bead mill in a solvent together with an organometallic compound expressed with a structural formula of M-(OR)X (M represents V, Mo, Zr, Ta Ti W or Nb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, X represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the magnet powder. Thereafter, a compact body of compacted magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius to perform hydrogen calcination process. Thereafter, through sintering process, a permanent magnet 1 is formed.
摘要翻译:提供永磁体及其制造方法,即使在使用湿磨时也能预先在烧结前减少磁体颗粒中含有的碳含量。 粗粉碎的磁粉通过珠磨机在溶剂中与结构式为M-(OR)X(M表示V,Mo,Zr,Ta Ti W或Nb表示的有机金属化合物)进一步研磨,R表示 由直链或支链烃构成的取代基,X表示任意的整数),以使有机金属化合物均匀地附着在磁铁粉末的粒子表面。 之后,在200〜900摄氏度的氢气氛中,将紧凑的致密体磁体保持数小时,进行氢煅烧。 此后,通过烧结处理,形成永磁体1。
摘要:
There are provided a permanent magnet and a manufacturing method thereof capable of decreasing an activity level of a calcined body activated by a calcination process. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M−(OR)x (M represents Dy or Tb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process. Thereafter, through powder compaction and sintering process, the powdery calcined body is formed into a permanent magnet.
摘要:
There are provided a permanent magnet and a manufacturing method thereof that enables concentration of V, Mo, Zr, Ta, Ti, W or Nb contained in an organometallic compound in grain boundaries of the permanent magnet. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M-(OR)x (M represents V, Mo, Zr, Ta, Ti, W or Nb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, a compact body obtained by compacting the magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius so as to perform a calcination process in hydrogen. Thereafter, through sintering, a permanent magnet is manufactured.
摘要:
There are provided a permanent magnet and a manufacturing method thereof enabling carbon content contained in magnet particles to be reduced in advance before sintering even when wet milling is employed. Coarsely-milled magnet powder is further milled by a bead mill in a solvent together with an organometallic compound expressed with a structural formula of M−(OR)x (M includes at least one of neodymium, praseodymium, dysprosium and terbium, each being a rare earth element, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the magnet powder. Thereafter, a compact body of compacted magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius to perform hydrogen calcination process. Thereafter, through sintering process, a permanent magnet 1 is manufactured.