Tabular member swinging device
    1.
    发明授权
    Tabular member swinging device 有权
    板状摆动装置

    公开(公告)号:US09075234B2

    公开(公告)日:2015-07-07

    申请号:US13394699

    申请日:2010-12-14

    IPC分类号: G09G3/34 G02B26/08

    CPC分类号: G02B26/0841 G09G3/34

    摘要: A plurality of movable units is arranged in a matrix. First and second electrodes are used in common in the movable units arranged in a column. A plurality of third electrodes, which commonly connects tabular members of the movable units arranged in a row, is formed for each row. The drive circuit selects, in order and one by one, the third electrodes. Subsequently, the drive circuit swings the tabular member by applying a bias voltage to the selected third electrode and applying an approach voltage or a separating voltage to a plurality of the first electrodes and second electrodes. During a predetermined period of maintaining a swinging posture, the voltage applied to the third electrodes is maintained as the bias voltage. The tabular member is returned to a non-swinging state by changing the voltage applied to the third electrodes to a reset voltage after the lapse of the predetermined period.

    摘要翻译: 多个可移动单元被布置成矩阵。 第一和第二电极在布置成列的可移动单元中共同使用。 为每排形成多个第三电极,其通常连接布置成一排的可动单元的板状构件。 驱动电路按顺序依次选择第三电极。 随后,驱动电路通过向所选择的第三电极施加偏置电压并向多个第一电极和第二电极施加接近电压或分离电压来摆动板状构件。 在保持摆动姿态的预定时段期间,施加到第三电极的电压被保持为偏置电压。 通过将施加到第三电极的电压改变为经过预定周期之后的复位电压,板状构件返回到非摆动状态。

    Permanent magnet and manufacturing method thereof
    2.
    发明授权
    Permanent magnet and manufacturing method thereof 有权
    永磁体及其制造方法

    公开(公告)号:US09048014B2

    公开(公告)日:2015-06-02

    申请号:US13499457

    申请日:2011-03-28

    摘要: There are provided a permanent magnet and a manufacturing method thereof capable of decreasing an activity level of a calcined body activated by a calcination process. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M−(OR)x (M represents Dy or Tb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process. Thereafter, through powder compaction and sintering process, the powdery calcined body is formed into a permanent magnet.

    摘要翻译: 提供了能够降低通过煅烧过程活化的煅烧体的活性水平的永磁体及其制造方法。 向研磨的钕磁体的细粉末中加入含有以结构式M-(OR)x表示的有机金属化合物的有机金属化合物溶液(M表示Dy或Tb,R表示由直链或支链的 链状烃,x表示任意的整数),以使有机金属化合物均匀地附着于钕磁体粉末的粒子表面。 此后,将干燥的磁铁粉末在200-900摄氏度的氢气氛中保持数小时。 此后,通过煅烧工序在氢气中煅烧的粉状煅烧体在真空度为200〜600摄氏度的条件下在脱氢工序中保持数小时。 此后,通过粉末压实和烧结工艺,将粉末状煅烧体形成永磁体。

    Permanent magnet and manufacturing method thereof
    3.
    发明授权
    Permanent magnet and manufacturing method thereof 有权
    永磁体及其制造方法

    公开(公告)号:US08500921B2

    公开(公告)日:2013-08-06

    申请号:US13499568

    申请日:2011-03-28

    IPC分类号: H01F1/057

    摘要: There are provided a permanent magnet and a manufacturing method thereof capable of densely sintering the entirety of the magnet without making a gap between a main phase and a grain boundary phase in the sintered magnet. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M-(OR)x (M represents V, Mo, Zr, Ta, Ti, W or Nb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process.

    摘要翻译: 提供了一种永磁体及其制造方法,其能够在烧结磁体中在主相和晶界相之间形成间隙而密集地烧结整个磁体。 向研磨的钕磁体的细粉末中加入含有结构式为M-(OR)x(M表示V,Mo,Zr,Ta,Ti,W或Nb的有机金属化合物)的有机金属化合物溶液,R表示取代基 由直链或支链烃构成的基团,x表示任意的整数),以使有机金属化合物均匀地附着于钕磁体粉末的粒子表面。 此后,将干燥的磁铁粉末在200-900摄氏度的氢气氛中保持数小时。 此后,通过煅烧工序在氢气中煅烧的粉状煅烧体在真空度为200〜600摄氏度的条件下在脱氢工序中保持数小时。

    RARE-EARTH PERMANENT MAGNET AND METHOD FOR MANUFACTURING RARE-EARTH PERMANENT MAGNET
    4.
    发明申请
    RARE-EARTH PERMANENT MAGNET AND METHOD FOR MANUFACTURING RARE-EARTH PERMANENT MAGNET 审中-公开
    稀土永磁体及制造稀土永磁体的方法

    公开(公告)号:US20130141194A1

    公开(公告)日:2013-06-06

    申请号:US13816297

    申请日:2012-03-15

    IPC分类号: H01F41/02 H01F7/02

    摘要: There are provided a rare-earth permanent magnet and a manufacturing method thereof capable of simplifying manufacturing process and improving productivity through advanced ability to produce net shapes. In the method, magnet material is milled into magnet powder, and the magnet powder and a binder are mixed to prepare a mixture. Next, the prepared mixture is formed into a green sheet. Thereafter, the green sheet is held for predetermined time at binder decomposition temperature in non-oxidizing atmosphere, whereby depolymerization reaction or the like changes the binder into monomer and thus removes the binder. The green sheet with the binder removed therefrom undergoes pressure sintering such as SPS method so as to obtain a rare-earth permanent magnet 1.

    摘要翻译: 提供了一种稀土永磁体及其制造方法,其能够通过提高生产网状的能力简化制造工艺并提高生产率。 在该方法中,将磁体材料研磨成磁体粉末,并将磁体粉末和粘合剂混合以制备混合物。 接下来,将制备的混合物形成为生片。 此后,在非氧化性气氛中,生片在粘合剂分解温度下保持规定时间,由此解聚反应等将粘合剂变为单体,从而除去粘合剂。 从其去除粘合剂的生片进行诸如SPS法的加压烧结,以获得稀土永磁体1。

    Manufacturing method of semiconductor device and substrate processing apparatus
    5.
    发明授权
    Manufacturing method of semiconductor device and substrate processing apparatus 有权
    半导体器件和衬底处理设备的制造方法

    公开(公告)号:US08304328B2

    公开(公告)日:2012-11-06

    申请号:US12223718

    申请日:2007-03-15

    IPC分类号: H01L21/00

    摘要: To realize a high productivity while maintaining excellent film deposition characteristics on a substrate even if a plurality of processing gases of different gas species are used. There are provided the step of loading a plurality of substrates into a processing chamber; supplying a first processing gas to an upper stream side of a gas flow outside of a region where a plurality of substrates loaded into a processing chamber are arranged, supplying a second processing gas to the upper stream side of the gas flow outside of the region where the plurality of substrates loaded into the processing chamber are arranged, supplying the first processing gas to a middle part of the gas flow in the region where the plurality of substrates loaded into the processing chamber are arranged, and causing the first processing gas and the second processing gas to react with each other in the processing chamber, to form an amorphous material and form a thin film on main surfaces of the plurality of substrates; and the step of unloading the substrate after forming the thin film from the processing camber.

    摘要翻译: 为了实现高生产率,同时在使用不同气体种类的多种处理气体的同时在基板上保持优异的成膜特性。 提供了将多个基板装载到处理室中的步骤; 将第一处理气体供给到其中布置有多个基板的区域外的气流的上游侧,将第二处理气体供给到所述气流的上游侧, 布置了装载到处理室中的多个基板,将第一处理气体供给到布置有加载到处理室中的多个基板的区域中的气流的中间部分,并且使第一处理气体和第二处理气体 处理气体在处理室中彼此反应,以形成非晶材料并在多个基板的主表面上形成薄膜; 以及在从所述加工弯度形成所述薄膜之后卸载所述基板的步骤。

    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF
    6.
    发明申请
    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF 审中-公开
    永磁体及其制造方法

    公开(公告)号:US20120187612A1

    公开(公告)日:2012-07-26

    申请号:US13499318

    申请日:2011-03-28

    IPC分类号: C04B35/50 H01F1/00

    摘要: There are provided a permanent magnet and a manufacturing method thereof capable of densely sintering the entirety of the magnet without making a gap between a main phase and a grain boundary phase in the sintered magnet. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M-(OR)X (M represents Dy or Tb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, X represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process. Thereafter, through powder compaction and sintering process, the powdery calcined body is formed into a permanent magnet.

    摘要翻译: 提供了一种永磁体及其制造方法,其能够在烧结磁体中在主相和晶界相之间形成间隙而密集地烧结整个磁体。 向研磨的钕磁体的细粉末中加入含有以结构式M-(OR)X表示的有机金属化合物的有机金属化合物溶液(M表示Dy或Tb,R表示由直链或支链的 链状烃,X表示任意的整数),以使有机金属化合物均匀地附着于钕磁体粉末的粒子表面。 此后,将干燥的磁铁粉末在200-900摄氏度的氢气氛中保持数小时。 此后,通过煅烧工序在氢气中煅烧的粉状煅烧体在真空度为200〜600摄氏度的条件下在脱氢工序中保持数小时。 此后,通过粉末压实和烧结工艺,将粉末状煅烧体形成永磁体。

    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF
    7.
    发明申请
    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF 有权
    永磁体及其制造方法

    公开(公告)号:US20120187328A1

    公开(公告)日:2012-07-26

    申请号:US13499616

    申请日:2011-03-28

    摘要: There are provided a permanent magnet and a manufacturing method thereof enabling carbon content contained in magnet particles to be reduced in advance before sintering even when wet milling is employed. Coarsely-milled magnet powder is further milled by a bead mill in a solvent together with an organometallic compound expressed with a structural formula of M-(OR)X (M represents V, Mo, Zr, Ta Ti W or Nb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, X represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the magnet powder. Thereafter, a compact body of compacted magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius to perform hydrogen calcination process. Thereafter, through sintering process, a permanent magnet 1 is formed.

    摘要翻译: 提供永磁体及其制造方法,即使在使用湿磨时也能预先在烧结前减少磁体颗粒中含有的碳含量。 粗粉碎的磁粉通过珠磨机在溶剂中与结构式为M-(OR)X(M表示V,Mo,Zr,Ta Ti W或Nb表示的有机金属化合物)进一步研磨,R表示 由直链或支链烃构成的取代基,X表示任意的整数),以使有机金属化合物均匀地附着在磁铁粉末的粒子表面。 之后,在200〜900摄氏度的氢气氛中,将紧凑的致密体磁体保持数小时,进行氢煅烧。 此后,通过烧结处理,形成永磁体1。

    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF
    8.
    发明申请
    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF 有权
    永磁体及其制造方法

    公开(公告)号:US20120187326A1

    公开(公告)日:2012-07-26

    申请号:US13499457

    申请日:2011-03-28

    摘要: There are provided a permanent magnet and a manufacturing method thereof capable of decreasing an activity level of a calcined body activated by a calcination process. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M−(OR)x (M represents Dy or Tb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, desiccated magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius. Thereafter, the powdery calcined body calcined through the calcination process in hydrogen is held for several hours in vacuum atmosphere at 200 through 600 degrees Celsius for a dehydrogenation process. Thereafter, through powder compaction and sintering process, the powdery calcined body is formed into a permanent magnet.

    摘要翻译: 提供了能够降低通过煅烧过程活化的煅烧体的活性水平的永磁体及其制造方法。 向研磨的钕磁体的细粉末中加入含有以结构式M-(OR)x表示的有机金属化合物的有机金属化合物溶液(M表示Dy或Tb,R表示由直链或支链的 链状烃,x表示任意的整数),以使有机金属化合物均匀地附着于钕磁体粉末的粒子表面。 此后,将干燥的磁铁粉末在200-900摄氏度的氢气氛中保持数小时。 此后,通过煅烧工序在氢气中煅烧的粉状煅烧体在真空度为200〜600摄氏度的条件下在脱氢工序中保持数小时。 此后,通过粉末压实和烧结工艺,将粉末状煅烧体形成永磁体。

    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF
    9.
    发明申请
    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF 有权
    永磁体及其制造方法

    公开(公告)号:US20120182107A1

    公开(公告)日:2012-07-19

    申请号:US13499492

    申请日:2011-03-28

    IPC分类号: H01F7/02 B22F3/12 H01F41/02

    摘要: There are provided a permanent magnet and a manufacturing method thereof that enables concentration of V, Mo, Zr, Ta, Ti, W or Nb contained in an organometallic compound in grain boundaries of the permanent magnet. To fine powder of milled neodymium magnet is added an organometallic compound solution containing an organometallic compound expressed with a structural formula of M-(OR)x (M represents V, Mo, Zr, Ta, Ti, W or Nb, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the neodymium magnet powder. Thereafter, a compact body obtained by compacting the magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius so as to perform a calcination process in hydrogen. Thereafter, through sintering, a permanent magnet is manufactured.

    摘要翻译: 提供一种使永磁体的晶界中的有机金属化合物中含有的V,Mo,Zr,Ta,Ti,W或Nb的浓度的永磁体及其制造方法。 向研磨的钕磁体的细粉末中加入含有结构式为M-(OR)x(M表示V,Mo,Zr,Ta,Ti,W或Nb的有机金属化合物)的有机金属化合物溶液,R表示取代基 由直链或支链烃构成的基团,x表示任意的整数),以使有机金属化合物均匀地附着于钕磁体粉末的粒子表面。 此后,将通过压实磁体粉末获得的紧凑体在200-900摄氏度的氢气氛中保持数小时,以便在氢气中进行煅烧过程。 此后,通过烧结制造永久磁铁。

    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF
    10.
    发明申请
    PERMANENT MAGNET AND MANUFACTURING METHOD THEREOF 有权
    永磁体及其制造方法

    公开(公告)号:US20120181475A1

    公开(公告)日:2012-07-19

    申请号:US13499338

    申请日:2011-03-28

    摘要: There are provided a permanent magnet and a manufacturing method thereof enabling carbon content contained in magnet particles to be reduced in advance before sintering even when wet milling is employed. Coarsely-milled magnet powder is further milled by a bead mill in a solvent together with an organometallic compound expressed with a structural formula of M−(OR)x (M includes at least one of neodymium, praseodymium, dysprosium and terbium, each being a rare earth element, R represents a substituent group consisting of a straight-chain or branched-chain hydrocarbon, x represents an arbitrary integer) so as to uniformly adhere the organometallic compound to particle surfaces of the magnet powder. Thereafter, a compact body of compacted magnet powder is held for several hours in hydrogen atmosphere at 200 through 900 degrees Celsius to perform hydrogen calcination process. Thereafter, through sintering process, a permanent magnet 1 is manufactured.

    摘要翻译: 提供永磁体及其制造方法,即使在使用湿磨时也能预先在烧结前减少磁体颗粒中含有的碳含量。 通过珠磨机在溶剂中与结构式M-(OR)x表示的有机金属化合物进一步研磨粗粉末磁体粉末(M包括钕,镨,镝和铽中的至少一种,各自为 稀土元素,R表示由直链或支链烃构成的取代基,x表示任意的整数),以使有机金属化合物均匀地附着在磁铁粉末的粒子表面。 之后,在200〜900摄氏度的氢气氛中,将紧凑的致密体磁体保持数小时,进行氢煅烧。 然后,通过烧结工序制造永久磁铁1。