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公开(公告)号：US08895345B2
公开(公告)日：2014-11-25
申请号：US13159192
申请日：2011-06-13
申请人： Takanobu Akiyama
发明人： Takanobu Akiyama
CPC分类号： B23K26/40 , B23K26/082 , B23K26/53 , B23K26/60 , B23K2103/172 , B23K2103/50 , B28D5/0005
摘要： The present invention provides a dicing method that achieves excellent dicing properties at low costs by removing a metal film through a metal processing operation with a diamond tool and then performing pulse laser beam irradiation. The dicing method is a method of dicing a substrate to be processed, devices being formed in the substrate to be processed, a metal film being formed on one surface of the substrate to be processed. The dicing method includes: placing the substrate to be processed onto a first stage; forming a groove portion by removing the metal film through a metal processing operation with a diamond tool; placing the substrate to be processed onto a second stage; generating a clock signal; emitting a pulse laser beam synchronized with the clock signal to the groove portion of the substrate to be processed; moving the substrate to be processed and the pulse laser beam relative to each other; switching the pulse laser beam between irradiation and non-irradiation of the substrate to be processed on a light pulse basis by controlling passing and blocking of the pulse laser beam with a pulse picker in synchronization with the clock signal; and forming cracks in the substrate to be processed, the cracks reaching the substrate surface.
摘要翻译： 本发明提供一种切割方法，其通过金刚石工具的金属加工操作除去金属膜，然后进行脉冲激光束照射，以低成本实现优良的切割性能。 切割方法是在被处理基板上形成的被处理基板的装置，形成在被处理基板的一个面上的金属膜的切割方法。 切割方法包括：将要处理的基板放置在第一台上; 通过金刚石工具的金属加工操作去除金属膜形成凹槽部分; 将要处理的基板放置在第二台上; 产生时钟信号; 将与时钟信号同步的脉冲激光束发射到待处理的基板的槽部; 移动要处理的基板和相对于彼此的脉冲激光束; 通过与时钟信号同步地控制脉冲激光束的脉冲激光束的通过和阻断，在脉冲的基础上切换脉冲激光束的照射和不照射待处理的基板; 并在待处理的基板上形成裂纹，裂纹到达基板表面。
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公开(公告)号：US08424427B2
公开(公告)日：2013-04-23
申请号：US13051870
申请日：2011-03-18
申请人： Takanobu Akiyama , Sumihisa Kondo
发明人： Takanobu Akiyama , Sumihisa Kondo
CPC分类号： B23B5/48 , B23B1/00 , G05B19/182 , G05B2219/36185 , G05B2219/50353 , Y10T82/10 , Y10T82/16426 , Y10T82/2502 , Y10T82/2583 , Y10T409/502624
摘要： There is provided a roll surface machining method and apparatus for using a cutting tool to carry out ultra-precision machining in the surface of a roll with a reduced amount of data. The apparatus and method for roll surface machining includes setting a machining start position of a cutting tool with respect to the surface of the roll by C-axis indexing of the roll and positioning of the roll in the axial direction (Z-axis direction) both with respect to the cutting tool. Also the cutting tool and the roll are moved relative to each other in the axial direction of the roll by position control using C-Z axis interpolation, thereby forming a three-dimensional pattern in the surface of the roll.
摘要翻译： 提供了一种使用切削工具在减少数据量的辊表面进行超精密加工的辊面加工方法和装置。 辊表面加工的装置和方法包括：通过辊的C轴分度和辊在轴向（Z轴方向）上的定位来设定切削工具相对于辊的表面的加工开始位置 相对于切削工具。 此外，通过使用C-Z轴插补的位置控制，切割工具和辊沿辊的轴向相对于彼此移动，从而在辊的表面中形成三维图案。
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公开(公告)号：US08020268B2
公开(公告)日：2011-09-20
申请号：US11762524
申请日：2007-06-13
申请人： Takanobu Akiyama , Satoshi Kato
发明人： Takanobu Akiyama , Satoshi Kato
CPC分类号： B23B5/08 , B23B3/065 , B23B29/244 , B23B2220/12 , B23B2226/31 , B23B2260/0725 , B23B2270/54 , B23B2270/56 , B23C3/34 , Y10T29/5155 , Y10T29/5174 , Y10T82/2502 , Y10T82/2508 , Y10T82/2524 , Y10T82/2562 , Y10T82/2587
摘要： There is provided a precision roll turning lathe which can machine with high precision a three-dimensional pattern of three-sided pyramids or four-sided pyramids in the surface of a roll. The precision roll turning lather includes: a bed; a headstock, mounted on the bed, having a main spindle for rotating a roll as a workpiece while holding one end of the roll by means of a chuck; a tail stock, mounted on the bed and disposed opposite the headstock, for rotatably supporting the other end of the roll; a carriage including a saddle mounted on the bed movably in the longitudinal direction (Z-axis direction) of the roll, and a table mounted on the saddle movably in a direction (X-axis direction) perpendicular to the longitudinal direction of the roll; a tool swivel mounted on the table; a tool post mounted on the tool swivel and having a plurality of cutting tools attached thereto; a C-axis control means for performing control for carrying out circumferential indexing of the roll and control for continuously rotating the main shaft at a predetermined rotating speed; and a switching means for selective switching between the roll-indexing control and the control of continuous rotation of the main spindle.
摘要翻译： 提供了一种精密滚动车床，其能够以高精度加工辊的表面中的三面金字塔或四边形金字塔的三维图案。 精密辊转发泡包括：一张床; 安装在床上的主轴箱具有主轴，用于通过卡盘保持辊的一端，将主轴作为工件旋转; 尾座，安装在床上并且设置在头架的对面，用于可旋转地支撑辊的另一端; 包括安装在所述床上的鞍座，所述鞍座沿所述辊的纵向方向（Z轴方向）可移动地安装;以及台架，其沿与所述辊的纵向方向垂直的方向（X轴方向）可移动地安装在所述鞍座上; 安装在桌子上的工具旋转装置; 安装在所述工具旋转件上并具有附接到其上的多个切削工具的工具柱; C轴控制装置，用于执行用于执行辊的周向分度的控制，并且以预定的转速连续旋转主轴的控制; 以及用于在辊分度控制和主轴的连续旋转的控制之间的选择性切换的切换装置。
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公开(公告)号：US20100011920A1
公开(公告)日：2010-01-21
申请号：US12503970
申请日：2009-07-16
CPC分类号： B23B1/00 , B23B3/162 , B23B27/20 , B23B2220/12 , Y10T82/10 , Y10T82/13 , Y10T82/2502
摘要： There is provided a V-groove machining method and apparatus which, by measuring the depth of a V groove cut by a cutting tool and correcting the cutting depth of the cutting tool based on the measurement data, enables high precision machining of four-sided pyramids having vertices of a uniform height. The V-groove machining method includes the steps of: feeding a cutting tool relative to a workpiece in a first direction to create a first V groove, extending in the first direction, in the surface of the workpiece, and repeating this machining operation to create first V grooves at a predetermined pitch; moving the cutting tool along one of the first V grooves and scanning the first V groove with a distance sensor, disposed near the cutting tool, to measure the distance to the bottom of the first V groove, thereby detecting undulation of the bottom of the first V groove along the first direction; and feeding the cutting tool relative to the workpiece in a second direction orthogonal to the first direction to create a second V groove in the surface of the workpiece, and repeating this machining operation while correcting the position of the cutting tool in the machining position for each second V groove based on the results of detection of the undulation, thereby creating second V grooves at a predetermined pitch.
摘要翻译： 提供了一种V槽加工方法和装置，通过测量由切削工具切割的V槽的深度，并且基于测量数据校正切削刀具的切削深度，能够实现四边锥体的高精度加工 具有均匀高度的顶点。 V槽加工方法包括以下步骤：在第一方向上相对于工件进给切削工具，以在工件的表面中产生在第一方向上延伸的第一V形槽，并重复该加工操作以产生 第一V槽以预定间距; 沿着所述第一V槽中的一个槽移动所述切削工具，并且设置在所述切削工具附近的距离传感器扫描所述第一V槽以测量到所述第一V槽的底部的距离，从而检测所述第一V槽的底部的起伏 V槽沿第一方向; 并且在与所述第一方向正交的第二方向上相对于所述工件进给所述切削工具，以在所述工件的表面中产生第二V形槽，并且在每个所述加工位置校正所述切削工具在所述加工位置中的位置的同时重复该加工操作 基于波动检测结果的第二V槽，从而以预定间距产生第二V槽。
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公开(公告)号：US20090120250A1
公开(公告)日：2009-05-14
申请号：US12260143
申请日：2008-10-29
申请人： TAKANOBU AKIYAMA
发明人： TAKANOBU AKIYAMA
CPC分类号： B23B5/08 , B23B2220/12 , B23C2226/31 , B23D11/00 , B23Q1/38 , Y10T82/2533 , Y10T82/2535 , Y10T82/2541
摘要： There is provided a precision roll turning lathe which can perform machining of fine grooves at a dramatically higher speed as compared to conventional roll turning lathes, thus significantly shortening time taken for machining one groove. The precision roll turning lathe includes: a bed; a headstock, mounted on the bed, having a main spindle for rotating a roll as a workpiece while holding one end of the roll by means of a chuck; a tail stock, mounted on the bed and disposed opposite the headstock, for rotatably supporting the other end of the roll; a carriage including a saddle mounted on the bed movably in the longitudinal direction of the roll, and a table mounted on the saddle movably in a direction perpendicular to the longitudinal direction of the roll; and an air slide apparatus, mounted on the table, including a guide rail extending parallel to the roll in the longitudinal direction, an air slider having a diamond tool, capable of traveling in a floating state on the guide rail, and a linear motor for driving the air slider.
摘要翻译： 与传统的滚动车床相比，提供了一种精密滚动车床，其可以以显着更高的速度进行细槽的加工，从而显着缩短了加工一个槽所花费的时间。 精密滚动车床包括：床; 安装在床上的主轴箱具有主轴，用于通过卡盘保持辊的一端，将主轴作为工件旋转; 尾座，安装在床上并且设置在头架的对面，用于可旋转地支撑辊的另一端; 一个托架，它包括一个安装在该床上的鞍座，该马鞍沿着该滚筒的纵向方向可移动地安装;以及一个台架，其在垂直于所述滚筒的纵向的方向上可移动地安装在所述鞍座上; 以及安装在工作台上的空气滑动装置，包括沿纵向方向平行于辊延伸的导轨，具有金刚石工具的空气滑动件，能够在导轨上以浮动状态行进;以及线性电动机， 驾驶空气滑块。
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公开(公告)号：US20080011132A1
公开(公告)日：2008-01-17
申请号：US11762524
申请日：2007-06-13
申请人： TAKANOBU AKIYAMA , SATOSHI KATO
发明人： TAKANOBU AKIYAMA , SATOSHI KATO
IPC分类号： B23B7/02
CPC分类号： B23B5/08 , B23B3/065 , B23B29/244 , B23B2220/12 , B23B2226/31 , B23B2260/0725 , B23B2270/54 , B23B2270/56 , B23C3/34 , Y10T29/5155 , Y10T29/5174 , Y10T82/2502 , Y10T82/2508 , Y10T82/2524 , Y10T82/2562 , Y10T82/2587
摘要： There is provided a precision roll turning lathe which can machine with high precision a three-dimensional pattern of three-sided pyramids or four-sided pyramids in the surface of a roll. The precision roll turning lather includes: a bed; a headstock, mounted on the bed, having a main spindle for rotating a roll as a workpiece while holding one end of the roll by means of a chuck; a tail stock, mounted on the bed and disposed opposite the headstock, for rotatably supporting the other end of the roll; a carriage including a saddle mounted on the bed movably in the longitudinal direction (Z-axis direction) of the roll, and a table mounted on the saddle movably in a direction (X-axis direction) perpendicular to the longitudinal direction of the roll; a tool swivel mounted on the table a tool post mounted on the tool swivel and having a plurality of cutting tools attached thereto; a C-axis control means for performing control for carrying out circumferential indexing of the roll and control for continuously rotating the main shaft at a predetermined rotating speed; and a switching means for selective switching between the roll-indexing control and the control of continuous rotation of the main spindle.
摘要翻译： 提供了一种精密滚动车床，其能够以高精度加工辊的表面中的三面金字塔或四边形金字塔的三维图案。 精密辊转发泡包括：一张床; 安装在床上的主轴箱具有主轴，用于通过卡盘保持辊的一端，将主轴作为工件旋转; 尾座，安装在床上并且设置在头架的对面，用于可旋转地支撑辊的另一端; 包括安装在所述床上的鞍座，所述鞍座沿所述辊的纵向方向（Z轴方向）可移动地安装;以及台架，其沿与所述辊的纵向方向垂直的方向（X轴方向）可移动地安装在所述鞍座上; 安装在所述工作台上的工具旋转装置，其安装在所述工具旋转件上并具有附接到其上的多个切割工具; C轴控制装置，用于执行用于执行辊的周向分度的控制，并且以预定的转速连续旋转主轴的控制; 以及用于在辊分度控制和主轴的连续旋转的控制之间的选择性切换的切换装置。
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公开(公告)号：US08413557B2
公开(公告)日：2013-04-09
申请号：US12062931
申请日：2008-04-04
申请人： Takanobu Akiyama , Sumihisa Kondo
发明人： Takanobu Akiyama , Sumihisa Kondo
CPC分类号： B23B5/48 , B23B1/00 , G05B19/182 , G05B2219/36185 , G05B2219/50353 , Y10T82/10 , Y10T82/16426 , Y10T82/2502 , Y10T82/2583 , Y10T409/502624
摘要： There is provided a roll surface machining method and apparatus for using a cutting tool to carry out ultra-precision machining in the surface of a roll with a reduced amount of data. The apparatus and method for roll surface machining includes setting a machining start position of a cutting tool with respect to the surface of the roll by C-axis indexing of the roll and positioning of the roll in the axial direction (Z-axis direction) both with respect to the cutting tool. Also the cutting tool and the roll are moved relative to each other in the axial direction of the roll by position control using C-Z axis interpolation, thereby forming a three-dimensional pattern in the surface of the roll.
摘要翻译： 提供了一种使用切削工具在减少数据量的辊表面进行超精密加工的辊面加工方法和装置。 辊表面加工的装置和方法包括：通过辊的C轴分度和辊在轴向（Z轴方向）上的定位来设定切削工具相对于辊的表面的加工开始位置 相对于切削工具。 此外，通过使用C-Z轴插补的位置控制，切割工具和辊沿辊的轴向相对于彼此移动，从而在辊的表面中形成三维图案。
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公开(公告)号：US08215211B2
公开(公告)日：2012-07-10
申请号：US12503970
申请日：2009-07-16
CPC分类号： B23B1/00 , B23B3/162 , B23B27/20 , B23B2220/12 , Y10T82/10 , Y10T82/13 , Y10T82/2502
摘要： There is provided a V-groove machining method and apparatus which, by measuring the depth of a V groove cut by a cutting tool and correcting the cutting depth of the cutting tool based on the measurement data, enables high precision machining of four-sided pyramids having vertices of a uniform height. The V-groove machining method includes the steps of: feeding a cutting tool relative to a workpiece in a first direction to create a first V groove, extending in the first direction, in the surface of the workpiece, and repeating this machining operation to create first V grooves at a predetermined pitch; moving the cutting tool along one of the first V grooves and scanning the first V groove with a distance sensor, disposed near the cutting tool, to measure the distance to the bottom of the first V groove, thereby detecting undulation of the bottom of the first V groove along the first direction; and feeding the cutting tool relative to the workpiece in a second direction orthogonal to the first direction to create a second V groove in the surface of the workpiece, and repeating this machining operation while correcting the position of the cutting tool in the machining position for each second V groove based on the results of detection of the undulation, thereby creating second V grooves at a predetermined pitch.
摘要翻译： 提供了一种V槽加工方法和装置，通过测量由切削工具切割的V槽的深度，并且基于测量数据校正切削刀具的切削深度，能够实现四边锥体的高精度加工 具有均匀高度的顶点。 V槽加工方法包括以下步骤：在第一方向上相对于工件进给切削工具，以在工件的表面中产生在第一方向上延伸的第一V形槽，并重复该加工操作以产生 第一V槽以预定间距; 沿着所述第一V槽中的一个槽移动所述切削工具，并且设置在所述切削工具附近的距离传感器扫描所述第一V槽以测量到所述第一V槽的底部的距离，从而检测所述第一V槽的底部的起伏 V槽沿第一方向; 并且在与所述第一方向正交的第二方向上相对于所述工件进给所述切削工具，以在所述工件的表面中产生第二V形槽，并且在每个所述加工位置校正所述切削工具在所述加工位置中的位置的同时重复该加工操作 基于波动检测结果的第二V槽，从而以预定间距产生第二V槽。
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公开(公告)号：US20070295175A1
公开(公告)日：2007-12-27
申请号：US11762511
申请日：2007-06-13
申请人： Takanobu Akiyama
发明人： Takanobu Akiyama
IPC分类号： B23B3/00
CPC分类号： B23B5/48 , Y10T82/25 , Y10T82/2508 , Y10T82/2524 , Y10T82/2587
摘要： The present invention provides a precision roll turning lathe which can form a pattern including three-dimensionally shaped portions, such as three-sided pyramids, on the surface of a roll, with high accuracy. Specifically, a tool post 33 is provided with a tool turning axis (A axis) which is used to turn a tool such that, when forming a spiral groove cut through the roll, a cutting face of a tip of the tool 36 is oriented to be perpendicular to the direction along which the spiral groove extends.
摘要翻译： 本发明提供一种能够高精度地在辊表面上形成包括三维金字塔等三维形状的图案的精密滚动车床。 具体而言，工具柱33设置有用于转动工具的工具转动轴线（A轴），使得当形成通过辊切割的螺旋槽时，工具36的尖端的切割面被定向为 垂直于螺旋槽延伸的方向。
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公开(公告)号：US20070251360A1
公开(公告)日：2007-11-01
申请号：US11739884
申请日：2007-04-25
申请人： TAKANOBU AKIYAMA
发明人： TAKANOBU AKIYAMA
IPC分类号： B23B27/00
CPC分类号： B23B29/244 , B23B3/162 , B23B5/08 , B23B2220/12 , B23B2226/31 , B23B2250/04 , B23C3/30 , Y10T29/5155 , Y10T29/5174 , Y10T82/16131 , Y10T82/2508 , Y10T82/2524 , Y10T82/2587
摘要： There is provided a precision roll turning lathe which can not only machine with high precision circumferential transverse grooves in the peripheral surface of a roll but can also machine with high precision longitudinal grooves in the peripheral surface. The precision roll turning lathe includes: a bed 10; a headstock 12, mounted on the bed 10, for rotating a roll-shaped workpiece while holding one end of the workpiece by means of a chuck, said headstock having an indexing axis (C axis) for performing circumferential indexing of the workpiece; a tail stock 14, mounted on the bed 10 and disposed opposite the headstock 12, for rotatably supporting the other end of the workpiece; a carriage 16 including a saddle 26 mounted on the bed 10 movably in the longitudinal direction (Z-axis direction) of the workpiece, and a table 28 mounted on the saddle 26 movably in a direction (X-axis direction) perpendicular to the longitudinal direction of the workpiece; a tool swivel 30 mounted on the table 28 and having an indexing axis (B axis); a tool post 33 mounted on the tool swivel 30 and having a plurality of cutting tools 36 attached thereto; and a fly cutter spindle device 34 mounted to the tool post 34 and having a cutter spindle for rotating a fly cutter 39.
摘要翻译： 提供了一种精密滚动车床，其不仅可以在辊的周面中加工高精度的周向横向槽，而且还可以在周面上加工高精度的纵向槽。 精密滚动车床包括：床10; 安装在床10上的头架12用于通过卡盘保持工件的一端来旋转辊状工件，所述主轴架具有用于对工件进行周向分度的分度轴线（C轴）; 尾座14，安装在床10上并与主轴箱12相对设置，用于可旋转地支撑工件的另一端; 包括安装在床10上的鞍座26的滑架16，其沿着工件的纵向（Z轴方向）可移动;以及安装在鞍座26上的工作台28，其沿垂直于纵向方向 工件方向; 安装在工作台28上并具有分度轴（B轴）的工具旋转件30; 安装在工具旋转件30上并具有附接到其上的多个切削工具36的工具杆33; 以及安装在工具柱34上并具有用于旋转飞刀39的刀具主轴的飞刀主轴装置34。
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