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公开(公告)号:US08268645B2
公开(公告)日:2012-09-18
申请号:US13331909
申请日:2011-12-20
申请人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
发明人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
CPC分类号: H01L31/0288 , H01L21/67092 , H01L21/6838 , H01L31/0747 , H01L31/1892 , Y02E10/50
摘要: A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.
摘要翻译: 用于从施主实体产生层的方法包括:在植入期间,将施主体以离子剂量植入,并将施主体加热至植入温度。 施主体与供体体和基座组件直接接触的基座组件分离接触。 通过向施主体施加热分布,使薄片从供体体剥离。 可以调整植入和剥脱条件以最大化层的无缺陷区域。
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公开(公告)号:US20130200497A1
公开(公告)日:2013-08-08
申请号:US13558836
申请日:2012-07-26
申请人: Venkatesan Murali , Thomas Edward Dinan, JR. , Steve Bababyan , Gopal Prabhu , Christopher J. Petti
发明人: Venkatesan Murali , Thomas Edward Dinan, JR. , Steve Bababyan , Gopal Prabhu , Christopher J. Petti
CPC分类号: H01L29/06 , H01L21/265
摘要: The invention provides a method of forming an electronic device from a lamina that has a coefficient of thermal expansion that is matched or nearly matched to a constructed metal support. In some embodiments the method comprises implanting the top surface of a donor body with an ion dosage to form a cleave plane followed by exfoliating a lamina from the donor body. After exfoliating the lamina, a flexible metal support that has a coefficient of thermal expansion with a value that is within 10% of the value of the coefficient of thermal expansion of the lamina is constructed on the lamina. In some embodiments the coefficients of thermal expansion of the metal support and the lamina are within 10% or within 5% of each other between the temperatures of 500 and 1050° C.
摘要翻译: 本发明提供了一种从薄片形成电子器件的方法,其具有与构造的金属支撑件匹配或接近匹配的热膨胀系数。 在一些实施方案中,该方法包括用离子剂量植入供体体的顶表面以形成切割平面,随后从供体体剥离薄片。 在剥离层之后,在层板上形成具有热膨胀系数为10%以内的层的热膨胀系数的柔性金属支撑体。 在一些实施例中,金属载体和薄层的热膨胀系数在500和1050℃的温度之间彼此的10%或5%以内。
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公开(公告)号:US08916954B2
公开(公告)日:2014-12-23
申请号:US13558826
申请日:2012-07-26
IPC分类号: H01L29/06
CPC分类号: H01L21/84 , H01L31/1892 , Y02E10/50
摘要: The invention provides a method of forming an electronic device from a lamina that has a coefficient of thermal expansion that is matched or nearly matched to a constructed metal support. In some embodiments the method comprises implanting the top surface of a donor body with an ion dosage to form a cleave plane followed by exfoliating a lamina from the donor body. After exfoliating the lamina, a flexible metal support that has a coefficient of thermal expansion with a value that is within 10% of the value of the coefficient of thermal expansion of the lamina is constructed on the lamina. In some embodiments the coefficients of thermal expansion of the metal support and the lamina are within 10% or within 5% of each other between the temperatures of 100 and 600° C.
摘要翻译: 本发明提供了一种从薄片形成电子器件的方法,其具有与构造的金属支撑件匹配或接近匹配的热膨胀系数。 在一些实施方案中,该方法包括用离子剂量植入供体体的顶表面以形成切割平面,随后从供体体剥离薄片。 在剥离层之后,在层板上形成具有热膨胀系数为10%以内的层的热膨胀系数的柔性金属支撑体。 在一些实施例中,金属载体和薄层的热膨胀系数在100和600℃的温度之间彼此的10%或5%以内。
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公开(公告)号:US08435804B2
公开(公告)日:2013-05-07
申请号:US13331915
申请日:2011-12-20
申请人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
发明人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
IPC分类号: H01L21/00 , H01L31/0224
CPC分类号: H01L31/0288 , H01L21/67092 , H01L21/67132 , H01L21/6838 , H01L31/0747 , H01L31/1892 , Y02E10/50 , Y10T156/11 , Y10T156/1132
摘要: A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and separably contacting the donor body with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body, and a deforming force is applied to the lamina or to the donor body to separate the lamina from the donor body.
摘要翻译: 用于从施主体产生层的方法包括用离子剂量植入施主体,并将施主体与供体体和基座组件直接接触的基座组件分离接触。 薄片从供体体剥离,并且将变形力施加到椎板或施主体以将椎板与供体体分开。
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公开(公告)号:US20130200496A1
公开(公告)日:2013-08-08
申请号:US13558826
申请日:2012-07-26
CPC分类号: H01L21/84 , H01L31/1892 , Y02E10/50
摘要: The invention provides a method of forming an electronic device from a lamina that has a coefficient of thermal expansion that is matched or nearly matched to a constructed metal support. In some embodiments the method comprises implanting the top surface of a donor body with an ion dosage to form a cleave plane followed by exfoliating a lamina from the donor body. After exfoliating the lamina, a flexible metal support that has a coefficient of thermal expansion with a value that is within 10% of the value of the coefficient of thermal expansion of the lamina is constructed on the lamina. In some embodiments the coefficients of thermal expansion of the metal support and the lamina are within 10% or within 5% of each other between the temperatures of 100 and 600 ° C.
摘要翻译: 本发明提供了一种从薄片形成电子器件的方法,其具有与构造的金属支撑件匹配或接近匹配的热膨胀系数。 在一些实施方案中,该方法包括用离子剂量植入供体体的顶表面以形成切割平面,随后从供体体剥离薄片。 在剥离层之后,在层板上形成具有热膨胀系数为10%以内的层的热膨胀系数的柔性金属支撑体。 在一些实施例中,金属载体和薄层的热膨胀系数在100和600℃的温度之间彼此的10%或5%以内。
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公开(公告)号:US20120171809A1
公开(公告)日:2012-07-05
申请号:US13331909
申请日:2011-12-20
申请人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
发明人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
IPC分类号: H01L31/0376 , H01L21/762
CPC分类号: H01L31/0288 , H01L21/67092 , H01L21/6838 , H01L31/0747 , H01L31/1892 , Y02E10/50
摘要: A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and heating the donor body to an implant temperature during implanting. The donor body is separably contacted with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body by applying a thermal profile to the donor body. Implantation and exfoliation conditions may be adjusted in order to maximize the defect-free area of the lamina.
摘要翻译: 用于从施主实体产生层的方法包括:在植入期间,将施主体以离子剂量植入,并将施主体加热至植入温度。 施主体与供体体和基座组件直接接触的基座组件分离接触。 通过向施主体施加热分布,使薄片从供体体剥离。 可以调整植入和剥脱条件以最大化层的无缺陷区域。
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公开(公告)号:US20120168091A1
公开(公告)日:2012-07-05
申请号:US13331915
申请日:2011-12-20
申请人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
发明人: Adam Kell , Robert Clark-Phelps , Joseph D. Gillespie , Gopal Prabhu , Takao Sakase , Theodore H. Smick , Steve Zuniga , Steve Bababyan
IPC分类号: B32B38/10
CPC分类号: H01L31/0288 , H01L21/67092 , H01L21/67132 , H01L21/6838 , H01L31/0747 , H01L31/1892 , Y02E10/50 , Y10T156/11 , Y10T156/1132
摘要: A method for producing a lamina from a donor body includes implanting the donor body with an ion dosage and separably contacting the donor body with a susceptor assembly, where the donor body and the susceptor assembly are in direct contact. A lamina is exfoliated from the donor body, and a deforming force is applied to the lamina or to the donor body to separate the lamina from the donor body.
摘要翻译: 用于从施主体产生层的方法包括用离子剂量植入施主体,并将施主体与供体体和基座组件直接接触的基座组件分离接触。 薄片从供体体剥离,并且将变形力施加到椎板或施主体以将椎板与供体体分开。
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