发明申请
- 专利标题: MULTI-LAYER METAL SUPPORT
- 专利标题(中): 多层金属支持
-
申请号: US13558826申请日: 2012-07-26
-
公开(公告)号: US20130200496A1公开(公告)日: 2013-08-08
- 发明人: Venkatesan Murali , Thomas Edward Dinan, JR. , Steve Bababyan , Gopal Prabhu
- 申请人: Venkatesan Murali , Thomas Edward Dinan, JR. , Steve Bababyan , Gopal Prabhu
- 申请人地址: US CA San Jose
- 专利权人: TWIN CREEKS TECHNOLOGIES, INC.
- 当前专利权人: TWIN CREEKS TECHNOLOGIES, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L21/30
- IPC分类号: H01L21/30 ; H01L29/02 ; H01L21/20
摘要:
The invention provides a method of forming an electronic device from a lamina that has a coefficient of thermal expansion that is matched or nearly matched to a constructed metal support. In some embodiments the method comprises implanting the top surface of a donor body with an ion dosage to form a cleave plane followed by exfoliating a lamina from the donor body. After exfoliating the lamina, a flexible metal support that has a coefficient of thermal expansion with a value that is within 10% of the value of the coefficient of thermal expansion of the lamina is constructed on the lamina. In some embodiments the coefficients of thermal expansion of the metal support and the lamina are within 10% or within 5% of each other between the temperatures of 100 and 600 ° C.
公开/授权文献
- US08916954B2 Multi-layer metal support 公开/授权日:2014-12-23
信息查询
IPC分类: