公开(公告)号：US06579139B1

公开(公告)日：2003-06-17

申请号：US09248101

申请日：1999-02-11

申请人： Seiji Mishima ,  Mitsutoshi Hasegawa ,  Kazuhiro Sando ,  Kazuya Shigeoka

发明人： Seiji Mishima ,  Mitsutoshi Hasegawa ,  Kazuhiro Sando ,  Kazuya Shigeoka

IPC分类号： H01J902

CPC分类号： H01J9/027

摘要： Disclosed is a method, for forming a film locally on a substrate, which comprises the steps of detecting the state of the substrate employing the obtained result to calculate positional information concerning a plurality of locations at which the material for the film is to be provided to form the film, and providing the material for the film at the plurality of locations based on the positional information that is obtained for the plurality of locations.

摘要翻译： 公开了一种用于在基板上局部形成膜的方法，其包括以下步骤：使用获得的结果来检测基板的状态，以计算关于要提供胶片材料的多个位置的位置信息 形成胶片，并且基于为多个位置获得的位置信息，在多个位置处为胶片提供材料。

公开(公告)号：US08075944B2

公开(公告)日：2011-12-13

申请号：US11354811

申请日：2006-02-16

申请人： Seiji Mishima

发明人： Seiji Mishima

IPC分类号： B05D5/12

CPC分类号： B41J11/46 ,  B41J3/28 ,  H01J9/027 ,  H01J2201/3165 ,  H01J2329/00

摘要： In case of forming films in plural positions with an ink jet head having plural nozzles, to provide a method of efficiently correcting an aberration in the liquid droplet applying position resulting for example from a distortion of a substrate, thereby producing an electron source with a high production yield. Positions of device electrodes 2, 3 on the electron source substrate 1 are detected by fetching in advance a surface image of the substrate 1, then a position of an electroconductive film 4 is calculated as a liquid droplet applying position, and an inclination angle θ of the ink jet head 11 is so regulated that a pitch of the nozzles 12 matches a pitch d of the obtained liquid droplet applying positions.

摘要翻译： 在用具有多个喷嘴的喷墨头形成多个位置的膜的情况下，提供一种有效地校正液滴施加位置的像差的方法，例如由于基板的变形而产生高的电子源 产量。 通过提取基板1的表面图像来检测电子源基板1上的器件电极2,3的位置，然后计算导电膜4的位置作为液滴施加位置和倾斜角度; 喷嘴11的间距与所获得的液滴施加位置的间距d相匹配。

公开(公告)号：US5369719A

公开(公告)日：1994-11-29

申请号：US899472

申请日：1992-06-16

申请人： Seiji Mishima ,  Yuichi Handa

发明人： Seiji Mishima ,  Yuichi Handa

IPC分类号： G02B6/122 ,  G02B6/12 ,  G02B6/28 ,  G02B6/42 ,  G02F1/35 ,  H01S5/00 ,  H01S5/026

CPC分类号： H04B10/291 ,  G02B6/2817 ,  G02B6/4246 ,  H01S5/026

摘要： A first light waveguide is formed, and second and third light waveguides are respectively connected to the first light waveguide at first and second positions. A first coupler for effecting tight branching and/or combining is arranged near the first position, and a second coupler for effecting light branching and/or combining is arranged near the second position. An optical amplifier is arranged on the first light waveguide between the first and second positions for compensating for a light loss of a light wave caused by each of the first and second coupler.

摘要翻译： 形成第一光波导，第二和第三光波导在第一和第二位置分别连接到第一光波导。 用于实现紧密分支和/或组合的第一耦合器设置在第一位置附近，并且用于实现光分支和/或组合的第二耦合器设置在第二位置附近。 光放大器布置在第一和第二位置之间的第一光波导上，用于补偿由第一和第二耦合器中的每一个引起的光波的光损失。

公开(公告)号：US20060216409A1

公开(公告)日：2006-09-28

申请号：US11354811

申请日：2006-02-16

申请人： Seiji Mishima

发明人： Seiji Mishima

IPC分类号： B05D5/12 ,  C23C16/52 ,  B05D5/00

CPC分类号： B41J11/46 ,  B41J3/28 ,  H01J9/027 ,  H01J2201/3165 ,  H01J2329/00

摘要： In case of forming films in plural positions with an ink jet head having plural nozzles, to provide a method of efficiently correcting an aberration in the liquid droplet applying position resulting for example from a distortion of a substrate, thereby producing an electron source with a high production yield. Positions of device electrodes 2, 3 on the electron source substrate 1 are detected by fetching in advance a surface image of the substrate 1, then a position of an electroconductive film 4 is calculated as a liquid droplet applying position, and an inclination angle θ of the ink jet head 11 is so regulated that a pitch of the nozzles 12 matches a pitch d of the obtained liquid droplet applying positions.

摘要翻译： 在用具有多个喷嘴的喷墨头形成多个位置的膜的情况下，提供一种有效地校正液滴施加位置的像差的方法，例如由于基板的变形而产生高的电子源 产量。 通过提取基板1的表面图像来检测电子源基板1上的器件电极2,3的位置，然后计算导电膜4的位置作为液滴施加位置，并且计算出倾斜角θ 喷墨头11被调整为使得喷嘴12的间距与获得的液滴施加位置的间距d相匹配。

公开(公告)号：US5523844A

公开(公告)日：1996-06-04

申请号：US90315

申请日：1993-07-13

申请人： Masanobu Hasegawa ,  Minoru Yoshii ,  Noriaki Ohguri ,  Masayoshi Sekine ,  Seiji Mishima

发明人： Masanobu Hasegawa ,  Minoru Yoshii ,  Noriaki Ohguri ,  Masayoshi Sekine ,  Seiji Mishima

IPC分类号： G01B11/00 ,  G01B11/02 ,  G01B11/14

CPC分类号： G01B11/026

摘要： An apparatus for detecting a displacement of an object comprises a light source element for emitting a detection light beam, a reflection member for reflecting the detection light beam from the light source element, the detection light beam being irradiated to the object by the reflection by the reflection member, a photo-sensing element for sensing the detection light beam reflected from the object by a photo-sensing plane thereof to detect an incident position of the detection light beam on the photo-sensing plane, displacement information of the object being determined in accordance with the detection by the photo-sensing element, and a substrate having the light source element, the reflection member and the photo-sensing element arranged thereon.

摘要翻译： 用于检测物体的位移的装置包括用于发射检测光束的光源元件，用于反射来自光源元件的检测光束的反射部件，检测光束通过反射被照射到物体上 反射构件，用于通过其感光面感测从物体反射的检测光束的光敏元件，以检测检测光束在感光平面上的入射位置，该物体的位移信息被确定在 根据光敏元件的检测，以及具有设置在其上的光源元件，反射构件和感光元件的基板。

公开(公告)号：US07037158B2

公开(公告)日：2006-05-02

申请号：US10665425

申请日：2003-09-22

申请人： Seiji Mishima

发明人： Seiji Mishima

IPC分类号： H01J9/24

CPC分类号： H01J9/027 ,  H01J2201/3165 ,  H01J2329/00

摘要： A plurality of kinds of ink jet devices are used for different regions, respectively. For element electrode pairs arranged in the vicinity of the fixed position of a spacer for example, there is used an ink jet device having an excellent performance in drop placement accuracy, drop volume accuracy or the like. For the remaining element electrode pairs, there are used ink jet devices having an inferior performance. As a result, an electron source substrate of a high quality can be manufactured at a low cost and with a high throughput.

摘要翻译： 多种喷墨装置分别用于不同的区域。 例如，对于排列在间隔物的固定位置附近的元件电极对，使用具有优异的滴定精度，滴下量精度等性能的喷墨装置。 对于剩余的元件电极对，使用具有较差性能的喷墨装置。 结果，可以以低成本和高产量制造高品质的电子源基片。

公开(公告)号：US20050128267A1

公开(公告)日：2005-06-16

申请号：US11038277

申请日：2005-01-21

申请人： Seiji Mishima

发明人： Seiji Mishima

IPC分类号： H01J9/02 ,  B05C5/00 ,  B05C13/02 ,  B05D5/12 ,  B41J2/05 ,  B41J2/175 ,  B41J2/19 ,  C23C16/06 ,  H05K3/10

CPC分类号： B41J2/19 ,  B41J2/175 ,  B41J2/2107 ,  H01J9/027 ,  Y10T29/49155

摘要： An electronic device manufacturing apparatus includes a gas removal means for removing a gas dissolved in a liquid containing the formation material of a member constituting an electronic device, a droplet discharge means for discharging droplets of the liquid, and a means for controlling the relative positions of the droplet discharge means and a substrate on which the electronic device is formed. The droplets are applied to a predetermined position on the substrate. The gas removal means includes a closed vessel filled with a membrane formed from a semi-transmitting film capable of transmitting a gas, and a vacuum unit for evacuating the closed vessel.

摘要翻译： 一种电子装置制造装置，包括：除去溶解在构成电子装置的构件的形成材料的液体中的气体的气体除去装置，用于排出液体的液滴的液滴喷出装置，以及用于控制液体的相对位置的装置 液滴喷出装置和形成电子装置的基板。 将液滴施加到基板上的预定位置。 气体去除装置包括填充有能够传输气体的半透膜形成的膜的密闭容器和用于抽空密闭容器的真空单元。

公开(公告)号：US06901659B1

公开(公告)日：2005-06-07

申请号：US09694268

申请日：2000-10-24

申请人： Seiji Mishima

发明人： Seiji Mishima

IPC分类号： H01J9/02 ,  B05C5/00 ,  B05C13/02 ,  B05D5/12 ,  B41J2/05 ,  B41J2/175 ,  B41J2/19 ,  C23C16/06 ,  H05K3/10

CPC分类号： B41J2/19 ,  B41J2/175 ,  B41J2/2107 ,  H01J9/027 ,  Y10T29/49155

摘要： An electron-emitting device manufacturing method comprising a gas removal step of removing a gas dissolved in a liquid containing a formation material of an electroconductive film in which an electron emitting area is to be formed, a temperature adjusting step of adjusting a temperature of the liquid from which the gas is removed, and a droplet discharge step of discharging droplets of which the temperature is adjusted by droplet discharge means in an ink jet manner, while controlling relative positions of the droplet discharge means and a substrate on which the electroconductive film in which the electron-emitting area is to be formed is formed. The droplets are thereby applied to a predetermined position on the substrate.

摘要翻译： 一种电子发射器件制造方法，包括除去溶解在含有要形成电子发射区域的导电膜的形成材料的液体中的气体的气体去除步骤，调节液体的温度的温度调节步骤 气体被除去的液滴喷射装置，以及通过喷墨方式喷射温度调节温度的液滴的液滴喷射步骤，同时控制液滴喷射装置和其上导电膜的基板的相对位置，其中 形成电子发射区。 由此将液滴施加到基板上的预定位置。

公开(公告)号：US06815001B1

公开(公告)日：2004-11-09

申请号：US09647953

申请日：2000-12-11

申请人： Seiji Mishima ,  Toshifumi Yoshioka ,  Mitsutoshi Hasegawa ,  Kazuhiro Sando ,  Kazuya Shigeoka

发明人： Seiji Mishima ,  Toshifumi Yoshioka ,  Mitsutoshi Hasegawa ,  Kazuhiro Sando ,  Kazuya Shigeoka

IPC分类号： B05D512

CPC分类号： H01J9/027 ,  H01J2201/3165 ,  H01L51/0004

摘要： A method of manufacturing an electronic device including a step of giving a droplet 12 of a liquid containing a formation material of a member that constitutes the electronic device to a plurality of portions on a substrate 1 while said substrate 1 and a droplet ejecting portion 7 are moved relatively in an in-surface direction of said substrate 1, wherein the droplet 12 is given while a position on a droplet given surface to which the droplet is given is corrected in accordance with the distribution of distances between the ejecting portion 7 and the droplet 12 given surface on the substrate which occurs when the substrate 1 and the ejecting portion 7 are relatively moved. Thereby forming the member constituting the electronic device accurately at the plural portion on the substrate 1, and thus forming plural electronic device of same charactoristics.

摘要翻译： 一种制造电子器件的方法，包括以下步骤：当基片1和墨滴喷射部分7为基底1时，将包含构成电子器件的构件的形成材料的液体的液滴12分配给基片1上的多个部分 根据喷射部分7和液滴之间的距离的分布来校正在液滴给定表面上给出液滴的位置，同时在所述基板1的表面方向上相对移动，其中给出液滴12， 在衬底1和排出部7相对移动时发生的衬底上的给定表面。 从而在基板1上的多个部分处精确地形成构成电子装置的构件，从而形成具有相同特征的多个电子装置。

公开(公告)号：US06220912B1

公开(公告)日：2001-04-24

申请号：US09074698

申请日：1998-05-08

申请人： Kazuya Shigeoka ,  Mitsutoshi Hasegawa ,  Seiji Mishima ,  Kazuhiro Sando

发明人： Kazuya Shigeoka ,  Mitsutoshi Hasegawa ,  Seiji Mishima ,  Kazuhiro Sando

IPC分类号： H01J902

CPC分类号： H01J9/027 ,  H01J2329/00

摘要： In order to suppress variation in delivery amounts in dispensing a material for forming electron emitting portions, a substantially homogeneous material is dispensed from a plurality of output portions to each of plural objective portions. This averages amounts of the material dispensed to the respective objective portions even if there is variation in delivery amounts of material from the respective output portions.

摘要翻译： 为了抑制分配用于形成电子发射部分的材料的输送量的变化，从多个输出部分分配多个目标部分中的基本均匀的材料。 即使来自各个输出部分的材料的输送量的变化，这平均分配到各个目标部分的材料的量。