公开(公告)号：US20110106324A1

公开(公告)日：2011-05-05

申请号：US12892551

申请日：2010-09-28

申请人： Sagie TSADKA ,  Nathan SELA

发明人： Sagie TSADKA ,  Nathan SELA

IPC分类号： G06F1/26 ,  G01P3/36

CPC分类号： G01P5/26 ,  F05B2240/96 ,  F05B2260/80 ,  F05B2270/32 ,  F05B2270/8042 ,  G01S7/4814 ,  G01S7/4817 ,  G01S7/486 ,  G01S17/107 ,  G01S17/42 ,  G01S17/58 ,  G01S17/87 ,  G01S17/95 ,  Y02A90/19

摘要： A system for monitoring wind characteristics in a volume including a plurality of non-coherent laser anemometers operative to measure wind characteristics in a plurality of corresponding sub-volumes located within the volume and a data processing subsystem operative to receive data from the plurality of non-coherent laser anemometers and to provide output data representing the wind characteristics in the volume.

摘要翻译： 一种用于监测包括多个非相干激光风速计的体积中的风特性的系统，其用于测量位于所述体积内的多个对应子体积中的风特征，以及数据处理子系统，用于从所述多个非相干激光风速计中接收数据， 相干激光风速计，并提供表示体积中的风特性的输出数据。

公开(公告)号：US07016526B2

公开(公告)日：2006-03-21

申请号：US10003347

申请日：2001-12-06

申请人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

发明人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

IPC分类号： G06K9/00

CPC分类号： G01N21/94 ,  G01N21/9501

摘要： A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer, collecting the signature of each pixel, defined by the way in which it responds to the light of a scanning beam, and determining whether the signature is that of a faultless pixel or of a pixel that is defective or suspect to be defective. An apparatus is also provided for the determination of such defects, which comprises a stage for supporting a wafer, a laser source generating a beam that is directed onto the wafer, collecting optics and photoelectric sensors for collecting the laser light scattered by the wafer in a number of directions and generating corresponding analog signals, an A/D converter deriving from said signals digital components defining pixel signatures, and selection systems for identifying the signatures of suspect pixels and verifying whether the suspect pixels are indeed defective.

公开(公告)号：US06707544B1

公开(公告)日：2004-03-16

申请号：US09391341

申请日：1999-09-07

申请人： Reginald Hunter ,  Sagie Tsadka

发明人： Reginald Hunter ,  Sagie Tsadka

IPC分类号： G01N2188

CPC分类号： G01N21/956 ,  G01N21/94 ,  G01N21/9501

摘要： The present invention generally provides an apparatus and a method for scanning a substrate in a processing system. A transmitter unit and a receiver unit are disposed on a processing system and cooperate to transmit and detect energy, respectively. The transmitter unit is positioned to transmit a signal onto the substrate surface moving between vacuum chambers, one of which is preferably a transfer chamber of a cluster tool. Features disposed on the substrate surface, which may include particles, devices, alphanumeric characters, the substrate edges, notches, etc., cause a scattering or reflection of a portion of the signal. The receiver unit is disposed to collect the scattered/reflected portion of the signal and direct the same to a processing unit. Preferably, the transmitter unit comprises a laser source and the receiver unit comprises a charged-coupled device (CCD). Preferably, the invention is integrally positioned in a processing system to allow substrate inspection during normal operation and provide real-time information.

摘要翻译： 本发明总体上提供了一种用于在处理系统中扫描衬底的装置和方法。 发射机单元和接收机单元设置在处理系统上，并分别协同传输和检测能量。 发射器单元被定位成将信号传输到在真空室之间移动的衬底表面上，其中一个优选地是簇工具的传送室。 设置在基板表面上的特征可以包括颗粒，装置，字母数字字符，基板边缘，凹口等，导致信号的一部分的散射或反射。 接收器单元设置成收集信号的散射/反射部分并将其引导到处理单元。 优选地，发射器单元包括激光源，并且接收器单元包括电荷耦合器件（CCD）。 优选地，本发明整体地定位在处理系统中，以允许正常操作期间的基板检查并提供实时信息。

公开(公告)号：US06661508B2

公开(公告)日：2003-12-09

申请号：US10212041

申请日：2002-08-06

申请人： Giora Eytan ,  Sagie Tsadka

发明人： Giora Eytan ,  Sagie Tsadka

IPC分类号： G01N2100

CPC分类号： G01N21/9501

摘要： A two dimensional sensor array is used to collect light diffracted from the inspected substrate. The signal generated by each individual sensor is passed through a threshold. Those signals which are below the threshold are amplified and are summed up. The summed signal is then passed through a second threshold. Summed signals which pass the second threshold are flagged as indicating suspect locations on the substrate. In the preferred embodiment, the entire circuitry is provided in the form of a CMOS camera which is placed in the Fourier plane of the diffracted light.

公开(公告)号：US20110061719A1

公开(公告)日：2011-03-17

申请号：US12953530

申请日：2010-11-24

申请人： Sagie Tsadka ,  Roy Segev ,  Piter Migalovich ,  Ori Levin ,  Ezri Tarazi ,  Robert Whelan

发明人： Sagie Tsadka ,  Roy Segev ,  Piter Migalovich ,  Ori Levin ,  Ezri Tarazi ,  Robert Whelan

IPC分类号： H01L31/052

CPC分类号： H01L31/0547 ,  F24S23/71 ,  F24S25/00 ,  F24S30/452 ,  F24S2020/23 ,  F24S2023/874 ,  Y02E10/42 ,  Y02E10/47 ,  Y02E10/52

摘要： A solar electricity generation system including a solar energy-to-electricity converter having a solar energy receiving surface including at least an electricity-generating solar energy receiving surface and a plurality of reflectors arranged to reflect solar energy directly onto the solar energy receiving surface, each of the plurality of reflectors having a reflecting surface which is configured and located and aligned with respect to the solar energy receiving surface to reflect specular solar radiation with a high degree of uniformity onto the solar energy receiving surface, the configuration, location and alignment of each of the reflectors being such that the geometrical projection of each reflecting surface is substantially coextensive with the electricity-generating solar energy receiving surface.

摘要翻译： 一种太阳能发电系统，包括具有至少包括发电太阳能接收表面的太阳能接收表面的太阳能 - 电力转换器和被布置为将太阳能直接反射到太阳能接收表面上的多个反射器，每个 所述多个反射器具有反射表面，所述反射表面被配置并相对于所述太阳能接收表面定位和对准，以将具有高度均匀性的镜面太阳辐射反射到所述太阳能接收表面上，每个的配置，位置和对准 反射器的几何形状使得每个反射表面的几何投影与发电太阳能接收表面基本上共同延伸。

公开(公告)号：US20090279902A1

公开(公告)日：2009-11-12

申请号：US12391233

申请日：2009-02-23

申请人： Er'el GRANOT ,  Shalva BEN-EZRA ,  Yinnon STAV ,  Sagie TSADKA ,  Heider EREIFEJ

发明人： Er'el GRANOT ,  Shalva BEN-EZRA ,  Yinnon STAV ,  Sagie TSADKA ,  Heider EREIFEJ

IPC分类号： H04B10/06

CPC分类号： H04B10/677

摘要： A DPSK/DQPSK receiver includes an optical splitter that separates the received DPSK/DQPSK optical signal according to an optical power splitting ratio into a plurality of received optical signals. A plurality of optical filters passes a plurality of filtered received optical signals. A plurality of optical detectors generates a plurality of electrical detection signals, each with a power that is related to a power of a respective filtered optical signal. A plurality of amplifiers generates a plurality of amplified electrical signals. At least one electrical signal combiner combines the plurality of amplified electrical detection signals generated by the plurality of optical amplifiers into a combined reception signal.

摘要翻译： DPSK / DQPSK接收机包括一个光分路器，它将接收的DPSK / DQPSK光信号根据光功率分配比分离成多个接收的光信号。 多个滤光器通过多个滤波的接收光信号。 多个光学检测器产生多个电检测信号，每个电检测信号具有与相应滤波的光信号的功率有关的功率。 多个放大器产生多个放大的电信号。 至少一个电信号组合器将由多个光放大器产生的多个放大电检测信号组合成组合的接收信号。

公开(公告)号：US07161670B2

公开(公告)日：2007-01-09

申请号：US10000451

申请日：2001-12-04

申请人： Giora Eytan ,  Sagie Tsadka

发明人： Giora Eytan ,  Sagie Tsadka

IPC分类号： G01N21/00

CPC分类号： G01N21/9501

摘要： A two dimensional sensor array is used to collect light diffracted from the inspected substrate. The signal generated by each individual sensor is passed through a threshold. Those signals which are below the threshold are amplified and are summed up. The summed signal is then passed through a second threshold. Summed signals which pass the second threshold are flagged as indicating suspect locations on the substrate. In the preferred embodiment, the entire circuitry is provided in the form of a CMOS camera which is placed in the Fourier plane of the diffracted light.

摘要翻译： 使用二维传感器阵列来收集从检查的基底衍射的光。 由每个传感器产生的信号通过阈值。 那些低于阈值的信号被放大并被总结。 然后将求和的信号通过第二阈值。 通过第二阈值的累加信号被标记为指示衬底上的可疑位置。 在优选实施例中，整个电路以CMOS摄像机的形式提供，CMOS相机放置在衍射光的傅立叶平面中。

公开(公告)号：US06247259B1

公开(公告)日：2001-06-19

申请号：US09168258

申请日：1998-10-08

申请人： Sagie Tsadka ,  Ehud Azoulay ,  Gideon Bar-Tal

发明人： Sagie Tsadka ,  Ehud Azoulay ,  Gideon Bar-Tal

IPC分类号： F41G136

CPC分类号： F41G3/08 ,  F41G3/06 ,  G01P5/245 ,  G01S17/10 ,  G01S17/42 ,  G01S17/88

摘要： A method for the fire control of flat trajectory weapons, which comprises the steps of measuring the target range and cross wind velocity along the intended projectile trajectory prior to firing the weapon and, using the know ballistic equations of the projectile, determining the expected vertical and horizontal deflection of the projectile and adjusting the weapon sight to compensate for said deflections.

摘要翻译： 一种平面轨迹武器消防控制方法，其特征在于包括以下步骤：在射击武器之前沿着预定的射弹轨迹测量目标范围和交叉风速，并使用弹道知识弹道方程确定预期垂直和 弹射器的水平偏转和调整武器瞄准器以补偿所述偏转。

公开(公告)号：US08701482B2

公开(公告)日：2014-04-22

申请号：US12892551

申请日：2010-09-28

申请人： Sagie Tsadka ,  Nathan Sela

发明人： Sagie Tsadka ,  Nathan Sela

IPC分类号： G01P13/00 ,  G01N21/00

CPC分类号： G01P5/26 ,  F05B2240/96 ,  F05B2260/80 ,  F05B2270/32 ,  F05B2270/8042 ,  G01S7/4814 ,  G01S7/4817 ,  G01S7/486 ,  G01S17/107 ,  G01S17/42 ,  G01S17/58 ,  G01S17/87 ,  G01S17/95 ,  Y02A90/19

摘要： A system for monitoring wind characteristics in a volume including a plurality of non-coherent laser anemometers operative to measure wind characteristics in a plurality of corresponding sub-volumes located within the volume and a data processing subsystem operative to receive data from the plurality of non-coherent laser anemometers and to provide output data representing the wind characteristics in the volume.

摘要翻译： 一种用于监测包括多个非相干激光风速计的体积中的风特性的系统，其用于测量位于所述体积内的多个对应子体积中的风特征，以及数据处理子系统，用于从所述多个非相干激光风速计中接收数据， 相干激光风速计，并提供表示体积中的风特性的输出数据。

公开(公告)号：US20080100846A1

公开(公告)日：2008-05-01

申请号：US11589276

申请日：2006-10-26

申请人： Sagie Tsadka ,  Niv Narkiss ,  Haim Chayet ,  Shalva Ben-Ezra ,  Er'el Granot ,  Reuven Zaibel ,  Arieh Sher ,  Shai Tzadok ,  Nir Shachar

发明人： Sagie Tsadka ,  Niv Narkiss ,  Haim Chayet ,  Shalva Ben-Ezra ,  Er'el Granot ,  Reuven Zaibel ,  Arieh Sher ,  Shai Tzadok ,  Nir Shachar

IPC分类号： G01B9/02

CPC分类号： G02F1/3519 ,  G02F2201/05 ,  H04B10/299

摘要： System and methods for all-optical signal regeneration based on free space optics are described. In one exemplary embodiment, a method for regenerating an optical signal comprises counter-propagating an input signal and a regenerating signal within an all-optical signal regenerator based on free space optics, where the all-optical signal regenerator based on free space optics comprises a Sagnac loop interferometer, and extracting a regenerated output signal from the Sagnac loop interferometer. In another exemplary embodiment, an all-optical signal regenerator based on free space optics comprises a Sagnac loop interferometer, an optical signal input path coupled to a semiconductor optical amplifier of the Sagnac loop interferometer, a regenerating optical signal path coupled to the semiconductor optical amplifier of the Sagnac loop interferometer, and a regenerated optical output path coupled to the Sagnac loop interferometer.

摘要翻译： 描述了基于自由空间光学的全光信号再生的系统和方法。 在一个示例性实施例中，用于再生光信号的方法包括基于自由空间光学器件在全光信号再生器内对输入信号和再生信号进行反向传播，其中基于自由空间光学的全光信号再生器包括 Sagnac环路干涉仪，并从Sagnac环路干涉仪提取再生的输出信号。 在另一示例性实施例中，基于自由空间光学的全光信号再生器包括Sagnac环路干涉仪，耦合到Sagnac环形干涉仪的半导体光放大器的光信号输入路径，耦合到半导体光放大器的再生光信号路径 的Sagnac环形干涉仪，以及耦合到Sagnac环形干涉仪的再生光学输出路径。