公开(公告)号：US07016526B2

公开(公告)日：2006-03-21

申请号：US10003347

申请日：2001-12-06

申请人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

发明人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

IPC分类号： G06K9/00

CPC分类号： G01N21/94 ,  G01N21/9501

摘要： A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer, collecting the signature of each pixel, defined by the way in which it responds to the light of a scanning beam, and determining whether the signature is that of a faultless pixel or of a pixel that is defective or suspect to be defective. An apparatus is also provided for the determination of such defects, which comprises a stage for supporting a wafer, a laser source generating a beam that is directed onto the wafer, collecting optics and photoelectric sensors for collecting the laser light scattered by the wafer in a number of directions and generating corresponding analog signals, an A/D converter deriving from said signals digital components defining pixel signatures, and selection systems for identifying the signatures of suspect pixels and verifying whether the suspect pixels are indeed defective.

公开(公告)号：US07454052B2

公开(公告)日：2008-11-18

申请号：US11042509

申请日：2005-01-26

申请人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

发明人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

IPC分类号： G06K9/00 ,  H04N7/18

CPC分类号： G01N21/94 ,  G01N21/9501

摘要： A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer, collecting the signature of each pixel, defined by the way in which it responds to the light of a scanning beam, and determining whether the signature is that of a faultless pixel or of a pixel that is defective or suspect to be defective. An apparatus is also provided for the determination of such defects, which comprises a stage for supporting a wafer, a laser source generating a beam that is directed onto the wafer, collecting optics and photoelectric sensors for collecting the laser light scattered by the wafer in a number of directions and generating corresponding analog signals, an A/D converter deriving from the signals digital components defining pixel signatures, and selection systems for identifying the signatures of suspect pixels and verifying whether the suspect pixels are indeed defective.

摘要翻译： 提供一种通过检查晶片上的各个像素来检测半导体晶片上的缺陷的方法，收集由其响应于扫描光束的光的方式限定的每个像素的签名，以及确定该签名是否为 无缺陷像素或缺陷或怀疑有缺陷的像素。 还提供了一种用于确定这种缺陷的装置，其包括用于支撑晶片的台，产生被引导到晶片上的光束的激光源，收集光学器件和用于收集由晶片散射的激光的光电传感器 方向数量并产生相应的模拟信号，从定义像素特征的信号数字分量得到的A / D转换器，以及用于识别可疑像素的签名的选择系统，并验证可疑像素是否确实是有缺陷的。

公开(公告)号：US20050129303A1

公开(公告)日：2005-06-16

申请号：US11042509

申请日：2005-01-26

申请人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

发明人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

IPC分类号： G01N21/956 ,  G01N21/88 ,  G01N21/94 ,  G06K9/00

CPC分类号： G01N21/94 ,  G01N21/9501

摘要： A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer, collecting the signature of each pixel, defined by the way in which it responds to the light of a scanning beam, and determining whether the signature is that of a faultless pixel or of a pixel that is defective or suspect to be defective. An apparatus is also provided for the determination of such defects, which comprises a stage for supporting a wafer, a laser source generating a beam that is directed onto the wafer, collecting optics and photoelectric sensors for collecting the laser light scattered by the wafer in a number of directions and generating corresponding analog signals, an A/D converter deriving from the signals digital components defining pixel signatures, and selection systems for identifying the signatures of suspect pixels and verifying whether the suspect pixels are indeed defective.

摘要翻译： 提供一种通过检查晶片上的各个像素来检测半导体晶片上的缺陷的方法，收集由其响应于扫描光束的光的方式限定的每个像素的签名，以及确定该签名是否为 无缺陷像素或缺陷或怀疑有缺陷的像素的像素。 还提供了一种用于确定这种缺陷的装置，其包括用于支撑晶片的台，产生被引导到晶片上的光束的激光源，收集光学器件和用于收集由晶片散射的激光的光电传感器 方向数量并产生相应的模拟信号，从定义像素特征的信号数字分量得到的A / D转换器，以及用于识别可疑像素的签名的选择系统，并验证可疑像素是否确实是有缺陷的。

公开(公告)号：US20050129302A1

公开(公告)日：2005-06-16

申请号：US11042084

申请日：2005-01-26

申请人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

发明人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

IPC分类号： G01N21/956 ,  G01N21/88 ,  G01N21/94 ,  G06K9/00

CPC分类号： G01N21/94 ,  G01N21/9501

摘要： A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer, collecting the signature of each pixel, defined by the way in which it responds to the light of a scanning beam, and determining whether the signature is that of a faultless pixel or of a pixel that is defective or suspect to be defective. An apparatus is also provided for the determination of such defects, which comprises a stage for supporting a wafer, a laser source generating a beam that is directed onto the wafer, collecting optics and photoelectric sensors for collecting the laser light scattered by the wafer in a number of directions and generating corresponding analog signals, an A/D converter deriving from the signals digital components defining pixel signatures, and selection systems for identifying the signatures of suspect pixels and verifying whether the suspect pixels are indeed defective.

公开(公告)号：US06810139B2

公开(公告)日：2004-10-26

申请号：US10281229

申请日：2002-10-28

申请人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

发明人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

IPC分类号： G06K900

CPC分类号： G01N21/94 ,  G01N21/9501

摘要： A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer, collecting the signature of each pixel, defined by the way in which it responds to the light of a scanning beam, and determining whether the signature is that of a faultless pixel or of a pixel that is defective or suspect to be defective. An apparatus is also provided for the determination of such defects, which comprises a stage for supporting a wafer, a laser source generating a beam that is directed onto the wafer, collecting optics and photoelectric sensors for collecting the laser light scattered by the wafer in a number of directions and generating corresponding analog signals, an A/D converter deriving from said signals digital components defining pixel signatures, and selection systems for identifying the signatures of suspect pixels and verifying whether the suspect pixels are indeed defective.

摘要翻译： 提供一种通过检查晶片上的各个像素来检测半导体晶片上的缺陷的方法，收集由其响应于扫描光束的光的方式限定的每个像素的签名，以及确定该签名是否为 无缺陷像素或缺陷或怀疑有缺陷的像素的像素。 还提供了一种用于确定这种缺陷的装置，其包括用于支撑晶片的台，产生被引导到晶片上的光束的激光源，收集光学器件和用于收集由晶片散射的激光的光电传感器 方向数量和产生相应的模拟信号，从所述信号导出的定义像素签名的数字分量的A / D转换器，以及用于识别可疑像素的签名并验证可疑像素是否确实是有缺陷的选择系统。

公开(公告)号：US06366690B1

公开(公告)日：2002-04-02

申请号：US09110870

申请日：1998-07-07

申请人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

发明人： Zeev Smilansky ,  Sagie Tsadka ,  Zvi Lapidot ,  Rivi Sherman

IPC分类号： G06K900

CPC分类号： G01N21/94 ,  G01N21/9501

摘要： A method is provided for the detection of defects on a semiconductor wafer by checking individual pixels on the wafer, collecting the signature of each pixel, defined by the way in which it responds to the light of a scanning beam, and determining whether the signature is that of a faultless pixel or of a pixel that is defective or suspect to be defective. An apparatus is also provided for the determination of such defects, which comprises a stage for supporting a wafer, a laser source generating a beam that is directed onto the wafer, collecting optics and photoelectric sensors for collecting the laser light scattered by the wafer in a number of directions and generating corresponding analog signals, an A/D converter deriving from the signals digital components defining pixel signatures, and selection systems for identifying the signatures of suspect pixels and verifying whether the suspect pixels are indeed defective.

摘要翻译： 提供一种通过检查晶片上的各个像素来检测半导体晶片上的缺陷的方法，收集由其响应于扫描光束的光的方式限定的每个像素的签名，以及确定该签名是否为 无缺陷像素或缺陷或怀疑有缺陷的像素的像素。 还提供了一种用于确定这种缺陷的装置，其包括用于支撑晶片的台，产生被引导到晶片上的光束的激光源，收集光学器件和用于收集由晶片散射的激光的光电传感器 方向数量并产生相应的模拟信号，从定义像素特征的信号数字分量得到的A / D转换器，以及用于识别可疑像素的签名的选择系统，并验证可疑像素是否确实是有缺陷的。