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1.发明授权Detector module, cooling arrangement and lithographic apparatus comprising a detector module 有权检测器模块，冷却装置和包括检测器模块的光刻设备公开(公告)号：US09081309B2
公开(公告)日：2015-07-14
申请号：US13259969
申请日：2010-02-16
CPC classification number: G03F7/70858 , G03F7/706 , G03F7/70808 , G03F7/7085
Abstract: A detector module (20) is described that includes at least one detector (30) for sensing photon radiation, an electronic circuit (40) coupled to the at least one detector (30), and a housing (50) having a first and a second body (60, 70), each having a bottom part (62, 72) and an at least partially cylindrical part (64, 74) extending from the bottom part (62, 72), wherein the at least partially cylindrical part (64) of the first body (60) is thermally coupled with the at least partially cylindrical part (74) of the second body (70), wherein the at least partially cylindrical part (64) of the first body (60) extends towards the bottom part (72) of the second body (70), and wherein the electronic circuit (40) is arranged inside the housing (50). A lithographic apparatus including the detector module (20) is also described.
Abstract translation: 描述了检测器模块（20），其包括用于感测光子辐射的至少一个检测器（30），耦合到所述至少一个检测器（30）的电子电路（40）和具有第一和第二检测器 第二主体（60,70），每个具有底部部分（62,72）和从底部部分（62,72）延伸的至少部分圆柱形部分（64,74），其中至少部分圆柱形部分（64,74） 第一主体（60）的至少部分圆柱形部分（64）与第二主体（70）的至少部分圆柱形部分（74）热耦合，其中第一主体（60）的至少部分圆柱形部分（64）朝向底部 第二主体（70）的部分（72），并且其中电子电路（40）布置在壳体（50）内。 还描述了包括检测器模块（20）的光刻设备。
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2.发明申请Detector Module, Cooling Arrangement And Lithographic Apparatus Comprising A Detector Module 有权检测器模块，包括检测器模块的冷却布置和平版印刷设备公开(公告)号：US20120075607A1
公开(公告)日：2012-03-29
申请号：US13259969
申请日：2010-02-16
CPC classification number: G03F7/70858 , G03F7/706 , G03F7/70808 , G03F7/7085
Abstract: A detector module (20) is described that includes at least one detector (30) for sensing photon radiation, an electronic circuit (40) coupled to the at least one detector (30), and a housing (50) having a first and a second body (60, 70), each having a bottom part (62, 72) and an at least partially cylindrical part (64, 74) extending from the bottom part (62, 72), wherein the at least partially cylindrical part (64) of the first body (60) is thermally coupled with the at least partially cylindrical part (74) of the second body (70), wherein the at least partially cylindrical part (64) of the first body (60) extends towards the bottom part (72) of the second body (70), and wherein the electronic circuit (40) is arranged inside the housing (50). A lithographic apparatus including the detector module (20) is also described.
Abstract translation: 描述了检测器模块（20），其包括用于感测光子辐射的至少一个检测器（30），耦合到所述至少一个检测器（30）的电子电路（40）和具有第一和第二检测器 第二主体（60,70），每个具有底部部分（62,72）和从底部部分（62,72）延伸的至少部分圆柱形部分（64,74），其中至少部分圆柱形部分（64,74） 第一主体（60）的至少部分圆柱形部分（64）与第二主体（70）的至少部分圆柱形部分（74）热耦合，其中第一主体（60）的至少部分圆柱形部分（64）朝向底部 第二主体（70）的部分（72），并且其中电子电路（40）布置在壳体（50）内。 还描述了包括检测器模块（20）的光刻设备。
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3.发明申请Cooling Device, Cooling Arrangement and Lithographic Apparatus Comprising a Cooling Arrangement 有权冷却装置，冷却装置和包括冷却装置的平版印刷装置公开(公告)号：US20100259734A1
公开(公告)日：2010-10-14
申请号：US12750337
申请日：2010-03-30
Applicant: Bastiaan Andreas Wilhelmus Hubertus KNARREN , Raymond Turk , Allard Eelco Kooiker , Nico Antonius Johannes Hubertus Boonen
Inventor： Bastiaan Andreas Wilhelmus Hubertus KNARREN , Raymond Turk , Allard Eelco Kooiker , Nico Antonius Johannes Hubertus Boonen
IPC: G03B27/52 , H01J7/24 , F28F7/00 , H01L23/467 , B23P11/00
CPC classification number: G03B27/52 , G03F7/70825 , G03F7/7085 , G03F7/70858 , H01L21/67109
Abstract: A cooling arrangement is described and includes a heat sink having a first thermal contact surface, an object having a second thermal contact surface and a resilient wall. The first thermal contact surface and the second thermal contact surface face each other and define a gap. The resilient wall is part of an enclosure that surrounds a space at least comprising the gap, and the cooling arrangement includes a facility to maintain a pressure difference between the space and an environment of the cooling arrangement. Additionally, a lithographic apparatus comprising such a cooling arrangement is described.
Abstract translation: 描述了冷却装置，并且包括具有第一热接触表面的散热器，具有第二热接触表面的物体和弹性壁。 第一热接触表面和第二热接触表面彼此面对并限定间隙。 弹性壁是围绕至少包括间隙的空间的外壳的一部分，并且冷却装置包括维持空间与冷却装置的环境之间的压力差的设备。 另外，描述了包括这种冷却装置的光刻设备。
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4.发明授权Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement 有权冷却布置和光刻设备包括弹性壁，其在检测器模块壳体和冷却装置的散热器之间产生间隙公开(公告)号：US08817228B2
公开(公告)日：2014-08-26
申请号：US12750337
申请日：2010-03-30
Applicant: Bastiaan Andreas Wilhelmus Hubertus Knarren , Raymond Turk , Allard Eelco Kooiker , Nico Antonius Hubertus Johannes Boonen
Inventor： Bastiaan Andreas Wilhelmus Hubertus Knarren , Raymond Turk , Allard Eelco Kooiker , Nico Antonius Hubertus Johannes Boonen
IPC: G03B27/52
CPC classification number: G03B27/52 , G03F7/70825 , G03F7/7085 , G03F7/70858 , H01L21/67109
Abstract: A cooling arrangement is described and includes a heat sink having a first thermal contact surface, an object having a second thermal contact surface and a resilient wall. The first thermal contact surface and the second thermal contact surface face each other and define a gap. The resilient wall is part of an enclosure that surrounds a space at least comprising the gap, and the cooling arrangement includes a facility to maintain a pressure difference between the space and an environment of the cooling arrangement. Additionally, a lithographic apparatus comprising such a cooling arrangement is described.
Abstract translation: 描述了冷却装置，并且包括具有第一热接触表面的散热器，具有第二热接触表面的物体和弹性壁。 第一热接触表面和第二热接触表面彼此面对并限定间隙。 弹性壁是围绕至少包括间隙的空间的外壳的一部分，并且冷却装置包括维持空间与冷却装置的环境之间的压力差的设备。 另外，描述了包括这种冷却装置的光刻设备。
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Patent Agency Ranking
公开(公告)号：US07181950B2
公开(公告)日：2007-02-27
申请号：US10543518
申请日：2004-01-27
Applicant: Pieter Jan Bolt , Raymond Turk , Petrus Paulus H. Veltmans
Inventor： Pieter Jan Bolt , Raymond Turk , Petrus Paulus H. Veltmans
IPC: B21D37/12
CPC classification number: B23Q1/34 , B21D28/00 , B23Q1/58 , B30B15/041
Abstract: A device for processing a thin metal foil and provided with a frame plate (7) for a die (16), a guide plate (10) for a punch (11), and a guide arranging for the die (16) and the punch to cooperate in the desired manner for the purpose of processing a thin metal foil by the die and the punch. The guide consists of at least two hinge elements (8, 9), each connected by means of an elastic line hinge (4, 5) with both the frame plate and the guide plate, the line hinges allowing only a pivotal motion in substantially the rectilinear displacement. The frame plate, the guide plate and the guide are manufactured from a single block (1) of material, in which the frame plate, guide and guide plate connected by the elastic line hinges are formed by the provision of bores (3), slits (6) and/or recesses (2).
Abstract translation: 一种用于处理薄金属箔并且设置有用于模具（16）的框架板（7），用于冲头（11）的引导板（10）和用于模具（16）和冲头 以期望的方式配合，以通过模具和冲头加工薄金属箔。 引导件由至少两个铰链元件（8,9）组成，每个铰链元件（8,9）均通过与框架板和引导板两者的弹性线铰链（4,5）连接，线铰链仅允许大体上的枢转运动 直线位移。 框架板，引导板和引导件由单块（1）的材料制成，其中通过弹性线铰链连接的框架板，引导和引导板通过设置孔（3），狭缝 （6）和/或凹部（2）。
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公开(公告)号：US20060144117A1
公开(公告)日：2006-07-06
申请号：US10543518
申请日：2004-01-27
Applicant: Pieter Bolt , Raymond Turk , Petrus Veltmans
Inventor： Pieter Bolt , Raymond Turk , Petrus Veltmans
IPC: B21D28/00
CPC classification number: B23Q1/34 , B21D28/00 , B23Q1/58 , B30B15/041
Abstract: A device for processing a thin metal foil and provided with a frame plate (7) for a die (16), a guide plate (10) for a punch (11), and a guide arranging for the die (16) and the punch to cooperate in the desired manner for the purpose of processing a thin metal foil by the die and the punch. The guide consists of at least two hinge elements (8, 9), each connected by means of an elastic line hinge (4, 5) with both the frame plate and the guide plate, the line hinges allowing only a pivotal motion in substantially the rectilinear displacement. The frame plate, the guide plate and the guide are manufactured from a single block (1) of material, in which the frame plate, guide and guide plate connected by the elastic line hinges are formed by the provision of throughgoing bores (3), slits (6) and/or recesses (2).
Abstract translation: 一种用于处理薄金属箔并且设置有用于模具（16）的框架板（7），用于冲头（11）的引导板（10）和用于模具（16）和冲头 以期望的方式配合，以通过模具和冲头加工薄金属箔。 引导件由至少两个铰链元件（8,9）组成，每个铰链元件（8,9）均通过与框架板和引导板两者的弹性线铰链（4,5）连接，线铰链仅允许大体上的枢转运动 直线位移。 框架板，引导板和引导件由单块（1）的材料制成，其中由弹性线铰链连接的框架板，引导和引导板通过设置通孔（3）形成， 狭缝（6）和/或凹部（2）。
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7.发明申请公开(公告)号：US20100119701A1
公开(公告)日：2010-05-13
申请号：US12615342
申请日：2009-11-10
Applicant: Raymond Turk , Hendrik Enting , Roland Anthony Tacken , Hendrik Rendering , René Jos Houben
Inventor： Raymond Turk , Hendrik Enting , Roland Anthony Tacken , Hendrik Rendering , René Jos Houben
CPC classification number: G01L1/2287
Abstract: The invention provides a method for preparing a conductive strain sensor on the surface of a device to measure strain at the surface of the device, which method comprises the steps of (a) providing a device; (b) optionally applying an isolating layer on a surface of the device; (c) establishing a distribution of particles of a first metal on the isolating layer obtained in step (b); and (d) depositing a layer of a second metal on at least part of the distribution of the particles of the first metal as obtained in step (c) by means of an electroless plating process or electro-deposition process.
Abstract translation: 本发明提供一种在器件表面上制备导电应变传感器以测量器件表面的应变的方法，该方法包括以下步骤：（a）提供器件; （b）任选地在所述装置的表面上施加隔离层; （c）在步骤（b）中获得的隔离层上建立第一金属颗粒的分布; 和（d）通过无电解电镀工艺或电沉积工艺在步骤（c）中获得的至少部分第一金属颗粒的分布上沉积第二金属层。
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公开(公告)号：US08311751B2
公开(公告)日：2012-11-13
申请号：US12086207
申请日：2006-12-08
Applicant: Raymond Turk , Hendrik Enting
Inventor： Raymond Turk , Hendrik Enting
IPC: G01N11/00
CPC classification number: G01L5/0014
Abstract: Device for determining displacement, the device comprising at least two substantially parallel plates located at a distance from each other. The device is arranged to determine a displacement of at least two predetermined parts of each of the plates with respect to each other and the displacement are directed substantially perpendicular to a main surface of the plates, wherein the displacement is a result of bending of the plates. The device comprises at least one sensor for measuring the displacement.
Abstract translation: 用于确定位移的装置，该装置包括彼此间隔一定距离的至少两个基本平行的板。 该装置被布置成确定每个板的至少两个预定部分相对于彼此的位移，并且位移基本上垂直于板的主表面指向，其中位移是板的弯曲的结果 。 该装置包括用于测量位移的至少一个传感器。
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公开(公告)号：US20100042341A1
公开(公告)日：2010-02-18
申请号：US12086207
申请日：2006-12-08
Applicant: Raymond Turk , Hendrik Enting
Inventor： Raymond Turk , Hendrik Enting
CPC classification number: G01L5/0014
Abstract: Device for determining displacement, the device comprising at least two substantially parallel plates located at a distance from each other. The device is arranged to determine a displacement of at least two predetermined parts of each of the plates with respect to each other and the displacement are directed substantially perpendicular to a main surface of the plates, wherein the displacement is a result of bending of the plates. The device comprises at least one sensor for measuring the displacement.
Abstract translation: 用于确定位移的装置，所述装置包括至少两个基本上平行的板，所述板位于彼此一定距离处。 该装置被布置成确定每个板的至少两个预定部分相对于彼此的位移，并且位移基本上垂直于板的主表面指向，其中位移是板的弯曲的结果 。 该装置包括用于测量位移的至少一个传感器。
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