Annular waveguide vertical cavity surface emitting laser array and
method of fabrication
    3.
    发明授权
    Annular waveguide vertical cavity surface emitting laser array and method of fabrication 失效
    环形波导垂直腔表面发射激光器阵列及其制造方法

    公开(公告)号:US6084900A

    公开(公告)日:2000-07-04

    申请号:US998365

    申请日:1997-12-24

    摘要: An array of annular waveguide VCSELs for achieving a stable single high order mode light source characterized as emitting a plurality of emission beams of varying wavelengths. The device array including a first mirror stack with mirror pairs in a Al.sub.x Ga.sub.1-x As/Al.sub.y Ga.sub.1-y As material system lattice matched to an active region. The active region includes an active structure sandwiched between a first cladding region adjacent the first mirror stack and a second cladding region, the active structure having at least one quantum well. The VCSEL further includes a second mirror stack lattice matched to the second cladding region and having mirror pairs in a Al.sub.x Ga.sub.1-x As/Al.sub.y Ga.sub.1-y As material system. The second mirror stack is etched to define a first VCSEL and at least one additional VCSEL, each VCSEL including an etched region, thereby defining an annular emission region through which light generated by the annular waveguide VCSEL is emitted.

    摘要翻译: 用于实现稳定的单个高阶模式光源的环形波导VCSEL的阵列,其特征在于发射多个不同波长的发射光束。 该器件阵列包括在与有源区匹配的Al x Ga 1-x As / Al y Ga 1-y As材料体系晶格中具有镜对的第一反射镜叠层。 有源区包括夹在邻近第一反射镜叠层的第一包层区域和第二包层区域之间的有源结构,该有源结构具有至少一个量子阱。 VCSEL还包括与第二包层区域匹配的第二反射镜堆叠晶格并且在Al x Ga 1-x As / Al y Ga 1-y As材料体系中具有镜对。 蚀刻第二反射镜叠层以限定第一VCSEL和至少一个附加VCSEL,每个VCSEL包括蚀刻区域,由此限定环形发射区域,通过该环形发射区域发射由环形波导VCSEL产生的光。