公开(公告)号：US06934011B2

公开(公告)日：2005-08-23

申请号：US10697811

申请日：2003-10-30

申请人： Bernd Geh ,  Paul Gräupner ,  Thomas Stammler ,  Dirk Stenkamp ,  Jochen Stühler ,  Klaus Wurmbrand

发明人： Bernd Geh ,  Paul Gräupner ,  Thomas Stammler ,  Dirk Stenkamp ,  Jochen Stühler ,  Klaus Wurmbrand

IPC分类号： G02B7/02 ,  G01B11/00 ,  G02B13/00 ,  G02B27/00 ,  G03F7/20 ,  G03F7/207 ,  H01L21/027 ,  G03B27/32

CPC分类号： G03F7/706 ,  G01M11/0207 ,  G01M11/0242 ,  G01M11/0257 ,  G02B27/0012 ,  G03F7/70225 ,  G03F7/70258 ,  G03F7/70666

摘要： In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.

公开(公告)号：US07301622B2

公开(公告)日：2007-11-27

申请号：US11187730

申请日：2005-07-22

申请人： Bernd Geh ,  Paul Gräupner ,  Thomas Stammler ,  Dirk Stenkamp ,  Jochen Stühler ,  Klaus Wurmbrand

发明人： Bernd Geh ,  Paul Gräupner ,  Thomas Stammler ,  Dirk Stenkamp ,  Jochen Stühler ,  Klaus Wurmbrand

IPC分类号： G03B27/32

CPC分类号： G03F7/706 ,  G01M11/0207 ,  G01M11/0242 ,  G01M11/0257 ,  G02B27/0012 ,  G03F7/70225 ,  G03F7/70258 ,  G03F7/70666

摘要： In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.

摘要翻译： 为了优化其中至少一个相对于至少一个固定光学元件移动的多个光学元件的图像特性，首先测量由所有光学元件的相互作用产生的整体图像缺陷。 这被表示为正交函数集的基函数的线性组合。 然后将可移动元件移动到新的测量位置，并再次测量整个图像缺陷。 在新的整体图像缺陷的线性组合表示之后，根据获得的数据计算可移动元件和静止元件的图像缺陷。 只有一个可移动光学元件可以直接计算和调整整个图像缺陷最小化的目标位置。 如果有多个可移动的光学元件可用，则给出用于有效确定各个目标位置的方法。

公开(公告)号：US06678240B2

公开(公告)日：2004-01-13

申请号：US10247270

申请日：2002-09-19

申请人： Bernd Geh ,  Paul Gräupner ,  Klaus Wurmbrand ,  Thomas Stammler ,  Dirk Stenkamp ,  Jochen Stühler

发明人： Bernd Geh ,  Paul Gräupner ,  Klaus Wurmbrand ,  Thomas Stammler ,  Dirk Stenkamp ,  Jochen Stühler

IPC分类号： G03B2732

CPC分类号： G03F7/706 ,  G01M11/0207 ,  G01M11/0242 ,  G01M11/0257 ,  G02B27/0012 ,  G03F7/70225 ,  G03F7/70258 ,  G03F7/70666

摘要： In order to optimize the image properties of several optical elements of which at least one is moved relative to at least one stationary optical element, the overall image defect resulting from the interaction of all optical elements is first of all measured. This is represented as a linear combination of the base functions of an orthogonal function set. The movable element is then moved to a new measurement position and the overall image defect is measured once again. After the linear combination representation of the new overall image defect, the image defects of the movable element and of the stationary element are calculated from the data thereby obtained. With only one movable optical element a target position in which the overall image defect is minimized can be directly calculated and adjusted there from. If several movable optical elements are available, methods are given for the efficient determination of the respective target position.

摘要翻译： 为了优化其中至少一个相对于至少一个固定光学元件移动的多个光学元件的图像特性，首先测量由所有光学元件的相互作用产生的整体图像缺陷。 这被表示为正交函数集的基函数的线性组合。 然后将可移动元件移动到新的测量位置，并再次测量整个图像缺陷。 在新的整体图像缺陷的线性组合表示之后，根据获得的数据计算可移动元件和静止元件的图像缺陷。 只有一个可移动光学元件可以直接计算和调整整个图像缺陷最小化的目标位置。 如果有多个可移动的光学元件可用，则给出用于有效确定各个目标位置的方法。