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    Heat Beam Film-Forming Apparatus
    2.
    发明申请
    Heat Beam Film-Forming Apparatus 审中-公开
    热成膜装置

    公开(公告)号：US20160348239A1

    公开(公告)日：2016-12-01

    申请号：US14854709

    申请日：2015-09-15

    申请人： PHILTECH, Inc.

    发明人： Yuji FURUMURA ,  Noriyoshi SHIMIZU ,  Shinji NISHIHARA

    IPC分类号： C23C16/452 ,  C23C16/458 ,  C23C16/40 ,  C23C16/455

    CPC分类号： C23C16/452 ,  C23C16/401 ,  C23C16/45527 ,  C23C16/545

    摘要： To form a film by generating molecular species which can react at a low temperature, especially, 100° C. or less at which a substrate is not deformed or altered. In a heat beam heating device which instantaneously heats a source gas to a high temperature to cause the source gas to collide with a metal wall including a catalytic function, activated molecular species are generated by a nonequilibrium reaction, sprayed on, and brought into contact with a substrate to form a film.

    摘要翻译： 通过产生能够在不改变或不改变基材的低温，特别是100℃或更低的温度下反应的分子物质形成膜。 在将源气体瞬时加热到高温以使源气体与包括催化功能的金属壁碰撞的热束加热装置中，通过非平衡反应产生活化分子，喷雾并与其接触 形成膜的基板。

    Film-forming method
    3.
    发明授权
    Film-forming method 有权

    公开(公告)号：US10428422B2

    公开(公告)日：2019-10-01

    申请号：US15586488

    申请日：2017-05-04

    申请人： PHILTECH Inc.

    发明人： Yuji Furumura ,  Noriyoshi Shimizu ,  Shinji Nishihara ,  Eri Haikata ,  Masato Ishikawa

    IPC分类号： C23C16/455 ,  C23C16/30 ,  H01L31/0216 ,  C23C16/40 ,  G02F1/1333 ,  H01L51/52

    摘要： A film-forming method for forming a film in a film-forming apparatus includes generating first gas molecular species and second gas molecular species by causing the first source gas and the second source gas accumulated in the accumulation mechanisms to pass through respective instantaneously-heating units, sharply raising partial pressure of the first gas molecular species and partial pressure of the second gas molecular species by projectingly supplying the first gas molecular species and the second gas molecular species to the reaction chamber in which the substrate has been placed, which has been depressurized, and which has a constant capacity; bringing the first gas molecular species or the second gas molecular species into reaction by alternately repeatedly guiding the first gas molecular species or the second gas molecular species to a surface of the substrate, and forming a compound film on the surface of the substrate.

    SOLID GASIFICATION APPARATUS
    5.
    发明申请
    SOLID GASIFICATION APPARATUS 有权
    固体气化装置

    公开(公告)号：US20150315501A1

    公开(公告)日：2015-11-05

    申请号：US14679952

    申请日：2015-04-06

    申请人： PHILTECH Inc.

    发明人： Yuji Furumura ,  Naomi Mura ,  Shinji Nishihara ,  Noriyoshi Shimizu

    IPC分类号： C10J3/80 ,  C10J3/20

    CPC分类号： C10J3/80 ,  C10J3/20 ,  C10J3/74 ,  C10J2200/15 ,  C10J2300/0916 ,  C10J2300/092 ,  C10J2300/1253 ,  C23C16/4488

    摘要： A solid gasification apparatus includes a reaction chamber thermally insulated by a heat insulating material, a heat beam fluid heat exchange apparatus that produces a first heated gas and a second heated gas, and a unit that includes a gas flow path. The unit spays the first heated gas against a material solid in a reaction chamber to heat the material solid, and, simultaneously, makes the material solid react with the first heated gas to produce a produced gas containing the element of the material solid. The unit makes a second heated gas contact and react with the produced gas.

    摘要翻译： 固体气化装置包括由绝热材料热绝缘的反应室，产生第一加热气体和第二加热气体的热束流体热交换装置，以及包括气体流路的单元。 单元将第一加热气体相对于反应室中的材料固体喷射以加热材料固体，并且同时使材料固体与第一加热气体反应，以产生含有材料固体元素的产生气体。 该装置使第二次加热的气体接触并与产生的气体反应。

    FLUID HEAT EXCHANGING APPARATUS
    6.
    发明申请
    FLUID HEAT EXCHANGING APPARATUS 有权
    流体热交换装置

    公开(公告)号：US20150159967A1

    公开(公告)日：2015-06-11

    申请号：US14567103

    申请日：2014-12-11

    申请人： PHILTECH Inc.

    发明人： Yuji FURUMURA ,  Naomi MURA ,  Shinji NISHIHARA ,  Noriyoshi SHIMIZU

    IPC分类号： F28F3/08

    CPC分类号： F28F3/08 ,  F22B1/288 ,  F28D2021/0019 ,  F28F3/12 ,  F28F13/06

    摘要： A small-sized fluid heating/cooling apparatus for heating or cooling a large amount of gas or liquid at a low cost. Structures where a flow passage for a fluid is formed in a heated or cooled base formed in a plate shape or a column shape, and a fluid which has passed through the narrowed flow passage impinges on a wall of a side face of the base vertically to perform heat exchange are connected in series. Heat exchange is instantaneously performed in a small space and manufacture of a mechanism performing such an operation is easy. A material constituting the flow passage may be a metal or ceramics, and a small-sized fluid heat exchanging apparatus can be manufactured at a low cost.

    摘要翻译： 一种用于以低成本加热或冷却大量气体或液体的小型流体加热/冷却装置。 其中流体流道在形成为板状或柱状的加热或冷却的基底中形成的结构，并且已经通过变窄的流动通道的流体垂直撞击基底的侧面的壁，垂直于 进行热交换串联。 在较小的空间内立即进行热交换，容易进行这种操作的机构的制造。 构成流路的材料可以是金属或陶瓷，并且可以以低成本制造小型流体热交换装置。

    FLUID HEAT EXCHANGING APPARATUS
    7.
    发明申请
    FLUID HEAT EXCHANGING APPARATUS 有权
    流体热交换装置

    公开(公告)号：US20150136370A1

    公开(公告)日：2015-05-21

    申请号：US14538326

    申请日：2014-11-11

    申请人： PHILTECH Inc.

    发明人： Yuji FURUMURA ,  Naomi MURA ,  Shinji NISHIHARA ,  Noriyoshi SHIMIZU

    IPC分类号： F28D7/00

    CPC分类号： F28F3/12 ,  F28F13/06 ,  F28F21/02 ,  F28F21/04 ,  F28F21/083

    摘要： In a small-sized fluid heat exchanging apparatus that heats or cools a huge amount of gas or liquid, a structure makes fluid having a high flow speed impinge perpendicularly against a wall. A flow passage is divided into a high-speed flow passage and a low-speed flow passage, and the high-speed flow passage and the low-speed flow passage are arranged so as to intersect perpendicularly with each other, according to guidelines for the shape of the flow passage. A flow passage designed according to the guidelines provides highly-efficient heat exchange.

    摘要翻译： 在加热或冷却大量气体或液体的小型流体热交换装置中，结构使得具有高流速的流体垂直地撞击壁。 流路分为高速流路和低速流路，高速流路和低速流路配置成相互垂直相交，根据 流动通道的形状。 根据指南设计的流道提供了高效的热交换。

    METHOD OF OPERATING GAS GENERATING APPARATUS
    9.
    发明申请
    METHOD OF OPERATING GAS GENERATING APPARATUS 审中-公开

    公开(公告)号：US20170275162A1

    公开(公告)日：2017-09-28

    申请号：US15621439

    申请日：2017-06-13

    申请人： PHILTECH, Inc.

    发明人： Yuji FURUMURA ,  Noriyoshi SHIMIZU ,  Shinji NISHIHARA

    IPC分类号： C01B3/38

    CPC分类号： C01B3/38 ,  C01B2203/0233 ,  C01B2203/0805 ,  C01B2203/1064 ,  C01B2203/1082 ,  C01B2203/1241 ,  Y02P20/52

    摘要： A gas generating apparatus generates hydrogen having carbon monoxide concentration of 0.1% or less by reacting hydrogen carbide and water together without requiring a platinum catalyst. The gas generating apparatus includes a gas instantaneously-heating mechanism that instantaneously heats a source gas, and a catalyst vessel connected to the gas instantaneously-heating mechanism and containing a catalyst. A high-temperature heated source gas beam generated by the gas instantaneously-heating mechanism, which contains hydrogen carbide and water, is caused to collide with the catalyst to generate a gas. Heat of the source gas is transmitted to a catalyst surface because of the absence of a stagnation layer, and a non-equilibrium reaction efficiently proceeds on the catalyst. Hydrogen can be extracted with a low-cost ruthenium catalyst.

    Gas Generating Apparatus
    10.
    发明申请
    Gas Generating Apparatus 审中-公开
    气体发生器

    公开(公告)号：US20160107891A1

    公开(公告)日：2016-04-21

    申请号：US14855493

    申请日：2015-09-16

    申请人： PHILTECH, Inc.

    发明人： Yuji FURUMURA ,  Noriyoshi SHIMIZU ,  Shinji NISHIHARA

    IPC分类号： C01B3/38

    CPC分类号： C01B3/38 ,  C01B2203/0233 ,  C01B2203/0805 ,  C01B2203/1064 ,  C01B2203/1082 ,  C01B2203/1241 ,  Y02P20/52

    摘要： To generate hydrogen having a carbon monoxide concentration of 0.1% or less by reacting a hydrogen carbide and water with each other without using a platinum catalyst. A gas generating apparatus includes a gas instantaneously-heating mechanism that instantaneously heats a source gas and a catalyst vessel that is connected to the gas instantaneously-heating mechanism and contains a catalyst, a high-temperature heated source gas beam generated by the gas instantaneously-heating mechanism being caused to collide with the catalyst to generate a gas. More specifically, a source gas containing a hydrogen carbide and water is instantaneously heated to a high temperature, and a source gas beam is caused to collide with the catalyst. Heat of the source gas is transmitted to a catalyst surface because of the absence a stagnation layer, and nonequilibrium reaction efficiently proceeds on the catalyst. Hydrogen can be extracted with a low-price catalyst made of ruthenium.

    摘要翻译： 通过使碳氢化合物和水彼此反应而不使用铂催化剂来生成一氧化碳浓度为0.1％以下的氢。 一种气体发生装置包括：气体瞬时加热机构，其瞬时加热源气体和连接到气体瞬时加热机构并包含催化剂的催化剂容器，由气体立即产生的高温加热源气体束， 使加热机构与催化剂碰撞而产生气体。 更具体地说，将含有碳氢化合物和水的源气体瞬间加热到高温，使源气体束与催化剂碰撞。 由于没有停滞层，源气体的热量传递到催化剂表面，并且在催化剂上有效地进行非平衡反应。 氢气可以用钌制成的低价催化剂萃取。