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公开(公告)号:US20170152599A1
公开(公告)日:2017-06-01
申请号:US15298703
申请日:2016-10-20
申请人: PHILTECH, Inc.
IPC分类号: C23C16/46 , H01L51/56 , H01L51/52 , C23C16/455
CPC分类号: C23C16/46 , C08J7/04 , C23C16/0272 , C23C16/452 , C23C16/455 , C23C16/45523 , C23C16/545 , H01L51/5253 , H01L51/56
摘要: Source gases are instantaneously heated, at least two kinds of generated gas molecular species generated by instantaneously heating the source gases are independently introduced and brought into contact with a substrate having a temperature lower than heating temperature of the instantaneously-heating mechanism for source gas to form a first compound film and to form a second compound film containing at least one element of elements contained in the first compound film, and a multilayer film composed of at least the first compound film and the second compound film is produced.
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公开(公告)号:US20160348239A1
公开(公告)日:2016-12-01
申请号:US14854709
申请日:2015-09-15
申请人: PHILTECH, Inc.
IPC分类号: C23C16/452 , C23C16/458 , C23C16/40 , C23C16/455
CPC分类号: C23C16/452 , C23C16/401 , C23C16/45527 , C23C16/545
摘要: To form a film by generating molecular species which can react at a low temperature, especially, 100° C. or less at which a substrate is not deformed or altered. In a heat beam heating device which instantaneously heats a source gas to a high temperature to cause the source gas to collide with a metal wall including a catalytic function, activated molecular species are generated by a nonequilibrium reaction, sprayed on, and brought into contact with a substrate to form a film.
摘要翻译: 通过产生能够在不改变或不改变基材的低温,特别是100℃或更低的温度下反应的分子物质形成膜。 在将源气体瞬时加热到高温以使源气体与包括催化功能的金属壁碰撞的热束加热装置中,通过非平衡反应产生活化分子,喷雾并与其接触 形成膜的基板。
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公开(公告)号:US20170335454A1
公开(公告)日:2017-11-23
申请号:US15586488
申请日:2017-05-04
申请人: PHILTECH Inc.
IPC分类号: C23C16/455 , C23C16/30 , H01L51/52 , G02F1/1333 , H01L31/0216
CPC分类号: C23C16/45527 , C23C16/30 , C23C16/403 , C23C16/45523 , C23C16/45557 , G02F1/133345 , G02F2201/501 , H01L31/02167 , H01L51/5253 , Y02E10/50
摘要: A film-forming method for forming a film in a film-forming apparatus includes generating first gas molecular species and second gas molecular species by causing the first source gas and the second source gas accumulated in the accumulation mechanisms to pass through respective instantaneously-heating units, sharply raising partial pressure of the first gas molecular species and partial pressure of the second gas molecular species by projectingly supplying the first gas molecular species and the second gas molecular species to the reaction chamber in which the substrate has been placed, which has been depressurized, and which has a constant capacity; bringing the first gas molecular species or the second gas molecular species into reaction by alternately repeatedly guiding the first gas molecular species or the second gas molecular species to a surface of the substrate, and forming a compound film on the surface of the substrate.
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公开(公告)号:US20150159967A1
公开(公告)日:2015-06-11
申请号:US14567103
申请日:2014-12-11
申请人: PHILTECH Inc.
发明人: Yuji FURUMURA , Naomi MURA , Shinji NISHIHARA , Noriyoshi SHIMIZU
IPC分类号: F28F3/08
CPC分类号: F28F3/08 , F22B1/288 , F28D2021/0019 , F28F3/12 , F28F13/06
摘要: A small-sized fluid heating/cooling apparatus for heating or cooling a large amount of gas or liquid at a low cost. Structures where a flow passage for a fluid is formed in a heated or cooled base formed in a plate shape or a column shape, and a fluid which has passed through the narrowed flow passage impinges on a wall of a side face of the base vertically to perform heat exchange are connected in series. Heat exchange is instantaneously performed in a small space and manufacture of a mechanism performing such an operation is easy. A material constituting the flow passage may be a metal or ceramics, and a small-sized fluid heat exchanging apparatus can be manufactured at a low cost.
摘要翻译: 一种用于以低成本加热或冷却大量气体或液体的小型流体加热/冷却装置。 其中流体流道在形成为板状或柱状的加热或冷却的基底中形成的结构,并且已经通过变窄的流动通道的流体垂直撞击基底的侧面的壁,垂直于 进行热交换串联。 在较小的空间内立即进行热交换,容易进行这种操作的机构的制造。 构成流路的材料可以是金属或陶瓷,并且可以以低成本制造小型流体热交换装置。
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公开(公告)号:US20150136370A1
公开(公告)日:2015-05-21
申请号:US14538326
申请日:2014-11-11
申请人: PHILTECH Inc.
发明人: Yuji FURUMURA , Naomi MURA , Shinji NISHIHARA , Noriyoshi SHIMIZU
IPC分类号: F28D7/00
CPC分类号: F28F3/12 , F28F13/06 , F28F21/02 , F28F21/04 , F28F21/083
摘要: In a small-sized fluid heat exchanging apparatus that heats or cools a huge amount of gas or liquid, a structure makes fluid having a high flow speed impinge perpendicularly against a wall. A flow passage is divided into a high-speed flow passage and a low-speed flow passage, and the high-speed flow passage and the low-speed flow passage are arranged so as to intersect perpendicularly with each other, according to guidelines for the shape of the flow passage. A flow passage designed according to the guidelines provides highly-efficient heat exchange.
摘要翻译: 在加热或冷却大量气体或液体的小型流体热交换装置中,结构使得具有高流速的流体垂直地撞击壁。 流路分为高速流路和低速流路,高速流路和低速流路配置成相互垂直相交,根据 流动通道的形状。 根据指南设计的流道提供了高效的热交换。
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公开(公告)号:US20180223431A1
公开(公告)日:2018-08-09
申请号:US15949410
申请日:2018-04-10
申请人: PHILTECH, Inc.
IPC分类号: C23C16/46 , C23C16/455 , C23C16/02 , H01L51/52 , C23C16/54 , C23C16/452 , C08J7/04 , H01L51/56
CPC分类号: C23C16/46 , C08J7/04 , C23C16/0272 , C23C16/452 , C23C16/455 , C23C16/45523 , C23C16/545 , H01L51/5253 , H01L51/56
摘要: Source gases are instantaneously heated, at least two kinds of generated gas molecular species generated by instantaneously heating the source gases are independently introduced and brought into contact with a substrate having a temperature lower than heating temperature of the instantaneously-heating mechanism for source gas to form a first compound film and to form a second compound film containing at least one element of elements contained in the first compound film, and a multilayer film composed of at least the first compound film and the second compound film is produced.
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公开(公告)号:US20170275162A1
公开(公告)日:2017-09-28
申请号:US15621439
申请日:2017-06-13
申请人: PHILTECH, Inc.
IPC分类号: C01B3/38
CPC分类号: C01B3/38 , C01B2203/0233 , C01B2203/0805 , C01B2203/1064 , C01B2203/1082 , C01B2203/1241 , Y02P20/52
摘要: A gas generating apparatus generates hydrogen having carbon monoxide concentration of 0.1% or less by reacting hydrogen carbide and water together without requiring a platinum catalyst. The gas generating apparatus includes a gas instantaneously-heating mechanism that instantaneously heats a source gas, and a catalyst vessel connected to the gas instantaneously-heating mechanism and containing a catalyst. A high-temperature heated source gas beam generated by the gas instantaneously-heating mechanism, which contains hydrogen carbide and water, is caused to collide with the catalyst to generate a gas. Heat of the source gas is transmitted to a catalyst surface because of the absence of a stagnation layer, and a non-equilibrium reaction efficiently proceeds on the catalyst. Hydrogen can be extracted with a low-cost ruthenium catalyst.
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公开(公告)号:US20160107891A1
公开(公告)日:2016-04-21
申请号:US14855493
申请日:2015-09-16
申请人: PHILTECH, Inc.
IPC分类号: C01B3/38
CPC分类号: C01B3/38 , C01B2203/0233 , C01B2203/0805 , C01B2203/1064 , C01B2203/1082 , C01B2203/1241 , Y02P20/52
摘要: To generate hydrogen having a carbon monoxide concentration of 0.1% or less by reacting a hydrogen carbide and water with each other without using a platinum catalyst. A gas generating apparatus includes a gas instantaneously-heating mechanism that instantaneously heats a source gas and a catalyst vessel that is connected to the gas instantaneously-heating mechanism and contains a catalyst, a high-temperature heated source gas beam generated by the gas instantaneously-heating mechanism being caused to collide with the catalyst to generate a gas. More specifically, a source gas containing a hydrogen carbide and water is instantaneously heated to a high temperature, and a source gas beam is caused to collide with the catalyst. Heat of the source gas is transmitted to a catalyst surface because of the absence a stagnation layer, and nonequilibrium reaction efficiently proceeds on the catalyst. Hydrogen can be extracted with a low-price catalyst made of ruthenium.
摘要翻译: 通过使碳氢化合物和水彼此反应而不使用铂催化剂来生成一氧化碳浓度为0.1%以下的氢。 一种气体发生装置包括:气体瞬时加热机构,其瞬时加热源气体和连接到气体瞬时加热机构并包含催化剂的催化剂容器,由气体立即产生的高温加热源气体束, 使加热机构与催化剂碰撞而产生气体。 更具体地说,将含有碳氢化合物和水的源气体瞬间加热到高温,使源气体束与催化剂碰撞。 由于没有停滞层,源气体的热量传递到催化剂表面,并且在催化剂上有效地进行非平衡反应。 氢气可以用钌制成的低价催化剂萃取。
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公开(公告)号:US20150083381A1
公开(公告)日:2015-03-26
申请号:US14494232
申请日:2014-09-23
申请人: PHILTECH INC.
发明人: Yuji FURUMURA , Naomi MURA , Shinji NISHIHARA , Noriyoshi SHIMIZU
IPC分类号: F28F3/12
CPC分类号: F28F3/12 , F28D7/106 , F28D9/0031 , F28F13/18 , F28F19/02 , F28F21/083 , F28F21/089 , F28F2255/08 , F28F2275/06
摘要: A heat exchanging apparatus has a flow path with air tightness formed by joining a second sheet to a first sheet formed by bending the first sheet by stamping and fluid introduced into the flow path impinges on a wall of the flow path to perform heat exchange. A material constituting the flow path may be a metal sheet or an electrically-conductive plastic, and a small-sized and light-weight heat exchanging apparatus can be manufactured at a low cost.
摘要翻译: 热交换装置具有通过将第二片材接合到通过冲压弯曲第一片材而形成的第一片材而形成的气密性的流动路径,并且引入到流动路径中的流体撞击流路的壁以进行热交换。 构成流路的材料可以是金属片或导电性塑料,并且可以以低成本制造小型轻量化的热交换装置。
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