公开(公告)号：US20120065347A1

公开(公告)日：2012-03-15

申请号：US13302824

申请日：2011-11-22

Applicant: Yasuhisa MATSUKAWA ,  Daisuke SHIRAKAWA ,  Eisuke MUROTANI ,  Naoko SHIROTA ,  Yoko TAKEBE

Inventor： Yasuhisa MATSUKAWA ,  Daisuke SHIRAKAWA ,  Eisuke MUROTANI ,  Naoko SHIROTA ,  Yoko TAKEBE

IPC: C08F120/68 ,  C07C69/753 ,  C07C53/50 ,  C07C49/477

CPC classification number: C07C49/477 ,  C07C29/143 ,  C07C29/147 ,  C07C31/44 ,  C07C35/52 ,  C07C45/54 ,  C07C61/40 ,  C07C67/14 ,  C07C69/653 ,  C07C69/753 ,  C07C2602/42 ,  C08F220/24

Abstract: The present invention provides novel polymers obtained by polymerizing a compound of formula (1) which has a highly fluorinated norbornane structure. The invention also provides compounds represented by formulas (3) and (3A-1) below, as well as the following compounds:

Abstract translation: 本发明提供了通过聚合具有高度氟化的降冰片烷结构的式（1）化合物获得的新型聚合物。 本发明还提供由下式（3）和（3A-1）表示的化合物以及以下化合物：

公开(公告)号：US08134033B2

公开(公告)日：2012-03-13

申请号：US12351905

申请日：2009-01-12

Applicant: Yasuhisa Matsukawa ,  Daisuke Shirakawa ,  Eisuke Murotani ,  Naoko Shirota ,  Yoko Takebe

Inventor： Yasuhisa Matsukawa ,  Daisuke Shirakawa ,  Eisuke Murotani ,  Naoko Shirota ,  Yoko Takebe

IPC: C07C49/467 ,  C07C67/14 ,  C07C69/653 ,  C08F20/22

CPC classification number: C07C49/477 ,  C07C29/143 ,  C07C29/147 ,  C07C31/44 ,  C07C35/52 ,  C07C45/54 ,  C07C61/40 ,  C07C67/14 ,  C07C69/653 ,  C07C69/753 ,  C07C2602/42 ,  C08F220/24

Abstract: To provide a novel polymerizable fluorocompound having a highly fluorinated norbornane structure, and a polymer obtained from the compound. Further, their production processes and a novel intermediate useful for the processes.A novel compound (1) such as a compound (11) or a compound (12), and its polymer. A compound (2) such as a compound (21) or (22), and a compound (3) such as a compound (31) or (32M), which are useful as an intermediate for the production of the compound (1), and its production process. However, each of ZA to ZE represents such as —CH(—OC(O)C(CH3)═CH2)— or —CF2, Each of WA and WB represents such as F, each of YA to YE represents such as —CH(—OH)— or —CF(CH2OH), and each of XA to XE represents such as —C(O)— or —CF2—.

Abstract translation: 提供具有高氟化降冰片烷结构的新型可聚合氟化合物和由该化合物获得的聚合物。 此外，它们的制备方法和用于该方法的新型中间体。 新化合物（1）如化合物（11）或化合物（12）及其聚合物。 作为化合物（1）的制造中间体的化合物（21）或（22）的化合物（2）和化合物（31）或（32M）等化合物（3） ，及其生产工艺。 然而，ZA至ZE各自表示-CH（-OC（O）C（CH 3)≡CH2） - 或-CF 2，WA和WB各自表示F，YA至YE各自表示-CH （-OH） - 或-CF（CH 2 OH），XA至XE各自表示-C（O） - 或-CF 2 - 。

公开(公告)号：US07790811B2

公开(公告)日：2010-09-07

申请号：US11446242

申请日：2006-06-05

Applicant: Ikuo Matsukura ,  Hiromasa Yamamoto ,  Yuichiro Ishibashi ,  Shinji Okada ,  Naoko Shirota

Inventor： Ikuo Matsukura ,  Hiromasa Yamamoto ,  Yuichiro Ishibashi ,  Shinji Okada ,  Naoko Shirota

IPC: C08F114/18

CPC classification number: G03F1/62 ,  C08G65/007 ,  C08G65/226 ,  G03F7/0046 ,  Y10T428/24331 ,  Y10T428/3154

Abstract: A useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material, wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following fluorine atom-containing unit (1), wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.

Abstract translation: 对于短波长的光（具有193nm的照射波长的ArF准分子激光和具有157nm的照射波长的F2准分子激光）的透明性和耐久性优异的有用氟聚合物，例如， 防护薄膜组件，其中用于防护薄膜和/或粘合剂的聚合物（I）是基本上含有以下含氟原子的单元（1）的聚合物，其中形成聚合物主链的链包含碳原子 和醚性氧原子，形成主链的至少一个碳原子是形成环状基团的碳原子，形成主链的至少一个醚性氧原子是不形成环状基团的氧原子。

公开(公告)号：US20090281239A1

公开(公告)日：2009-11-12

申请号：US12499321

申请日：2009-07-08

Applicant: Taiki Hoshino ,  Naoko Shirota ,  Nobuyuki Otozawa ,  Akihiko Asakawa

Inventor： Taiki Hoshino ,  Naoko Shirota ,  Nobuyuki Otozawa ,  Akihiko Asakawa

IPC: C08L75/00 ,  C08G18/81

CPC classification number: C09D133/066 ,  C08G18/807 ,  C08G18/8116 ,  C09D133/14

Abstract: To provide an oil repellent copolymer capable of forming an oil repellent film which is excellent in durability.An oil repellent copolymer characterized by comprising a repeating unit (A) having a polyfluoroalkyl group, a repeating unit (B) having a fluorescent functional group, and a repeating unit (C) having an ester bond other than an ester bond derived from acrylic acid, and/or a hydroxyl group.

Abstract translation: 提供能够形成耐久性优异的防油膜的防油性共聚物。 一种斥油剂共聚物，其特征在于包含具有多氟烷基的重复单元（A），具有荧光官能团的重复单元（B）和具有除丙烯酸酯键之外的酯键的重复单元（C） ，和/或羟基。

公开(公告)号：US20090061360A1

公开(公告)日：2009-03-05

申请号：US12254030

申请日：2008-10-20

Applicant: Yoko Takebe ,  Shu-zhong Wang ,  Osamu Yokokoji ,  Naoko Shirota ,  Yasuhisa Matsukawa ,  Daisuke Shirakawa

Inventor： Yoko Takebe ,  Shu-zhong Wang ,  Osamu Yokokoji ,  Naoko Shirota ,  Yasuhisa Matsukawa ,  Daisuke Shirakawa

IPC: C08F20/24 ,  C08F20/12 ,  C08F20/26 ,  G03F7/20

CPC classification number: G03F7/2041 ,  C08F214/18 ,  C08F220/24 ,  G03F7/11

Abstract: To provide a resist protective film material for immersion lithography.An alkali soluble resist protective film material for immersion lithography, which comprises a polymer (F) containing repeating units (FU) formed by polymerizing a polymerizable compound (fm) having a fluorine-containing bridged cyclic structure. For example, repeating units (FU) are repeating units formed by polymerizing a compound (f) selected from the group consisting of the following formulae (f1) to (f4) (RF represents H, F, a C1-3 alkyl group or a C1-3 fluoroalkyl group, and XF represents F, OH or CH2OH.)

Abstract translation: 提供用于浸没光刻的抗蚀保护膜材料。 一种用于浸渍光刻的碱溶性抗蚀剂保护膜材料，其包含通过聚合具有含氟桥连环状结构的可聚合化合物（fm）形成的重复单元（FU）的聚合物（F）。 例如，重复单元（FU）是通过使从下述式（f1）〜（f4）中选择的化合物（f）聚合形成的重复单元（RF表示H，F，C1-3烷基或 C 3氟烷基，X F表示F，OH或CH 2 OH）

公开(公告)号：US06548129B2

公开(公告)日：2003-04-15

申请号：US09803965

申请日：2001-03-13

Applicant: Ikuo Matsukura ,  Naoko Shirota ,  Jun Irisawa

Inventor： Ikuo Matsukura ,  Naoko Shirota ,  Jun Irisawa

IPC: B32B300

CPC classification number: G03F1/62 ,  G03F1/64 ,  Y10T428/3154 ,  Y10T428/31544

Abstract: A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.

Abstract translation: 一种用于通过波长为至多200nm的光进行光刻图案化处理的防护薄膜组件，其包括通过粘合剂粘合到框架上的框架和防护薄膜组件，其中防护薄膜组件或粘合剂包含以下氟 - 含氟聚合物（A）：含氟聚合物（A）：具有碳原子链为主链的基本上呈直链状的含氟聚合物，在其主链中含有碳原子，具有一个或两个氢原子的碳原子 与其键合的原子和与其结合的氟原子或含氟有机基团的不具有氢原子的碳原子键合。

公开(公告)号：US09012565B2

公开(公告)日：2015-04-21

申请号：US13333374

申请日：2011-12-21

Applicant: Taiki Hoshino ,  Naoko Shirota

Inventor： Taiki Hoshino ,  Naoko Shirota

IPC: C08G18/28 ,  C08G18/76 ,  C09K3/18

CPC classification number: C08G18/2825 ,  C08G18/2885 ,  C08G18/7664 ,  C08G18/7671 ,  C09K3/18

Abstract: To provide a water/oil repellent agent and a water/oil repellent composition which is capable of providing an article surface with a sufficient water/oil repellency, while placing little burden on the environment.One comprising a reaction product obtained by reacting a fluoromonool having a polyfluoroalkyl moiety having at most 6 carbon atoms as an alcohol, an alkane monool having at least 18 carbon atoms, and MDI or a polymeric MD, and by treating an article with such a water/oil repellent agent, a sufficient water/oil repellency can be imparted, while placing little burden on the environment. By treating the above-mentioned article with the water/oil repellent composition of the present invention, a high quality water/oil repellency can be imparted to the article.

Abstract translation: 为了提供防水/拒油剂和斥水斥油剂组合物，其能够使物品表面具有足够的斥水斥油性，同时对环境施加很小的负担。 一种包括通过使具有至多6个碳原子的多氟烷基部分的氟莫诺醇作为醇，具有至少18个碳原子的烷烃一元醇和MDI或聚合物MD反应而获得的反应产物，并通过用这种水处理制品 /防油剂，可以赋予足够的防水/防油性，同时对环境施加很小的负担。 通过用本发明的斥水斥油剂组合物处理上述制品，可以赋予制品高品质的拒水拒油性。

公开(公告)号：US20090176954A1

公开(公告)日：2009-07-09

申请号：US12091846

申请日：2006-10-25

Applicant: Shu-zhong Wang ,  Koichi Murata ,  Kazuya Oharu ,  Yoshitomi Morizawa ,  Osamu Yokokoji ,  Naoko Shirota

Inventor： Shu-zhong Wang ,  Koichi Murata ,  Kazuya Oharu ,  Yoshitomi Morizawa ,  Osamu Yokokoji ,  Naoko Shirota

IPC: C08F18/20 ,  C07C17/361 ,  C07C29/36 ,  C07C67/14 ,  C07C31/44 ,  C07C69/65

CPC classification number: C07C31/44 ,  C07C17/361 ,  C07C23/38 ,  C07C29/38 ,  C07C67/14 ,  C07C69/653 ,  C07C2603/74 ,  C08F220/24

Abstract: To provide a novel fluoroadamantane derivative, a novel polymerizable fluoroadamantane derivativeand a novel fluoropolymer, and processes for production thereof.To provide the following compound (3), the following compound (4), a polymer obtained by polymerizing the compound (4) and processes for production thereof: provided that Q represents —CHF— or —CF2— (provided that six Qs may be the same or different), Z represents —H, —F or —CH2OH (provided that three Zs may be the same or different), W represents —H or a C1-10 hydrocarbon group, R represents —H, —F, —CH3 or —CF3, and J represents —H, —F, —CHWOH or —CHWOCOCR═CH2 (provided that three Js may be the same or different).

Abstract translation: 提供新的氟金刚烷衍生物，新型聚合性氟金刚烷衍生物和新型含氟聚合物及其制备方法。 为了提供以下化合物（3），以下化合物（4），通过使化合物（4）聚合而得到的聚合物及其制造方法：Q表示-CHF-或-CF2-（只要6个Q可以 相同或不同），Z表示-H，-F或-CH 2 OH（条件是三个Z可以相同或不同），W表示-H或C1-10烃基，R表示-H，-F， - CH 3或-CF 3，并且J表示-H，-F，-CHWOH或-CHWOCOCR-CH 2（条件是三个可以相同或不同）。

公开(公告)号：US06660346B2

公开(公告)日：2003-12-09

申请号：US10351354

申请日：2003-01-27

Applicant: Ikuo Matsukura ,  Naoko Shirota ,  Jun Irisawa

Inventor： Ikuo Matsukura ,  Naoko Shirota ,  Jun Irisawa

IPC: B32B300

CPC classification number: G03F1/62 ,  G03F1/64 ,  Y10T428/3154 ,  Y10T428/31544

Abstract: A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.

公开(公告)号：US6111062A

公开(公告)日：2000-08-29

申请号：US195687

申请日：1998-11-19

Applicant: Naoko Shirota ,  Yasuo Etoh ,  Norihide Sugiyama

Inventor： Naoko Shirota ,  Yasuo Etoh ,  Norihide Sugiyama

IPC: C08F8/22 ,  C08G65/22 ,  C08G73/24

CPC classification number: C08F8/22 ,  Y10S528/935

Abstract: A method for producing a fluorinated alicyclic structure-containing polymer, which comprises contacting a fluorinated alicyclic structure-containing polymer having an unstable terminal group derived from a polymerization initiator and/or a chain transfer agent with fluorine gas in a fluorine-containing solvent, to convert the unstable terminal group to a stable terminal group and thereby to obtain a fluorinated alicyclic structure-containing polymer having substantially no unstable terminal group.

Abstract translation: 一种含氟脂环结构的聚合物的制造方法，其特征在于，将含有聚合引发剂的不稳定末端基团的含氟脂环式结构体和/或链转移剂与含氟溶剂中的氟气接触， 将不稳定末端基转化为稳定的末端基，得到基本上不具有不稳定末端基的含氟脂环结构的聚合物。