Contact type micro piezoresistive shear-stress sensor
    3.
    发明授权
    Contact type micro piezoresistive shear-stress sensor 失效
    接触式微压阻剪切应力传感器

    公开(公告)号:US06877385B2

    公开(公告)日:2005-04-12

    申请号:US10085256

    申请日:2001-10-22

    CPC classification number: A61B5/103 A61B2562/028 A61B2562/12 G01L1/18

    Abstract: There is disclosed a semiconductor sensor for measuring the contact shear stress distribution between the socket of an above-knee (AK) prostheses and the soft tissue of an amputee's stump. The sensor is fabricated by the micro-electro-mechanical system (MEMS) technology, and its main sensing part is 2-X shaped with a flange structure. The sensor is prepared by anisotropic wet etching of bulk silicon in KOH solution and a square flange above the sensing diaphragm is formed through surface micromachining of deposited SiO2 thin film. This invention has the following characteristics: piezo-resistivity of the monolithic silicon will be utilized to convert shear deformation of the sensor into an electrical signal and a micro sensor which can measure the shear force vector acting on the sensing flange.

    Abstract translation: 公开了一种半导体传感器,用于测量膝盖(AK)假体的插座与截肢者残肢的软组织之间的接触剪切应力分布。 传感器采用微机电系统(MEMS)技术制造,其主感测部件采用2-X形法兰结构。 传感器通过在KOH溶液中的体硅的各向异性湿法蚀刻制备,并且通过沉积的SiO 2薄膜的表面微加工形成感测膜上方的方形凸缘。 本发明具有以下特征:单片硅的压阻电阻将用于将传感器的剪切变形转换为电信号,并且可以测量作用在感测凸缘上的剪切力矢量的微传感器。

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