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1.发明授权公开(公告)号：US08502139B2
公开(公告)日：2013-08-06
申请号：US13201323
申请日：2010-02-12
申请人： Mikhail Yavor
发明人： Mikhail Yavor
CPC分类号： H01J49/405 , H01J49/0004
摘要： A mass analysis device with wide angular acceptance, notably of the mass spectrometer or atom probe microscope type, includes means for receiving a sample, means for extracting ions from the surface of the sample, and a reflectron producing a torroidal electrostatic field whose equipotential lines are defined by a first curvature in a first direction and a first center of curvature, and a second curvature in a second direction perpendicular to the first direction and a second center of curvature, the sample being positioned close to the first center of curvature.
摘要翻译： 具有广角角接受度的质量分析装置，特别是质谱仪或原子探针显微镜类型的质量分析装置包括用于接收样品的装置，用于从样品表面提取离子的装置，以及产生其等势线的环形静电场的反射器 由第一方向和第一曲率中心的第一曲率和与第一方向垂直的第二方向和第二曲率中心的第二曲率限定，该样本定位成接近第一曲率中心。
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公开(公告)号：US08074292B2
公开(公告)日：2011-12-06
申请号：US12682700
申请日：2008-10-08
IPC分类号： G01Q60/00
CPC分类号： H01J49/40 , H01J49/0004
摘要： The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.
摘要翻译： 本发明涉及广角断层成像原子探针的质量分辨率的提高。 本发明还包括原子探针，其还包括彼此分离距离L并封闭在腔室中的样品保持装置和检测器，“三角形”型静电透镜，由三个电极组成，该三个电极布置在室内 样品和检测器，施加电位以形成电场，当探头工作时，电场强烈地聚焦待测样品发射的离子束。 根据本发明，精确地限定电极的几何形状，以便极大地限制影响“Einzel”透镜的离子束的球面像差的影响，当透镜极大地偏振时，所述球面像差明显敏感。 本发明更具体地应用于称为3D原子探针的原子探针。
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3.发明授权Multi-reflecting time-of-flight mass spectrometer with isochronous curved ion interface 有权具有同步弯曲离子界面的多反射飞行时间质谱仪公开(公告)号：US07326925B2
公开(公告)日：2008-02-05
申请号：US11277181
申请日：2006-03-22
IPC分类号： H01J49/40
CPC分类号： H01J49/408 , H01J49/406 , H01J49/48
摘要： The present invention relates generally to a multi-reflecting time-of-flight mass spectrometer (MR TOF MS). To improve mass resolving power of a planar MR TOF MS, a spatially isochronous and curved interface may be used for ion transfer in and out of the MR TOF analyzer. One embodiment comprises a planar grid-free MR TOF MS with periodic lenses in the field-free space, a linear ion trap for converting ion flow into pulses and a C-shaped isochronous interface made of electrostatic sectors. The interface allows transferring ions around the edges and fringing fields of the ion mirrors without introducing significant time spread. The interface may also provide energy filtering of ion packets. The non-correlated turn-around time of ion trap converter may be reduced by using a delayed ion extraction from the ion trap and excessive ion energy is filtered in the curved interface.
摘要翻译： 本发明一般涉及多反射飞行时间质谱仪（MR TOF MS）。 为了提高平面MR TOF MS的质量分辨能力，可以使用空间等时和弯曲界面来进出MR TOF分析仪的离子传输。 一个实施例包括在无场空间中具有周期性透镜的平面无栅MR TOF MS，用于将离子流转换成脉冲的线性离子阱和由静电扇区构成的C形等时接口。 该界面允许在离子镜的边缘和边缘场附近转移离子，而不会引入显着的时间扩散。 界面还可以提供离子包的能量过滤。 离子阱转换器的非相关周转时间可以通过使用来自离子阱的延迟离子提取而减少，并且过多的离子能量在弯曲界面中被过滤。
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4.发明申请公开(公告)号：US20110303841A1
公开(公告)日：2011-12-15
申请号：US13201323
申请日：2010-02-12
申请人： Mikhail Yavor
发明人： Mikhail Yavor
IPC分类号： H01J49/40
CPC分类号： H01J49/405 , H01J49/0004
摘要： A mass analysis device with wide angular acceptance, notably of the mass spectrometer or atom probe microscope type, includes means for receiving a sample, means for extracting ions from the surface of the sample, and a reflectron producing a torroidal electrostatic field whose equipotential lines are defined by a first curvature in a first direction and a first center of curvature, and a second curvature in a second direction perpendicular to the first direction and a second center of curvature, the sample being positioned close to the first center of curvature.
摘要翻译： 具有广角角接受度的质量分析装置，特别是质谱仪或原子探针显微镜类型的质量分析装置包括用于接收样品的装置，用于从样品表面提取离子的装置，以及产生其等势线的环形静电场的反射器 由第一方向和第一曲率中心的第一曲率和与第一方向垂直的第二方向和第二曲率中心的第二曲率限定，该样本定位成接近第一曲率中心。
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公开(公告)号：US07385187B2
公开(公告)日：2008-06-10
申请号：US10561775
申请日：2004-06-18
IPC分类号： B01D59/44
CPC分类号： H01J49/406
摘要： A multiple reflecting time-of-flight mass spectrometer (MR-TOF MS) and method of analysis are disclosed. The flight path of ions is folded along a trajectory by electrostatic mirrors. The longer flight path provides higher resolution while maintaining a moderate instrument size.
摘要翻译： 公开了多重反映飞行时间质谱仪（MR-TOF MS）和分析方法。 离子的飞行路径通过静电镜沿轨迹折叠。 较长的飞行路径提供更高的分辨率，同时保持适中的仪器尺寸。
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公开(公告)号：US20100223698A1
公开(公告)日：2010-09-02
申请号：US12682700
申请日：2008-10-08
IPC分类号： G01Q60/24
CPC分类号： H01J49/40 , H01J49/0004
摘要： The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.
摘要翻译： 本发明涉及广角断层成像原子探针的质量分辨率的提高。 本发明还包括原子探针，其还包括彼此分离距离L并封闭在腔室中的样品保持装置和检测器，“三角形”型静电透镜，由三个电极组成，该三个电极布置在室内 样品和检测器，施加电位以形成电场，当探头工作时，电场强烈地聚焦待测样品发射的离子束。 根据本发明，电极的几何形状被精确限定，以便极大地限制影响“Einzel”透镜对离子束的球面像差的影响，当透镜极大地偏振时，所述球面像差是明显敏感的。 本发明更具体地应用于称为3D原子探针的原子探针。
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7.发明申请MULTI-REFLECTING TIME-OF-FLIGHT MASS SPECTROMETER WITH ISOCHRONOUS CURVED ION INTERFACE 有权具有异步弯曲离子界面的多重反射飞行时间质谱仪公开(公告)号：US20060214100A1
公开(公告)日：2006-09-28
申请号：US11277181
申请日：2006-03-22
IPC分类号： H01J49/40
CPC分类号： H01J49/408 , H01J49/406 , H01J49/48
摘要： The present invention relates generally to a multi-reflecting time-of-flight mass spectrometer (MR TOF MS). To improve mass resolving power of a planar MR TOF MS, a spatially isochronous and curved interface may be used for ion transfer in and out of the MR TOF analyzer. One embodiment comprises a planar grid-free MR TOF MS with periodic lenses in the field-free space, a linear ion trap for converting ion flow into pulses and a C-shaped isochronous interface made of electrostatic sectors. The interface allows transferring ions around the edges and fringing fields of the ion mirrors without introducing significant time spread. The interface may also provide energy filtering of ion packets. The non-correlated turn-around time of ion trap converter may be reduced by using a delayed ion extraction from the ion trap and excessive ion energy is filtered in the curved interface.
摘要翻译： 本发明一般涉及多反射飞行时间质谱仪（MR TOF MS）。 为了提高平面MR TOF MS的质量分辨能力，可以使用空间等时和弯曲界面来进出MR TOF分析仪的离子传输。 一个实施例包括在无场空间中具有周期性透镜的平面无格MR TOF MS，用于将离子流转换成脉冲的线性离子阱和由静电扇区构成的C形等时接口。 该界面允许在离子镜的边缘和边缘场附近转移离子，而不会引入显着的时间扩散。 界面还可以提供离子包的能量过滤。 离子阱转换器的非相关周转时间可以通过使用来自离子阱的延迟离子提取而减少，并且过多的离子能量在弯曲界面中被过滤。
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