公开(公告)号：US08074292B2

公开(公告)日：2011-12-06

申请号：US12682700

申请日：2008-10-08

申请人： Alain Bostel ,  Mikhail Yavor ,  Ludovic Renaud ,  Bernard Deconihout

发明人： Alain Bostel ,  Mikhail Yavor ,  Ludovic Renaud ,  Bernard Deconihout

IPC分类号： G01Q60/00

CPC分类号： H01J49/40 ,  H01J49/0004

摘要： The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.

摘要翻译： 本发明涉及广角断层成像原子探针的质量分辨率的提高。 本发明还包括原子探针，其还包括彼此分离距离L并封闭在腔室中的样品保持装置和检测器，“三角形”型静电透镜，由三个电极组成，该三个电极布置在室内 样品和检测器，施加电位以形成电场，当探头工作时，电场强烈地聚焦待测样品发射的离子束。 根据本发明，精确地限定电极的几何形状，以便极大地限制影响“Einzel”透镜的离子束的球面像差的影响，当透镜极大地偏振时，所述球面像差明显敏感。 本发明更具体地应用于称为3D原子探针的原子探针。

公开(公告)号：US20100223698A1

公开(公告)日：2010-09-02

申请号：US12682700

申请日：2008-10-08

申请人： Alain Bostel ,  Mikhail Yavor ,  Ludovic Renaud ,  Bernard Deconihout

发明人： Alain Bostel ,  Mikhail Yavor ,  Ludovic Renaud ,  Bernard Deconihout

IPC分类号： G01Q60/24

CPC分类号： H01J49/40 ,  H01J49/0004

摘要： The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.

摘要翻译： 本发明涉及广角断层成像原子探针的质量分辨率的提高。 本发明还包括原子探针，其还包括彼此分离距离L并封闭在腔室中的样品保持装置和检测器，“三角形”型静电透镜，由三个电极组成，该三个电极布置在室内 样品和检测器，施加电位以形成电场，当探头工作时，电场强烈地聚焦待测样品发射的离子束。 根据本发明，电极的几何形状被精确限定，以便极大地限制影响“Einzel”透镜对离子束的球面像差的影响，当透镜极大地偏振时，所述球面像差是明显敏感的。 本发明更具体地应用于称为3D原子探针的原子探针。