专利检索 ap:"Matt Tsai" 第 1 页

1.

发明授权
High pressure/high temperature process chamber 失效
标题翻译：高压/高温处理室

公开(公告)号：US5990453A

公开(公告)日：1999-11-23

申请号：US982683

申请日：1997-12-02

申请人： Ashok K. Das , Joe Stevens , Erich Tzou , Matt Tsai

发明人： Ashok K. Das , Joe Stevens , Erich Tzou , Matt Tsai

IPC分类号： H01L21/00 , A21B1/00

CPC分类号： H01L21/67109

摘要： An improved processing chamber is provided that withstands numerous high pressure/high temperature processing cycles without heater breakage. The processing chamber contains a high conductivity, a high emissivity and/or a high transmissivity shield positioned in sufficient proximity to a heater to prohibit gas currents such as convection current loops from forming between the shield and the heater. The shield is preferably a thin anodized metal or a sapphire sheet.

摘要翻译： 提供了一种改进的处理室，其承受许多高压/高温处理循环而没有加热器断裂。处理室包含高导电率，高发射率和/或高透射率屏蔽，其位于足够靠近加热器的位置，以防止诸如对流电流环之间的气流在屏蔽和加热器之间形成。该屏蔽件优选为薄的阳极氧化金属或蓝宝石片。

2.

发明授权
High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications 有权
标题翻译：高温直流夹紧和高压绝缘的RF偏置电缆，用于可偏置静电卡盘应用

公开(公告)号：US06875927B2

公开(公告)日：2005-04-05

申请号：US10095351

申请日：2002-03-08

申请人： Karl Brown , Cheng-Hsiung (Matt) Tsai , Donny Young , Vineet Mehta , David Loo

发明人： Karl Brown , Cheng-Hsiung (Matt) Tsai , Donny Young , Vineet Mehta , David Loo

IPC分类号： H01L21/683 , H02N13/00 , H01B7/00

CPC分类号： H02N13/00 , H01L21/6833

摘要： A high temperature cable includes wire bundle having a plurality of copper strands, where each copper strand has a barrier coating and an anti-oxidation coating disposed thereon. A mica-based layer is wrapped around a length of the wire bundle and a fiberglass layer is disposed over the mica-based layer.

摘要翻译： 高温电缆包括具有多个铜绞线的线束，其中每根铜绞线具有阻挡涂层和设置在其上的抗氧化涂层。云母层围绕线束的长度缠绕，并且玻璃纤维层设置在云母基层之上。