FILM FORMATION METHOD AND FILM FORMATION APPARATUS
    1.
    发明申请
    FILM FORMATION METHOD AND FILM FORMATION APPARATUS 审中-公开
    电影形成方法和电影制作装置

    公开(公告)号:US20120107506A1

    公开(公告)日:2012-05-03

    申请号:US13270551

    申请日:2011-10-11

    CPC classification number: C23C14/042 H01L51/56

    Abstract: Provided is a film formation apparatus capable of causing a substrate and a mask to be in a substantially horizontal state and brought into intimate contact with each other without deforming mask apertures. A region inside a mask frame and outside aperture regions of a mask on a rear surface of a substrate is pressed by a pressing body in lines along two opposing sides of the substrate.

    Abstract translation: 本发明提供一种成膜装置,其能够使基板和掩模处于大致水平状态,并且在不使掩模孔变形的情况下彼此紧密接触。 衬底框架内的区域和衬底后表面上的掩模的外部孔区域被基体的两个相对侧的线按压体按压。

    Apparatus and method for object shape detection
    4.
    发明申请
    Apparatus and method for object shape detection 审中-公开
    物体形状检测装置及方法

    公开(公告)号:US20060001760A1

    公开(公告)日:2006-01-05

    申请号:US11155631

    申请日:2005-06-20

    CPC classification number: H04N5/2256

    Abstract: A light projecting device including a two-dimensional array of light projecting elements is used to project light towards an image capturing device. An arrangement for mounting an object to be modelled is provided between the light projecting device and the image capturing device. The light projecting elements are arranged to direct light towards said image capturing device, whereby a silhouette of the object is generated at the image capturing device. The silhouette is used for generating a three-dimensional model of the object.

    Abstract translation: 使用包括光投射元件的二维阵列的投光装置将光投影到图像拍摄装置。 在投光装置和图像拍摄装置之间设置有用于安装待建模物体的装置。 光投射元件布置成将光引向所述图像捕获装置,由此在图像捕获装置处产生对象的轮廓。 剪影用于生成对象的三维模型。

    Film Formation of Mask and Film Formation Method Using the Same
    5.
    发明申请
    Film Formation of Mask and Film Formation Method Using the Same 审中-公开
    使用它的面膜和成膜方法的成膜方法

    公开(公告)号:US20100080915A1

    公开(公告)日:2010-04-01

    申请号:US12561602

    申请日:2009-09-17

    CPC classification number: C23C14/042 H01L51/56

    Abstract: When a position of a film formation mask is recognized by irradiating the film formation mask with light, an image having a high contrast cannot be obtained, which unstabilizes reproducibility of measurement accuracy for an alignment mark position, leading to an alignment error between a substrate and a mask. Provided is a film formation mask including a mask sheet having a positioning opening and a mask frame, in which a reflective member having a reflectance higher than that of the mask sheet is provided to the positioning opening. When light is irradiated onto the positioning opening of the film formation mask, an intensity difference between light reflected by the mask sheet and light reflected by the reflective member becomes stable. Therefore, the position of the film formation mask may be determined with high reproducibility.

    Abstract translation: 当通过用光照射成膜掩模来识别成膜掩模的位置时,不能获得具有高对比度的图像,这使对准标记位置的测量精度的再现性不稳定,导致基板和 一个面具 本发明提供一种成膜掩模,其包括具有定位开口和掩模框架的掩模片,其中具有高于掩模片的反射率的反射部件设置在定位开口上。 当光照射到成膜掩模的定位开口上时,由掩模片反射的光与由反射部件反射的光之间的强度差变得稳定。 因此,可以以高再现性确定成膜掩模的位置。

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