公开(公告)号：US20120032068A1

公开(公告)日：2012-02-09

申请号：US13198053

申请日：2011-08-04

Applicant: Ko ISHIZUKA

Inventor： Ko ISHIZUKA

IPC: G01D5/34

CPC classification number: G01D5/34707

Abstract: An absolute encoder includes a scale in which plural marks are arranged at a first pitch; a detector configured to detect a predetermined number of marks corresponding to one of the absolute codes; and a calculator configured to calculate an absolute position of the scale based on an output of the detector. The calculator is configured to generate a data sequence constituted by the predetermined number of data by respectively quantizing the predetermined number of periodic signals output from the detector, and to obtain first position data corresponding to the one of the absolute codes based on the generated data sequence, to obtain second position data based on a phase of at least one of the predetermined number of periodic signals, and to generate data which represents the absolute position by combining the first position data and the second position data.

Abstract translation: 绝对编码器包括以第一间距布置多个标记的刻度; 检测器，被配置为检测与绝对代码之一相对应的预定数量的标记; 以及计算器，其被配置为基于所述检测器的输出来计算所述刻度的绝对位置。 计算器被配置为通过分别量化从检测器输出的预定数量的周期信号来生成由预定数量的数据构成的数据序列，并且基于生成的数据序列获得与绝对代码中的一个对应的第一位置数据 基于预定数量的周期信号中的至少一个的相位来获得第二位置数据，并通过组合第一位置数据和第二位置数据来生成表示绝对位置的数据。

公开(公告)号：US20110249270A1

公开(公告)日：2011-10-13

申请号：US13079390

申请日：2011-04-04

Applicant: Ko ISHIZUKA

Inventor： Ko ISHIZUKA

IPC: G01B9/02

CPC classification number: G01B9/02007 ,  G01B9/02002 ,  G01B2290/30 ,  G01B2290/70 ,  G01D5/266 ,  G01D5/38

Abstract: A heterodyne interferometry displacement measurement apparatus includes a first optical system including a light source (LASER) and a diffraction grating (GT0) that generates two diffracted lights to combine the two diffracted lights to generate a combined light and that causes the two diffracted lights to interfere with each other to generate a first frequency difference signal, a second optical system that converts the combined light into two lights of which frequencies are different from each other by a second frequency difference in accordance with a displacement of an object and that causes the two lights to interfere with each other to generate a second frequency difference signal, and an output device that outputs information of a displacement amount of the object based on the first frequency difference signal and the second frequency difference signal.

Abstract translation: 外差干涉测量位移测量装置包括第一光学系统，其包括光源（LASER）和衍射光栅（GT0），其衍射光栅（GT0）产生两个衍射光以组合两个衍射光以产生组合的光，并且使两个衍射光干涉 彼此产生第一频率差信号;第二光学系统，其根据物体的位移将组合的光转换成两个频率彼此不同的光，并且导致两个光 相互干扰以产生第二频率差信号;以及输出装置，其基于第一频率差信号和第二频差信号输出对象的位移量的信息。

公开(公告)号：US07554671B2

公开(公告)日：2009-06-30

申请号：US11459861

申请日：2006-07-25

Applicant: Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

Inventor： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

IPC: G01B11/02

CPC classification number: G01B9/02012 ,  G01B9/02007 ,  G01B9/02018 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/70

Abstract: A first beam having high coherence and a second beam having low coherence and having a central wavelength difference from that of the first beam are multiplexed onto the same optical axis. First and second multiplexed beams obtained by beam splitting are emitted at a measurement reflection plane and a reference plane, respectively. The reflected first and second multiplexed beams are multiplexed and interfere with each other. The interference generates a first interference signal that is obtained from the first beams at the interference unit and that relates to information on the distance to the measurement reflection plane and a second interference signal that is obtained from the second beams. The first and second interference signals are used to carry out calculations for determining the position of a measurement origin for the measurement reflection plane.

Abstract translation: 具有高相干性的第一光束和具有低相干性并且具有与第一光束的中心波长不同的第二光束被复用到同一光轴上。 通过分束获得的第一和第二多路复用波束分别在测量反射平面和参考平面处发射。 反射的第一和第二多路复用波束被多路复用并彼此干扰。 干扰产生从干扰单元的第一波束获得的第一干扰信号，其涉及到与测量反射平面的距离的信息和从第二波束获得的第二干扰信号。 第一和第二干涉信号用于执行用于确定测量反射平面的测量原点的位置的计算。

公开(公告)号：US20070024863A1

公开(公告)日：2007-02-01

申请号：US11459861

申请日：2006-07-25

Applicant: Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

Inventor： Hidejiro Kadowaki ,  Ko Ishizuka ,  Shigeki Kato

IPC: G01B11/02

CPC classification number: G01B9/02012 ,  G01B9/02007 ,  G01B9/02018 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/70

Abstract: A first beam having high coherence and a second beam having low coherence and having a central wavelength difference from that of the first beam are multiplexed onto the same optical axis. First and second multiplexed beams obtained by beam splitting are emitted at a measurement reflection plane and a reference plane, respectively. The reflected first and second multiplexed beams are multiplexed and interfere with each other. The interference generates a first interference signal that is obtained from the first beams at the interference unit and that relates to information on the distance to the measurement reflection plane and a second interference signal that is obtained from the second beams. The first and second interference signals are used to carry out calculations for determining the position of a measurement origin for the measurement reflection plane.

Abstract translation: 具有高相干性的第一光束和具有低相干性并且具有与第一光束的中心波长不同的第二光束被复用到同一光轴上。 通过分束获得的第一和第二多路复用波束分别在测量反射平面和参考平面处发射。 反射的第一和第二多路复用波束被多路复用并彼此干扰。 干扰产生从干扰单元的第一波束获得的第一干扰信号，其涉及到与测量反射平面的距离的信息和从第二波束获得的第二干扰信号。 第一和第二干涉信号用于执行用于确定测量反射平面的测量原点的位置的计算。

公开(公告)号：US06473184B1

公开(公告)日：2002-10-29

申请号：US09562434

申请日：2000-05-01

Applicant: Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

Inventor： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC: G01B902

CPC classification number: G01B9/02081 ,  G01B9/02057 ,  G01B2290/30 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometer has a semiconductor laser which oscillates in multiple modes, an optical member for providing a beam from the semiconductor laser with a substantial optical path difference between optical paths partially in one beam, and an interference optical system for causing interference, using the beam having traveled via the optical member.

Abstract translation: 干涉仪具有以多个模式振荡的半导体激光器，用于提供来自半导体激光器的光束的光学部件在一个光束中部分地在光路之间具有实质光程差的光学部件和用于引起干涉的干涉光学系统，使用具有 通过光学构件行进。

公开(公告)号：US08243279B2

公开(公告)日：2012-08-14

申请号：US12568545

申请日：2009-09-28

Applicant: Ko Ishizuka

Inventor： Ko Ishizuka

IPC: G01B11/02

CPC classification number: G01D5/38

Abstract: A displacement measurement apparatus includes a first diffraction grating transmitting light from a light source and producing diffracted beams including first to third diffracted beams output in different directions; a second diffraction grating movable together with an object to be measured, provided in a plane parallel to the first diffraction grating, and reflecting the first to third diffracted beams transmitted through the first diffraction grating; a first photodetector receiving the first and second diffracted beams diffracted by the second diffraction grating; a second photodetector receiving at least the third diffracted beam transmitted through the first diffraction grating; and a calculation unit calculating displacement of the object in a first direction in accordance with the beams received by the first photodetector, and displacement of the object in a second direction, different from the first direction, in accordance with the beam received by the second photodetector.

Abstract translation: 位移测量装置包括：第一衍射光栅，透射来自光源的光，并产生包括沿不同方向输出的第一至第三衍射光束的衍射光束; 设置在与第一衍射光栅平行的平面中的第二衍射光栅与被测量物体一起移动，并且反射透射通过第一衍射光栅的第一至第三衍射光束; 接收由第二衍射光栅衍射的第一和第二衍射光束的第一光电检测器; 接收至少透过第一衍射光栅的第三衍射光束的第二光电检测器; 以及计算单元，根据由第一光电检测器接收的光束和第一方向的第二方向，根据由第二光电检测器接收的光束来计算物体在第一方向上的位移，以及与第一方向不同的第二方向上的物体的位移 。

公开(公告)号：US20100208271A1

公开(公告)日：2010-08-19

申请号：US12702667

申请日：2010-02-09

Applicant: Ko Ishizuka

Inventor： Ko Ishizuka

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01D5/38 ,  G01D5/2457

Abstract: An apparatus includes a light source, a scale which is configured to have first and second diffraction grating portions which differ from each other in a grating pitch, a light receiving portion configured to receive first and second interference light fluxes generated from interference of a plurality of diffraction light fluxes, at the first and second diffraction grating portions, respectively, a light flux emitted from the light source and have different orders of diffraction, and to output first and second periodic signals based on an intensity of the first and second interference light fluxes, respectively, and a computing unit configured to output, based on the first and second periodic signals a signal representing an origin of displacement of the scale.

Abstract translation: 一种装置，包括光源，刻度尺，其被配置为具有在光栅间距中彼此不同的第一和第二衍射光栅部分;光接收部分，被配置为接收由多个光栅的干涉产生的第一和第二干涉光束 在第一和第二衍射光栅部分分别衍射光束从光源发射的光束并具有不同的衍射级，并且基于第一和第二干涉光束的强度输出第一和第二周期信号 以及计算单元，被配置为基于所述第一和第二周期信号输出表示所述刻度的位移的原点的信号。

公开(公告)号：US20100079767A1

公开(公告)日：2010-04-01

申请号：US12568545

申请日：2009-09-28

Applicant: Ko Ishizuka

Inventor： Ko Ishizuka

IPC: G01B9/02 ,  G03B27/54

CPC classification number: G01D5/38

Abstract: A displacement measurement apparatus includes a first diffraction grating transmitting light from a light source and producing diffracted beams including first to third diffracted beams output in different directions; a second diffraction grating movable together with an object to be measured, provided in a plane parallel to the first diffraction grating, and reflecting the first to third diffracted beams transmitted through the first diffraction grating; a first photodetector receiving the first and second diffracted beams diffracted by the second diffraction grating; a second photodetector receiving at least the third diffracted beam transmitted through the first diffraction grating; and a calculation unit calculating displacement of the object in a first direction in accordance with the beams received by the first photodetector, and displacement of the object in a second direction, different from the first direction, in accordance with the beam received by the second photodetector.

Abstract translation: 位移测量装置包括：第一衍射光栅，透射来自光源的光，并产生包括沿不同方向输出的第一至第三衍射光束的衍射光束; 设置在与第一衍射光栅平行的平面中的第二衍射光栅与被测量物体一起移动，并且反射透射通过第一衍射光栅的第一至第三衍射光束; 接收由第二衍射光栅衍射的第一和第二衍射光束的第一光电检测器; 接收至少透过第一衍射光栅的第三衍射光束的第二光电检测器; 以及计算单元，根据由第一光电检测器接收的光束和第一方向的第二方向，根据由第二光电检测器接收的光束来计算物体在第一方向上的位移，以及与第一方向不同的第二方向上的物体的位移 。

公开(公告)号：US07375820B2

公开(公告)日：2008-05-20

申请号：US11335565

申请日：2006-01-20

Applicant: Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

Inventor： Ko Ishizuka ,  Hidejiro Kadowaki ,  Yasushi Kaneda ,  Shigeki Kato ,  Takayuki Kadoshima ,  Sakae Horyu

IPC: G01B11/14

CPC classification number: G01B9/02081 ,  G01B9/02057 ,  G01B2290/30 ,  G01B2290/70 ,  G01D5/344

Abstract: Interference measuring apparatus having an optical system for dividing a coherent light beam into two light beams, and causing the divided two light beams to pass along discrete optical paths. The light beams are made into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them. The wave fronts of the linearly polarized light beams are superposed one upon the others. A light dividing member divides the light beams superposed one upon the other by the optical system into a plurality of light beams. A polarizing plate takes out each light beam with a 45° polarized component, and a plurality of light receiving elements individually receive the light beams taken out by the polarizing plate.

Abstract translation: 干涉测量装置具有用于将相干光束分成两束光束的光学系统，并且使分离的两束光束沿分离的光路通过。 光束被制成彼此正交的线偏振光束，并且对它们中的至少一个的波前的相位进行调制。 线性偏振光束的波前与其他波
数重叠。 光分割部件通过光学系统将彼此重叠的光束分成多个光束。 偏振片以45°偏振分量取出每个光束，并且多个光接收元件分别接收由偏振片取出的光束。

公开(公告)号：US07061624B2

公开(公告)日：2006-06-13

申请号：US10752335

申请日：2004-01-05

Applicant: Ko Ishizuka

Inventor： Ko Ishizuka

IPC: G01B9/02

CPC classification number: G01D5/345 ,  G01D5/366 ,  G01D5/38

Abstract: Provided is a grating interference type optical encoder including a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for emitting a coherent light fluxes to the diffraction grating on the scale board that relatively moves, to produce two diffraction light fluxes having different orders, an arc-shaped grating for re-emitting to the diffraction grating the two diffraction light fluxes having the different orders which are produced in the diffraction grating portion through a deflection unit, and a light guiding unit for superimposing rediffraction light fluxes produced by rediffracting the diffraction light fluxes re-emitted to the diffraction grating and guiding the superimposed rediffraction light fluxes to the light receiving element. The grating interference type optical encoder further includes: a phase grating that divides the rediffraction light fluxes superimposed between the diffraction grating and the light receiving element into a plurality of light fluxes, and a linear deflection element having different deflection directions corresponding to the plurality of light fluxes divided by the phase grating.

Abstract translation: 提供了一种光栅干涉型光学编码器，其包括刻度板，位于刻度板上的衍射光栅，光接收元件，用于向相对移动的刻度板上的衍射光栅发射相干光束的照明光学系统， 产生具有不同阶数的两个衍射光束，用于通过偏转单元将衍射光栅部分中产生的具有不同阶数的两个衍射光束重新发射到衍射光栅的弧形光栅，以及用于 通过重新衍射重新发射到衍射光栅的衍射光束并将叠加的红色光束引导到光接收元件而产生的重衍红光束。 光栅干涉型光学编码器还包括：相位光栅，其将叠加在衍射光栅与受光元件之间的红色光束分成多个光束，并且具有与多个光对应的不同偏转方向的线性偏转元件 焊剂除以相位光栅。