METHOD FOR FORMING NANOSTRUCTURE HAVING HIGH ASPECT RATIO AND METHOD FOR FORMING NANOPATTERN USING THE SAME
    1.
    发明申请
    METHOD FOR FORMING NANOSTRUCTURE HAVING HIGH ASPECT RATIO AND METHOD FOR FORMING NANOPATTERN USING THE SAME 失效
    用于形成具有高比例的纳米结构的方法和使用其形成纳米尺度的方法

    公开(公告)号:US20080000871A1

    公开(公告)日:2008-01-03

    申请号:US11163997

    申请日:2005-11-07

    Abstract: Provided is a method of forming a nanostructure having a nano-sized diameter and a high aspect ratio through a simple and economical process. To form the nanostructure, a polymer thin film is formed on a substrate and a mold is brought to contact the polymer thin film. Then, a polymer patterning is formed to contact the background surface of an engraved part of the mold, and then the polymer pattern is extended out by removing the mold out of the polymer thin film. The nanostructure forming method of the present research can reproduce diverse cilia optimized in the natural world. Also, it can be used to develop new materials with an ultra-hydrophobic property or a high adhesiveness. Further, it can be applied to a nanopattern forming process for miniaturizing electronic devices and to various ultra-precise industrial technologies together with carbon nanotube, which stands in the highlight recently.

    Abstract translation: 提供了通过简单且经济的方法形成具有纳米尺寸直径和高纵横比的纳米结构的方法。 为了形成纳米结构,在基材上形成聚合物薄膜,使模具与聚合物薄膜接触。 然后,形成聚合物图案化以与模具的雕刻部分的背景表面接触,然后通过从聚合物薄膜中除去模具来伸出聚合物图案。 本研究的纳米结构形成方法可以重现自然界中优化的多样化纤毛。 此外,它可用于开发具有超疏水性或高粘合性的新材料。 此外,其可以应用于近来在高亮度的碳纳米管的电子装置的微型化以及各种超精密工业技术的纳米图案形成工序。

    Method for forming minute pattern and method for forming minute pattern mask
    2.
    发明授权
    Method for forming minute pattern and method for forming minute pattern mask 有权
    形成微小图案的方法和形成微图案掩模的方法

    公开(公告)号:US08721905B2

    公开(公告)日:2014-05-13

    申请号:US13431516

    申请日:2012-03-27

    CPC classification number: G03F7/0002 B82Y10/00 B82Y40/00

    Abstract: A method for forming a minute pattern mask includes forming an etching target layer on a substrate. A convex pattern including a plurality of convex parts is formed on the etching target layer. A resin composition is coated on the convex pattern to form a resin layer including a first region neighboring the convex part and a second region positioned between the neighboring convex parts. The resin layer is ashed or etched to form the plurality of first resin patterns. The plurality of first resin patterns is processed to form a minute pattern mask including a plurality of second resin patterns. The etching target layer is etched using the plurality of second resin patterns as an etch mask to form a minute pattern.

    Abstract translation: 形成微图案掩模的方法包括在基板上形成蚀刻目标层。 在蚀刻目标层上形成包括多个凸部的凸形图案。 将树脂组合物涂覆在凸形图案上以形成包括邻近凸部的第一区域和位于相邻凸部之间的第二区域的树脂层。 树脂层被灰化或蚀刻以形成多个第一树脂图案。 处理多个第一树脂图案以形成包括多个第二树脂图案的微小图案掩模。 使用多个第二树脂图案作为蚀刻掩模蚀刻蚀刻目标层以形成微小图案。

    METHOD OF FORMING HIERARCHICAL MICROSTRUCTURE USING PARTIAL CURING
    4.
    发明申请
    METHOD OF FORMING HIERARCHICAL MICROSTRUCTURE USING PARTIAL CURING 审中-公开
    使用部分固化形成分层微结构的方法

    公开(公告)号:US20120034390A1

    公开(公告)日:2012-02-09

    申请号:US13265521

    申请日:2009-04-20

    CPC classification number: B81C1/0046 B81B2203/04 B81C1/00206 B81C2201/034

    Abstract: Disclosed is a method of forming a hierarchical microstructure using partial curing, which is simple in the manufacturing process and capable of forming a hierarchical structure without heterogeneous interfaces. To this end, there is provided a method of forming a hierarchical microstructure using partial curing, including forming a first polymer pattern having partial curing layers and forming a second polymer pattern on the first polymer pattern by using the partial curing layers. According to the present invention, a microstructure having various hierarchical structures can be formed by using a simple process. Accordingly, efficiency in various processes in which a microstructure having various hierarchical structures needs to be formed and economic efficiency can be improved. Furthermore, new functional materials, having not only super hydrophobicity, but also a high adhesive property even in a rough surface, can be developed.

    Abstract translation: 公开了一种使用部分固化形成分级微结构的方法,其制造过程简单并且能够形成没有异质界面的层次结构。 为此,提供了使用部分固化形成层状微结构的方法,包括通过使用部分固化层在第一聚合物图案上形成具有部分固化层并形成第二聚合物图案的第一聚合物图案。 根据本发明,可以通过使用简单的工艺形成具有各种分层结构的微结构。 因此,可以提高需要形成具有各种分层结构的微结构的各种工艺中的效率和经济效率。 此外,即使在粗糙表面上,也可以开发不仅具有超疏水性,而且具有高粘合性的新功能材料。

    Method for Forming Minute Pattern and Method for Forming Minute Pattern Mask
    5.
    发明申请
    Method for Forming Minute Pattern and Method for Forming Minute Pattern Mask 有权
    形成分钟图案的方法和形成分钟图案掩模的方法

    公开(公告)号:US20130098869A1

    公开(公告)日:2013-04-25

    申请号:US13431516

    申请日:2012-03-27

    CPC classification number: G03F7/0002 B82Y10/00 B82Y40/00

    Abstract: A method for forming a minute pattern mask includes forming an etching target layer on a substrate. A convex pattern including a plurality of convex parts is formed on the etching target layer. A resin composition is coated on the convex pattern to form a resin layer including a first region neighboring the convex part and a second region positioned between the neighboring convex parts. The resin layer is ashed or etched to form the plurality of first resin patterns. The plurality of first resin patterns is processed to form a minute pattern mask including a plurality of second resin patterns. The etching target layer is etched using the plurality of second resin patterns as an etch mask to form a minute pattern.

    Abstract translation: 形成微图案掩模的方法包括在基板上形成蚀刻目标层。 在蚀刻目标层上形成包括多个凸部的凸形图案。 将树脂组合物涂覆在凸形图案上以形成包括邻近凸部的第一区域和位于相邻凸部之间的第二区域的树脂层。 树脂层被灰化或蚀刻以形成多个第一树脂图案。 处理多个第一树脂图案以形成包括多个第二树脂图案的微小图案掩模。 使用多个第二树脂图案作为蚀刻掩模蚀刻蚀刻目标层以形成微小图案。

    DRY ADHESIVE FASTENER SYSTEM AND METHOD OF USING THE SAME
    6.
    发明申请
    DRY ADHESIVE FASTENER SYSTEM AND METHOD OF USING THE SAME 审中-公开
    干燥粘合紧固件系统及其使用方法

    公开(公告)号:US20110271497A1

    公开(公告)日:2011-11-10

    申请号:US13144815

    申请日:2010-02-12

    Abstract: Provided are a dry adhesive fastening system which has a relatively superior adhesion, does not almost generate noises during the attaching or detaching operation, has a simplified structure adapted to mass production requirements, and a method of using the same. For this, the dry adhesive fastening system includes a first adhesion member having a first microvillus disposed on a first board and a second adhesion member having a second microvillus disposed on a second board to contact the first adhesion, thereby providing adhesion. Also, unlike the existing velcro fastening system, the hook and loop may not be classified to improve production yield and effectiveness. Also, during the attachment/detachment, the noises may do not occur. In addition, since the microvillus having the micro or nano size is used, the adhesion may be realized even though a very small area is provided. Therefore, the dry adhesive fastening system according to the embodiment of the present invention may be applied in fields greater than those of the existing velcro fastening system.

    Abstract translation: 提供了一种具有相对优异的附着力的干燥粘合剂紧固系统,在附接或拆卸操作期间几乎不产生噪声,具有适于批量生产要求的简化结构及其使用方法。 为此,干式粘合剂紧固系统包括具有设置在第一板上的第一微生物的第一粘合构件和设置在第二板上的第二微孔的第二粘合构件以接触第一粘合,从而提供粘合。 此外,与现有的维可牢尼龙搭扣系统不同,钩环可以不分类以提高产量和效果。 此外,在附着/拆卸期间,可能不会发生噪声。 此外,由于使用微米或纳米尺寸的微生物,即使提供非常小的面积,也可以实现粘附。 因此,根据本发明的实施例的干式粘合剂紧固系统可以应用于比现有的尼龙搭扣系统的领域更大的领域。

    Method for forming nanostructure having high aspect ratio and method for forming nanopattern using the same
    8.
    发明授权
    Method for forming nanostructure having high aspect ratio and method for forming nanopattern using the same 失效
    用于形成具有高纵横比的纳米结构的方法和使用其形成纳米图案的方法

    公开(公告)号:US07632417B2

    公开(公告)日:2009-12-15

    申请号:US11163997

    申请日:2005-11-07

    Abstract: Provided is a method of forming a nanostructure having a nano-sized diameter and a high aspect ratio through a simple and economical process. To form the nanostructure, a polymer thin film is formed on a substrate and a mold is brought to contact the polymer thin film. Then, a polymer patterning is formed to contact the background surface of an engraved part of the mold, and then the polymer pattern is extended out by removing the mold out of the polymer thin film. The nanostructure forming method of the present research can reproduce diverse cilia optimized in the natural world. Also, it can be used to develop new materials with an ultra-hydrophobic property or a high adhesiveness. Further, it can be applied to a nanopattern forming process for miniaturizing electronic devices and to various ultra-precise industrial technologies together with carbon nanotube, which stands in the highlight recently.

    Abstract translation: 提供了通过简单且经济的方法形成具有纳米尺寸直径和高纵横比的纳米结构的方法。 为了形成纳米结构,在基材上形成聚合物薄膜,使模具与聚合物薄膜接触。 然后,形成聚合物图案化以与模具的雕刻部分的背景表面接触,然后通过从聚合物薄膜中除去模具来伸出聚合物图案。 本研究的纳米结构形成方法可以重现自然界中优化的多样化纤毛。 此外,它可用于开发具有超疏水性或高粘合性的新材料。 此外,其可以应用于近来在高亮度的碳纳米管的电子装置的微型化以及各种超精密工业技术的纳米图案形成工序。

    METHOD OF ARRAYING CELLS AT SINGLE-CELL LEVEL INSIDE MICROFLUIDIC CHANNEL AND METHOD OF ANALYSING CELLS USING THE SAME, AND CELL ANALYSIS CHIP USED FOR CARRYING OUT THE SAME
    9.
    发明申请
    METHOD OF ARRAYING CELLS AT SINGLE-CELL LEVEL INSIDE MICROFLUIDIC CHANNEL AND METHOD OF ANALYSING CELLS USING THE SAME, AND CELL ANALYSIS CHIP USED FOR CARRYING OUT THE SAME 审中-公开
    在微流体通道内单细胞水平的细胞的方法和使用该细胞分析细胞的方法以及用于进行其的细胞分析芯片

    公开(公告)号:US20090093374A1

    公开(公告)日:2009-04-09

    申请号:US12299012

    申请日:2007-01-25

    Abstract: Provided are a method of arraying cells at a single-cell level effectively, simply and economically, a method of analyzing cells using the same, and a cell analysis chip used for carrying out the same. To this end, a microfluidic channel having well structures is formed, and a cell solution containing cells is then introduced into the fluidic channel. Thereafter, the cell solution recedes in the microfluidic channel, thus providing a method of arraying cells in the well structures at a single-cell level, a method of analyzing cells using the same, and a cell analysis chip used for carrying out the same. With only very small amount of samples, it is possible to arraying the cells at a single-cell level very simply and economically without an additional apparatus or power. Accordingly, responsiveness such as response intensity of each cell upon an analysis reagent can be observed and the analysis can be made at a single-cell level. That is, it is possible to enhance the reliability of the cell analysis notably and improve the efficiency and accuracy of an individual cell analysis remarkably, so that these methods and cell analysis chip can be widely applied to the whole bio industries.

    Abstract translation: 提供了一种在单细胞层级有效地,简单和经济地排列细胞的方法,使用其分析细胞的方法和用于进行细胞分析的芯片。 为此,形成具有良好结构的微流体通道,然后将含有细胞的细胞溶液引入流体通道。 此后,细胞溶液后退在微流体通道中,从而提供了在单细胞水平下在孔结构中排列细胞的方法,使用其的细胞分析方法和用于进行细胞分析的细胞。 只有非常少量的样品,可以非常简单和经济地将单元排列在单个单元级,而不需要额外的装置或功率。 因此,可以观察各分析试剂的响应强度等响应性,并且可以在单细胞水平进行分析。 也就是说,可以显着提高细胞分析的可靠性,显着提高单个细胞分析的效率和准确性,使得这些方法和细胞分析芯片可以广泛应用于整个生物工业。

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