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    Apparatus and method to inspect defect of semiconductor device
    1.
    发明授权
    Apparatus and method to inspect defect of semiconductor device 失效
    检测半导体器件缺陷的装置和方法

    公开(公告)号：US08546154B2

    公开(公告)日：2013-10-01

    申请号：US13226757

    申请日：2011-09-07

    Applicant: Ji-Young Shin ,  Young-Nam Kim ,  Jong-An Kim ,  Hyung-Suk Cho ,  Yu-Sin Yang

    Inventor： Ji-Young Shin ,  Young-Nam Kim ,  Jong-An Kim ,  Hyung-Suk Cho ,  Yu-Sin Yang

    IPC: G01R31/36 ,  H01L21/66

    CPC classification number: H01J37/241 ,  H01J37/265 ,  H01J37/28 ,  H01L22/12

    Abstract: An apparatus and method to inspect a defect of a substrate. Since a recess of an under layer of a substrate is darker than a projection of a top layer, a ratio of a value of a secondary electron signal (of an SEM) of the under layer to a value of the top layer may be increased to improve a pattern image used to inspect an under layer defect. Several conditions under which electron beams are irradiated may be set, and the pattern may be scanned under such conditions. Secondary electron signals may be generated according to the conditions and converted into image data to display various pattern images. Scan information on the images may be stored with positional information on the substrate. Each of scan information on the pattern images may be calculated to generate a new integrated image.

    Abstract translation: 检查基板缺陷的装置和方法。 由于衬底的底层的凹部比顶层的突起更暗，所以下层的二次电子信号（SEM）的值与顶层的值的比可以增加到 改善用于检查下层缺陷的图案图像。 可以设置照射电子束的几个条件，并且可以在这种条件下扫描图案。 可以根据条件生成二次电子信号，并将其转换为图像数据以显示各种图案图像。 关于图像的扫描信息可以与基板上的位置信息一起存储。 可以计算关于图案图像的每个扫描信息以生成新的集成图像。

    HANDLER TRAY, SYSTEM AND METHOD OF TESTING AN OBJECT INCLUDING THE SAME
    2.
    发明申请
    HANDLER TRAY, SYSTEM AND METHOD OF TESTING AN OBJECT INCLUDING THE SAME 审中-公开
    操作盘，系统和测试对象的方法，包括它们

    公开(公告)号：US20120249177A1

    公开(公告)日：2012-10-04

    申请号：US13403432

    申请日：2012-02-23

    Applicant: Gui-Heum CHOI ,  Doo-Seob KIM ,  Jong-An LEE ,  Young-Gil LEE ,  Seoung-Su HA ,  Seung-Hee LEE

    Inventor： Gui-Heum CHOI ,  Doo-Seob KIM ,  Jong-An LEE ,  Young-Gil LEE ,  Seoung-Su HA ,  Seung-Hee LEE

    IPC: G01R31/26 ,  G01R31/00

    CPC classification number: G01R31/2893

    Abstract: A handler tray may include a tray body and a socket. The tray body may be configured to receive an object. The tray body with the object may be transferred to a test board. The tray body may be selectively interposed between the object and the test board to supply a test current from the test board to external terminals of the object. The socket may be formed on the tray body. The socket may electrically make contact with the external terminals of the object. Thus, a pick-up robot and an insert may be unnecessary, so that a test system and method of testing the object may have an optimally available space.

    Abstract translation: 处理器托盘可以包括托盘主体和插座。 托盘主体可以被配置为接收对象。 具有物体的托盘主体可以被传送到测试板。 托盘主体可以选择性地插入到对象和测试板之间，以将来自测试板的测试电流提供给对象的外部端子。 插座可以形成在托盘主体上。 插座可以与物体的外部端子电接触。 因此，可能不需要拾取机器人和插入件，使得测试系统和测试对象的方法可以具有最佳可用空间。

    Method of analyzing a wafer sample
    4.
    发明授权
    Method of analyzing a wafer sample 失效
    分析晶圆样品的方法

    公开(公告)号：US08050488B2

    公开(公告)日：2011-11-01

    申请号：US12041127

    申请日：2008-03-03

    Applicant: Jong-An Kim ,  Yu-Sin Yang ,  Chung-Sam Jun ,  Moon-Shik Kang ,  Ji-Hye Kim

    Inventor： Jong-An Kim ,  Yu-Sin Yang ,  Chung-Sam Jun ,  Moon-Shik Kang ,  Ji-Hye Kim

    IPC: G06K9/00

    CPC classification number: G06T7/001 ,  G01N21/95607 ,  G06T2207/10061 ,  G06T2207/30148

    Abstract: In a method of analyzing a wafer sample, a first defect of a photoresist pattern on the wafer sample having shot regions exposed with related exposure conditions is detected. A first portion of the pattern includes the shot regions exposed with an exposure condition corresponding to a reference exposure condition and a tolerance error range of the reference exposure condition. The first defect repeatedly existing in at least two of the shot regions in a second portion of the pattern is set up as a second defect of the pattern. A first reference image displaying the second defect is obtained. The first defect of the shot regions in the first portion corresponding to the second defect is set up as a third defect corresponding to weak points of the pattern. The exposure conditions of the shot region having no weak points are set up as an exposure margin of an exposure process.

    Abstract translation: 在分析晶片样品的方法中，检测具有用相关曝光条件曝光的拍摄区域的晶片样品上的光致抗蚀剂图案的第一缺陷。 图案的第一部分包括用与参考曝光条件相对应的曝光条件和参考曝光条件的公差误差范围曝光的拍摄区域。 在图案的第二部分中的至少两个拍摄区域中重复存在的第一缺陷被设置为图案的第二缺陷。 获得显示第二缺陷的第一参考图像。 对应于第二缺陷的第一部分中的拍摄区域的第一缺陷被设置为对应于图案的弱点的第三缺陷。 没有弱点的照射区域的曝光条件被设置为曝光处理的曝光余量。

    Wafer inspecting method
    5.
    发明授权
    Wafer inspecting method 有权
    晶圆检查方法

    公开(公告)号：US07804591B2

    公开(公告)日：2010-09-28

    申请号：US11693356

    申请日：2007-03-29

    Applicant: Ji-Hye Kim ,  Yu-Sin Yang ,  Jong-An Kim ,  Moon-Shik Kang ,  Ji-Young Shin

    Inventor： Ji-Hye Kim ,  Yu-Sin Yang ,  Jong-An Kim ,  Moon-Shik Kang ,  Ji-Young Shin

    IPC: G01N21/00

    CPC classification number: G01N21/95607 ,  G01N21/9501 ,  G01N2021/8864 ,  G01N2021/8867 ,  G01N2021/8887

    Abstract: A wafer inspecting method including the steps of: multi-scanning a pattern image of a unit inspection region in a normal state and a pattern image of a unit inspection region to be inspected, respectively, using different inspection conditions; comparing the multi-scanned pattern images in the normal state with the multi-scanned pattern images to be inspected obtained by the same inspection conditions, and storing differences between the pattern images as difference images; generating a discrimination difference image by calculating a balance between the stored difference images; and discriminating a defect from noise by using the discrimination difference image.

    Abstract translation: 一种晶片检查方法，包括以下步骤：使用不同的检查条件分别对正常状态下的单位检查区域的图案图像和要检查的单位检查区域的图案图像进行多次扫描; 将正常状态下的多扫描图案图像与通过相同检查条件获得的待检查的多扫描图案图像进行比较，并且将图案图像之间的差异存储为差分图像; 通过计算所存储的差分图像之间的平衡来产生鉴别差异图像; 以及通过使用辨别差异图像来区分缺陷和噪声。

    Method of generating plcm for broadcast/multicast service and apparatus thereof
    7.
    发明申请
    Method of generating plcm for broadcast/multicast service and apparatus thereof 有权
    广播/组播业务生成plcm的方法及其装置

    公开(公告)号：US20070025350A1

    公开(公告)日：2007-02-01

    申请号：US10552484

    申请日：2004-10-06

    Applicant: Chan Kyung ,  Jong An ,  Ki Kim ,  Young Lee

    Inventor： Chan Kyung ,  Jong An ,  Ki Kim ,  Young Lee

    IPC: H04L12/56

    CPC classification number: H04J13/10 ,  H04W72/005

    Abstract: A method of generating a public long code mask for a broadcast/multicast service and apparatus thereof are provided, by which, upon performing the broadcast/multicast service, an overhead of a base station or a mobile terminal can be reduced and a delay occurring in the base station or mobile terminal can be reduced. In a method of carrying out a broadcast/multicast service provided via a channel of a mobile communication system, the method includes steps of receiving a flow identifier indicative of the broadcast/multicast service; and generating, based on the received flow identifier, a public long code mask for the channel providing the broadcast/multicast service.

    Abstract translation: 提供一种生成用于广播/多播服务的公共长码掩码的方法及其装置，通过该方法，在执行广播/多播服务时，可以减少基站或移动终端的开销，并且发生延迟 可以减少基站或移动终端。 在执行通过移动通信系统的信道提供的广播/多播服务的方法中，所述方法包括以下步骤：接收指示广播/多播服务的流标识符; 以及基于所接收的流标识符，生成用于提供广播/多播服务的信道的公共长码掩码。

    Method of controlling transmission power of retransmission packet and mobile terminal using the same
    8.
    发明申请
    Method of controlling transmission power of retransmission packet and mobile terminal using the same 有权
    控制重传分组的发送功率的方法及使用该方法的移动终端

    公开(公告)号：US20060252445A1

    公开(公告)日：2006-11-09

    申请号：US10934814

    申请日：2004-09-03

    Applicant: Ki Kim ,  Young Yun ,  Soon Kwon ,  Jong An ,  Chan Kyung ,  Jee Seol

    Inventor： Ki Kim ,  Young Yun ,  Soon Kwon ,  Jong An ,  Chan Kyung ,  Jee Seol

    IPC: H04B7/00

    CPC classification number: H04L1/1825 ,  H04L1/1812 ,  H04W52/241 ,  H04W52/247 ,  H04W52/48

    Abstract: The transmission power of a retransmission packet is controlled in the event of a packet retransmission request being sent from a receiving side in a wireless mobile communication system supporting hybrid automatic retransmission request (HARQ) transmission. In a method of controlling transmission power of retransmission packets by a mobile terminal in a wireless mobile communication system supporting hybrid automatic retransmission request (HARQ) transmission, the method includes steps of receiving, from a base station, gain information associated with the sequence of the retransmission packets; determining, using the gain information, transmission power of one of the retransmission packets; and transmitting the retransmission packet with the determined transmission power.

    Abstract translation: 在支持混合自动重传请求（HARQ）传输的无线移动通信系统中，从接收侧发送分组重发请求的情况下，控制重传分组的发送功率。 在支持混合自动重传请求（HARQ）传输的无线移动通信系统中，通过移动终端控制重传分组的发送功率的方法包括以下步骤：从基站接收与所述基站 重传包; 使用所述增益信息确定所述重传分组之一的发送功率; 并以所确定的发送功率发送所述重发分组。

    Code combining and packet combining handoff method
    9.
    发明申请
    Code combining and packet combining handoff method 有权
    代码组合和分组组合切换方法

    公开(公告)号：US20060030327A1

    公开(公告)日：2006-02-09

    申请号：US11230554

    申请日：2005-09-21

    Applicant: Young Lee ,  Ki Kim ,  Soon Kwon ,  Jong An

    Inventor： Young Lee ,  Ki Kim ,  Soon Kwon ,  Jong An

    IPC: H04Q7/20

    CPC classification number: H04W36/18

    Abstract: A code combining soft handoff method is disclosed. A mobile terminal measures a strength of respective pilot signals received from a plurality of base stations. If the strength of the received pilot signal is higher than a given value, a base station controller allocates a new code pattern to the corresponding base station to additionally receive a signal from the base station. If the strength of the received pilot signal is lower than the specified value, it drops a signal of the corresponding base station. The mobile terminal and the base station change the code pattern of one of the signals from the two base stations into a code pattern different from the code pattern of the other signal.

    Abstract translation: 公开了一种组合软切换方法的代码。 移动终端测量从多个基站接收到的各个导频信号的强度。 如果接收到的导频信号的强度高于给定值，则基站控制器向对应的基站分配新的码模式，以附加地从基站接收信号。 如果接收到的导频信号的强度低于指定值，则丢弃相应基站的信号。 移动终端和基站将来自两个基站的信号之一的码模式改变为与其他信号的码模式不同的码模式。

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