公开(公告)号：US06915702B2

公开(公告)日：2005-07-12

申请号：US10300617

申请日：2002-11-21

申请人： Yoshiteru Omura ,  Kentaro Mizuno ,  Kouji Tsukada ,  Jiro Sakata ,  Norio Fujitsuka

发明人： Yoshiteru Omura ,  Kentaro Mizuno ,  Kouji Tsukada ,  Jiro Sakata ,  Norio Fujitsuka

IPC分类号： G01B7/16 ,  G01L1/18 ,  G01L1/22

CPC分类号： G01L1/2293 ,  G01L1/18

摘要： Force detection devices may have high detection precision and may prevent current leakage through a strain gage 126 to the outside. For example, a force detection block 120 may include a semiconductor substrate 122, a first insulating layer 124 and a semiconductor layer 126 (strain gage). The strain gage 126 preferably includes a site where resistance changes in accordance with the stress acting thereon. The strain gage 126 preferably constitutes at least a portion of a ridge 130 projects from the surface of the force detection block 120. A force transmission block 138 may be attached to a top surface of the ridge 130. The width of the first insulating layer 124 is preferably greater than the width of the semiconductor layer 126.

摘要翻译： 力检测装置可以具有高检测精度并且可以防止通过应变计126向外部的电流泄漏。 例如，力检测块120可以包括半导体衬底122，第一绝缘层124和半导体层126（应变片）。 应变计126优选地包括其中电阻根据作用在其上的应力而变化的部位。 应变计126优选地构成从力检测块120的表面突出的隆起130的至少一部分。 力传递块138可以附接到脊130的顶表面。 第一绝缘层124的宽度优选地大于半导体层126的宽度。

公开(公告)号：US06607643B2

公开(公告)日：2003-08-19

申请号：US09794069

申请日：2001-02-28

申请人： Hideaki Takahashi ,  Keiichi Saji ,  Jiro Sakata ,  Tadashi Inaba ,  Tadashi Nakamura ,  Yumi Masuoka ,  Toshitaka Saito ,  Akio Tanaka

发明人： Hideaki Takahashi ,  Keiichi Saji ,  Jiro Sakata ,  Tadashi Inaba ,  Tadashi Nakamura ,  Yumi Masuoka ,  Toshitaka Saito ,  Akio Tanaka

IPC分类号： G01N27407

CPC分类号： G01N27/419 ,  G01N33/0037 ,  Y02A50/245

摘要： A NOx gas detecting apparatus including an oxygen pumping cell for removing oxygen from a measurement gas, and a NOx detecting cell positioned downstream from the oxygen pumping cell to detect concentration of NOx in the measurement gas, the NOx detecting cell being configured to measure current which flows when oxygen generated from reducing NOx is pumped, wherein the NOx detecting cell has a NOx detecting cathode made of an electrode material including at least one alloy selected from the group consisting of a Pt-Pd alloy, a Pt-Au-Pd alloy, and a Pt-Pd-Rh alloy.

摘要翻译： 一种NOx气体检测装置，其包括用于从测量气体中除氧的氧气泵浦单元，以及位于所述氧气泵浦单元下游的NOx检测单元，以检测所述测量气体中的NOx浓度，所述NOx检测单元被配置为测量 在从还原NOx产生的氧气被泵送时流动，其中，所述NOx检测单元具有由电极材料制成的NOx检测阴极，所述电极材料包括选自由Pt-Pd合金，Pt-Au-Pd合金， 和Pt-Pd-Rh合金。

公开(公告)号：US06268298B1

公开(公告)日：2001-07-31

申请号：US09265528

申请日：1999-03-09

申请人： Atsushi Komura ,  Takeshi Kuzuhara ,  Noriyuki Iwamori ,  Manabu Koike ,  Jiro Sakata ,  Hirofumi Funahashi ,  Kenji Nakashima ,  Masahiko Ishii

发明人： Atsushi Komura ,  Takeshi Kuzuhara ,  Noriyuki Iwamori ,  Manabu Koike ,  Jiro Sakata ,  Hirofumi Funahashi ,  Kenji Nakashima ,  Masahiko Ishii

IPC分类号： H01L2131

CPC分类号： H01L21/02238 ,  H01L21/02255 ,  H01L21/02337 ,  H01L21/2253 ,  H01L21/31662 ,  H01L21/76202 ,  H01L21/76218 ,  H01L21/823878

摘要： In a method of manufacturing a semiconductor device, after performing ion-implantation and before forming an oxide film, a silicon substrate is disposed within a furnace to undergo a heat treatment at a temperature equal to or higher than 950° C. for a specific time period (equal to or longer than 15 minutes). When performing the heat treatment and when raising a temperature up to the heat treatment temperature, oxygen is supplied together with nitrogen gas (inert gas). A supply amount of oxygen is controlled to be equal to or less than 5% when raising the temperature up to the heat treatment temperature, and to be equal to or less than 2% when performing the heat treatment. After the heat treatment, the oxidation film is formed. As a result, crystal defects (OSFs) are prevented from being produced on the silicon substrate surface.

摘要翻译： 在制造半导体器件的方法中，在进行离子注入和形成氧化膜之前，将硅衬底设置在炉内，以在950℃以上的温度下进行特定时间的热处理 期间（等于或长于15分钟）。 进行热处理时，升温至热处理温度时，与氮气（惰性气体）一起供给氧。 当将温度升高到热处理温度时，供氧量控制在5％以下，进行热处理时为0.2％以下。 热处理后，形成氧化膜。 结果，防止在硅衬底表面上产生晶体缺陷（OSF）。

公开(公告)号：US4583996A

公开(公告)日：1986-04-22

申请号：US667745

申请日：1984-11-02

申请人： Jiro Sakata ,  Minoru Yamamoto

发明人： Jiro Sakata ,  Minoru Yamamoto

IPC分类号： B01D53/22 ,  B01D53/26 ,  B01D53/38 ,  B01D53/74 ,  B01D71/04

CPC分类号： B01D71/04 ,  B01D53/22 ,  B01D53/228 ,  B01D53/268 ,  B01D63/02 ,  B01D2313/18

摘要： This invention provides an apparatus for separating condensable gas, which is provided with, as a membrane for separating condensable gas, an inorganic porous membrane which has a layer having a multiplicity of micropores communicating in the thickness direction of the membrane and having a pore radius, as determined by the nitrogen absorption method, of up to 50 .ANG., and preferably up to 20 .ANG., and which has an affinity for said condensable gas or is hydrophilic. This apparatus yields highly selective permeation of condensable gas, such as water vapor or organic gases.

摘要翻译： 本发明提供了一种用于分离可冷凝气体的装置，其具有作为用于分离可冷凝气体的膜的无机多孔膜，所述无机多孔膜具有在膜的厚度方向上连通并具有孔半径的多个微孔的层， 如通过氮气吸收法测定的，高达50安培姆，优选高达20安培姆，并且对所述可冷凝气体具有亲和力或者是亲水性的。 该装置产生可冷凝气体（例如水蒸汽或有机气体）的高度选择性渗透。

公开(公告)号：US4481808A

公开(公告)日：1984-11-13

申请号：US234069

申请日：1981-02-12

申请人： Jiro Sakata ,  Masana Hirai ,  Minoru Yamamoto

发明人： Jiro Sakata ,  Masana Hirai ,  Minoru Yamamoto

IPC分类号： G01N13/00 ,  G01N7/10 ,  G01N13/04 ,  G01N33/28

CPC分类号： G01N7/10 ,  G01N33/2852

摘要： Method and apparatus for determination of the concentration of a component in a solution, such as ethyl alcohol in gasohol, acetic acid in hexane-acetic acid solution, or the like. Such determination is made with ease and accuracy based on a rate of pressure change caused in a closed container due to mass transfer occurring between two liquids through porous material.

摘要翻译： 用于测定溶液中的组分浓度的方法和装置，如乙醇在汽油中，乙酸在己烷 - 乙酸溶液中等。 基于由于通过多孔材料在两种液体之间发生质量传递而在密闭容器中引起的压力变化的速率，这种确定是容易且准确的。

公开(公告)号：US4521236A

公开(公告)日：1985-06-04

申请号：US528789

申请日：1983-09-02

申请人： Minoru Yamamoto ,  Jiro Sakata ,  Haruo Doi

发明人： Minoru Yamamoto ,  Jiro Sakata ,  Haruo Doi

IPC分类号： B01D53/22 ,  B01D71/04 ,  B81C1/00 ,  C03B8/00 ,  C03B20/00 ,  C03B37/075 ,  C03C11/00 ,  C03C13/00 ,  C03C25/68 ,  C03C25/06

CPC分类号： B01D71/04 ,  B01D63/021 ,  C03C11/005 ,  C03C13/00 ,  C03C13/005

摘要： There is provided a method for preparation of porous glass films, preferably in the form of a hollow filament, comprising heating glass films, formed from sodium borosilicate glass having a composition which can be phase-separated by heat-treatment into a soft phase easily eluted with a hot acid solution and a hard phase not easily eluted with the same solution, to separate the glass phase into the two phases and then subjecting the glass film to plasma etching in an atmosphere containing gaseous fluorine-containing compound(s) before or after acid elution of the soft phase. The thus obtained porous glass films have a uniform pore diameter and smooth surfaces and can be used as a variety of separating membranes.

摘要翻译： 提供了一种制备多孔玻璃膜的方法，优选为中空丝的形式，其包括将具有可通过热处理相分离的组成的硼硅酸钠玻璃形成的玻璃膜加热到容易洗脱的软相中 用热酸溶液和硬相不容易用相同的溶液洗脱，将玻璃相分离成两相，然后在含有气态含氟化合物的气氛之前或之后对玻璃膜进行等离子体蚀刻 软相的酸洗脱。 由此获得的多孔玻璃膜具有均匀的孔径和光滑的表面，并且可以用作各种分离膜。

公开(公告)号：US20050061670A1

公开(公告)日：2005-03-24

申请号：US10944426

申请日：2004-09-20

申请人： Akio Tanaka ,  Toshitaka Saito ,  Tadashi Nakamura ,  Tadashi Inaba ,  Keiichi Saji ,  Jiro Sakata

发明人： Akio Tanaka ,  Toshitaka Saito ,  Tadashi Nakamura ,  Tadashi Inaba ,  Keiichi Saji ,  Jiro Sakata

IPC分类号： G01N27/41 ,  G01N27/416 ,  G01N27/419 ,  G01N27/26

CPC分类号： G01N27/419 ,  Y10T29/49002

摘要： A NOx sensing cell includes a solid electrolyte having oxide ion conductivity and a pair of electrodes electrically connected to the solid electrolyte. The measuring electrode includes an oxide portion and a noble metallic portion. The oxide portion includes the solid solution of zirconia containing at least ceria. The noble metallic portion contains at least two kinds of metallic elements selected from platinum group elements. In addition to the NOx sensing cell, a NOx sensing device includes a measuring chamber into which a sensing objective gas is introduced, and an oxygen pump cell which is capable of electrochemically removing the oxygen from the measuring chamber. The measuring electrode of the NOx sensing cell is positioned in the measuring chamber.

摘要翻译： NOx感测单元包括具有氧化物离子传导性的固体电解质和与固体电解质电连接的一对电极。 测量电极包括氧化物部分和贵金属部分。 氧化物部分包括至少含有二氧化铈的氧化锆固溶体。 贵金属部分含有选自铂族元素中的至少两种金属元素。 除了NOx感测单元之外，NOx感测装置还包括测量室，导入检测对象气体的测量室以及能够从测量室电化学除去氧气的氧气泵室。 NOx感测单元的测量电极位于测量室中。

公开(公告)号：US06843132B2

公开(公告)日：2005-01-18

申请号：US10845196

申请日：2004-05-14

申请人： Kentaro Mizuno ,  Kouji Tsukada ,  Yoshiteru Omura ,  Shoji Hashimoto ,  Jiro Sakata

发明人： Kentaro Mizuno ,  Kouji Tsukada ,  Yoshiteru Omura ,  Shoji Hashimoto ,  Jiro Sakata

IPC分类号： G01L19/04 ,  G01L7/08 ,  G01L23/08

CPC分类号： G01L23/10 ,  G01L23/18

摘要： A pressure sensor is realized wherein output error of sensor element can be reduced even in the case where the pressure sensor is utilized in high temperature conditions. A pressure sensor is provided with a housing 20, a diaphragm 24 that partitions the interior and the exterior of the housing 20, a sensor element 54 provided within the housing 20, output value of the sensor element 54 varying in accordance with force exerted thereupon, and a force transmitting rod 52 provided within the housing, the force transmitting rod 52 moving downwardly when a pressure is exerted upon the diaphragm 24, the force transmitting rod 52 thereby exerting force upon the sensor element 54. The diaphragm 24 has a central region 26 contacting with the force transmitting rod 52, and a surrounding region 27 surrounding the periphery of the central region 26 and connecting the central region 26 with the housing 20. The surrounding region 27, viewed cross-sectionally along the radius, is V-shaped or U-shaped, and cancels thermal expansion.

摘要翻译： 实现了压力传感器，即使在高温条件下使用压力传感器的情况下也能够降低传感器元件的输出误差。 压力传感器设置有壳体20，隔离壳体20的内部和外部的隔膜24，设置在壳体20内的传感器元件54，传感器元件54的输出值根据施加在其上的力而变化， 以及设置在壳体内的力传递杆52，当施加压力施加到隔膜24上时，力传递杆52向下移动，力传递杆52从而对传感器元件54施加力。隔膜24具有中心区域26 与力传递杆52接触，以及围绕中心区域26的周边并将中心区域26与壳体20连接的周围区域27.沿着半径横截面地观察的周边区域27为V形或 U型，取消热膨胀。

公开(公告)号：US4594079A

公开(公告)日：1986-06-10

申请号：US682145

申请日：1984-12-17

申请人： Minoru Yamamoto ,  Jiro Sakata

发明人： Minoru Yamamoto ,  Jiro Sakata

IPC分类号： B01D53/22 ,  B01D69/00 ,  B01D69/12 ,  B01D71/70

CPC分类号： B01D69/00 ,  B01D69/127 ,  Y10T428/249978

摘要： A gas separation member comprises a porous substrate, e.g., a membrane or a wall, and a polymer film deposited by plasma polymerization on the surface of the substrate and composed of at least two layers, i.e., a first layer contiguous with the substrate and a second layer superimposed on the first layer. The polymer film of the first layer possesses a uniform chemical composition or chemical structure in the direction of film thickness, while the polymer film of the second layer has a chemical composition or chemical structure which changes continuously or stepwise in the direction of film thickness. The gas separation member combines high gas separation factor and a high gas permeation rate, permitting separation of a specific gas in a concentrated form from a mixed gas. It also excels in weatherability.

摘要翻译： 气体分离构件包括多孔基底，例如膜或壁，以及通过等离子体聚合沉积在基底表面上并由至少两个层构成的聚合物膜，即至少两层，即与基底邻接的第一层和 第二层叠加在第一层上。 第一层的聚合物膜在膜厚方向上具有均匀的化学组成或化学结构，而第二层的聚合物膜具有在膜厚度方向上连续或逐步变化的化学组成或化学结构。 气体分离部件结合高气体分离因子和高气体渗透速率，允许浓缩形式的特定气体与混合气体分离。 它还具有耐候性。

公开(公告)号：US4410338A

公开(公告)日：1983-10-18

申请号：US388577

申请日：1982-06-15

申请人： Minoru Yamamoto ,  Masana Hirai ,  Jiro Sakata

发明人： Minoru Yamamoto ,  Masana Hirai ,  Jiro Sakata

IPC分类号： B01D53/22 ,  B01D57/00 ,  B01D67/00 ,  B01D69/02 ,  B01D71/70 ,  C08G77/06

CPC分类号： B01D69/127 ,  C08G77/06

摘要： A gas separating member of the present invention comprises a porous substrate in the form of a film, wall or hollow fiber and a polymer film formed on a surface of the substrate by plasma polymerization. The gas separation factor (O.sub.2 /N.sub.2) ranges from 2.3 to 3.9 with the corresponding gas permeability ranging from 12 to 0.16 liter/min. m.sup.2 atm. pres.-air.A modified gas separating member of the present invention, which comprises a porous substrate in the aforementioned form and two polymer films formed on a surface of the substrate by plasma polymerization, has the gas separation factor (He/H.sub.2) ranging from 14 to 45.

摘要翻译： 本发明的气体分离部件包括膜，壁或中空纤维形式的多孔基材和通过等离子体聚合在基材的表面上形成的聚合物膜。 气体分离因子（O 2 / N 2）为2.3至3.9，相应的气体渗透率为12至0.16升/分钟。 m2 atm。 空气。 本发明的改性气体分离部件的气体分离系数（He / H 2）为14〜45，包括上述形式的多孔基材和通过等离子体聚合形成于基材表面的2个聚合物膜。