知搜-全球专利检索

  1. 登录
  2. 注册

搜索结果

5 条记录 (耗时 0.013 秒)

    Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces
    1.
    发明授权
    Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces 失效
    具有接收抖动和扫描运动的光纤尖端的光学探针显微镜，用于大样品表面的非破坏性测量

    公开(公告)号：US5811796A

    公开(公告)日：1998-09-22

    申请号：US881293

    申请日：1997-06-24

    申请人： Herschel Maclyn Marchman ,  Jay Kenneth Trautman

    发明人： Herschel Maclyn Marchman ,  Jay Kenneth Trautman

    IPC分类号： G01Q60/18 ,  G01Q90/00 ,  G02B21/00 ,  H01J3/14 ,  H01J37/00

    CPC分类号： G01Q60/22 ,  B82Y20/00 ,  B82Y35/00 ,  G02B21/002

    摘要： An optical probe microscope includes an optical fiber oriented in a vertical direction. The fiber has a tip that emits light onto a horizontal surface of a sample to be measured. This surface can have both desired and undesired departures from planarity. An electromechanical device for imparting dither motion to the fiber tip is superposed on another electromechanical device for imparting two-dimensional horizontal scanning motion to the fiber tip. The dither motion has a much higher frequency than that of the scanning motion. Between successive scannings, another device moves the sample itself from one horizontal position to another. A microscope receives the optical radiation either transmitted or reflected by the sample surface. The microscope forms a (magnified) image of this received optical radiation on the surface of an optical image position detector. The surface of this detector has a relatively large area compared with that of the (magnified) image. The resulting electrical signal developed by the detector provides desired information concerning the scanning position of the fiber tip. Also, this electrical signal is processed and fed back to a vertical pusher that maintains desirably constant the distance of the fiber tip from the sample surface.

    摘要翻译： 光学探针显微镜包括沿垂直方向取向的光纤。 纤维具有将待测样品的水平表面发光的尖端。 该表面可以具有期望的和不期望的偏离平面度。 将用于将纤维尖端的抖动运动的机电装置叠加在另一机电装置上，以向纤维尖端施加二维水平扫描运动。 抖动运动的频率高于扫描运动的频率。 在连续扫描之间，另一个设备将样本本身从一个水平位置移动到另一个水平位置。 显微镜接收由样品表面透射或反射的光辐射。 显微镜在光学图像位置检测器的表面上形成这种接收光辐射的（放大）图像。 该检测器的表面与（放大）图像相比具有相对较大的面积。 由检测器产生的所得电信号提供了关于光纤尖端的扫描位置的期望信息。 此外，该电信号被处理并反馈到垂直推动器，其保持纤维尖端与样品表面的距离期望地恒定。

    Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces
    3.
    发明授权
    Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces 失效
    具有接收抖动和扫描运动的光纤尖端的光学探针显微镜，用于大样品表面的非破坏性测量

    公开(公告)号：US5693938A

    公开(公告)日：1997-12-02

    申请号：US657390

    申请日：1996-06-03

    申请人： Herschel Maclyn Marchman ,  Jay Kenneth Trautman

    发明人： Herschel Maclyn Marchman ,  Jay Kenneth Trautman

    IPC分类号： G01N37/00 ,  G01Q60/18 ,  G01Q60/30 ,  G02B21/00 ,  H01J3/14 ,  H01J37/00

    CPC分类号： G01Q60/22 ,  B82Y20/00 ,  B82Y35/00

    摘要： An optical probe microscope includes an optical fiber oriented in a vertical direction. The fiber has a tip that emits light onto a horizontal surface of a sample to be measured. This surface can have both desired and undesired departures from planarity. An electromechanical device for imparting dither motion to the fiber tip is superposed on another electromechanical device for imparting two-dimensional horizontal scanning motion to the fiber tip. The dither motion has a much higher frequency than that of the scanning motion. Between successive scannings, another device moves the sample itself from one horizontal position to another. A microscope receives the optical radiation either transmitted or reflected by the sample surface. The microscope forms a (magnified) image of this received optical radiation on the surface of an optical image position detector. The surface of this detector has a relatively large area compared with that of the (magnified) image. The resulting electrical signal developed by the detector provides desired information concerning the scanning position of the fiber tip. Also, this electrical signal is processed and fed back to a vertical pusher that maintains desirably constant the distance of the fiber tip from the sample surface.

    摘要翻译： 光学探针显微镜包括沿垂直方向取向的光纤。 纤维具有将待测样品的水平表面发光的尖端。 该表面可以具有期望的和不期望的偏离平面度。 将用于将纤维尖端的抖动运动的机电装置叠加在另一机电装置上，以向纤维尖端施加二维水平扫描运动。 抖动运动的频率高于扫描运动的频率。 在连续扫描之间，另一个设备将样本本身从一个水平位置移动到另一个水平位置。 显微镜接收由样品表面透射或反射的光辐射。 显微镜在光学图像位置检测器的表面上形成这种接收光辐射的（放大）图像。 该检测器的表面与（放大）图像相比具有相对较大的面积。 由检测器产生的所得电信号提供了关于光纤尖端的扫描位置的期望信息。 此外，该电信号被处理并反馈到垂直推动器，其保持纤维尖端与样品表面的距离期望地恒定。

    Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials
    5.
    发明授权
    Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials 失效
    用于制造其中该过程由引入能量敏感抗蚀剂材料的近场成像潜在特征控制的装置的方法

    公开(公告)号：US5656182A

    公开(公告)日：1997-08-12

    申请号：US391905

    申请日：1995-02-21

    申请人： Herschel Maclyn Marchman ,  Anthony Edward Novembre ,  Jay Kenneth Trautman

    发明人： Herschel Maclyn Marchman ,  Anthony Edward Novembre ,  Jay Kenneth Trautman

    IPC分类号： G03F7/26 ,  G03F7/20 ,  H01L21/027 ,  B44C1/22

    CPC分类号： G03F7/70558 ,  G03F7/70641 ,  G03F7/70675

    摘要： The present invention is directed to a process for device fabrication in which a spatially resolved latent image of latent features in an energy sensitive resist material is used to control process parameters. In the present process, an energy sensitive resist material is exposed to radiation using a patternwise or blanket exposure. An image of the latent effects of the exposure is obtained using a near-field imaging technique. This image of the latent effects of the exposure is used to control parameters of the lithographic process such as focus, lamp intensity, exposure dose, exposure time, and post exposure baking by comparing the image so obtained with the desired effects of the exposure and adjusting the relevant lithographic parameter to obtain the desired correlation between the image obtained and the desired effect. The image of the latent effects of exposure are also used to characterize the mask used in the lithographic process or to characterize the lithographic stepper used in the lithographic process.

    摘要翻译： 本发明涉及一种用于器件制造的方法，其中使用能量敏感抗蚀剂材料中潜在特征的空间分辨潜像来控制工艺参数。 在本方法中，使用图案或毯式曝光将能量敏感的抗蚀剂材料暴露于辐射。 使用近场成像技术获得曝光的潜在影响的图像。 曝光的潜在影响的图像用于通过将如此获得的图像与曝光和调整的期望效果进行比较来控制光刻过程的参数，例如焦点，灯强度，曝光剂量，曝光时间和曝光后烘烤 相关的光刻参数，以获得所获得的图像与期望效果之间的期望的相关性。 暴露的潜在影响的图像也用于表征在光刻工艺中使用的掩模或表征在光刻工艺中使用的光刻步进器。