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公开(公告)号：US08797660B1
公开(公告)日：2014-08-05
申请号：US13720928
申请日：2013-01-23
CPC分类号： G02B7/006 , G01N21/01 , G01N21/21 , G01N2201/0224 , G02B7/003 , G02B7/1822 , G02B7/1825 , G02B27/28 , Y10T29/49815 , Y10T29/49826 , Y10T29/49947
摘要： A mechanism and method for precisely arranging two or more optical elements, such as those incorporated into photoelastic modulators (PEMs), at a specific angular orientation. The method includes supporting one optical element in an annular mounting member that has an optic axis, and supporting other optical elements in other annular mounting members that have optic axes, and concentrically stacking together the two or more mounting members about a central axis in a manner such that one mounting member may be rotated relative to the others about the central axis and such that the optic axes of the mounting members define an optics angle, and rotating one mounting member relative to the others to define the specific angular orientation of the optical elements.
摘要翻译： 一种用于精确地布置两个或更多个光学元件（例如并入光弹性调制器（PEM）中的那些）的特定角取向的机构和方法。 该方法包括将一个光学元件支撑在具有光轴的环形安装构件中，并且将其它光学元件支撑在具有光轴的其它环形安装构件中，并以这种方式同心地将两个或更多个安装构件堆叠在中心轴上 使得一个安装构件可以围绕中心轴线相对于其它安装构件旋转，并且使得安装构件的光轴限定光学角度，并且相对于其它安装构件旋转一个安装构件以限定光学元件的特定角度取向 。
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公开(公告)号：US11054672B2
公开(公告)日：2021-07-06
申请号：US16206398
申请日：2018-11-30
发明人： John Freudenthal , Baoliang Wang
摘要： An apparatus includes a photoelastic modulator (PEM) optical element including a first driving axis and a second driving axis arranged at a selected angle with respect to each other and perpendicular to an optical axis, wherein the first driving axis and the second driving axis extend respective predetermined non-equal lengths that correspond to respective predetermined non-equal natural first and second PEM frequencies f1 and f2. Methods of manufacture and operation are also disclosed.
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公开(公告)号：US20190171042A1
公开(公告)日：2019-06-06
申请号：US16206398
申请日：2018-11-30
发明人： John Freudenthal , Baoliang Wang
IPC分类号： G02F1/01
摘要： An apparatus includes a photoelastic modulator (PEM) optical element including a first driving axis and a second driving axis arranged at a selected angle with respect to each other and perpendicular to an optical axis, wherein the first driving axis and the second driving axis extend respective predetermined non-equal lengths that correspond to respective predetermined non-equal natural first and second PEM frequencies f1 and f2. Methods of manufacture and operation are also disclosed.
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公开(公告)号：US10168274B2
公开(公告)日：2019-01-01
申请号：US15612564
申请日：2017-06-02
发明人： John Freudenthal , Andy Leadbetter , Baoliang Wang
摘要： This disclosure is generally directed to systems for imaging polarization properties of optical-material samples. As one aspect, there is provided a system for precise, simultaneous imaging of both the in-plane and out-of-plane birefringence properties of sample material over a wide range of incidence angles. The spatially resolved imaging approach described here is amenable to determination of a wide range of polarimetric properties, in addition to the in-plane and out-of-plane birefringence measure discussed as a preferred embodiment.
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公开(公告)号：US20170307517A1
公开(公告)日：2017-10-26
申请号：US15612564
申请日：2017-06-02
发明人： John Freudenthal , Andy Leadbetter , Baoliang Wang
CPC分类号： G01N21/23 , G01J4/00 , G01N21/21 , G01N2201/0621 , G01N2201/0683
摘要： This disclosure is generally directed to systems for imaging polarization properties of optical-material samples. As one aspect, there is provided a system for precise, simultaneous imaging of both the in-plane and out-of-plane birefringence properties of sample material over a wide range of incidence angles. The spatially resolved imaging approach described here is amenable to determination of a wide range of polarimetric properties, in addition to the in-plane and out-of-plane birefringence measure discussed as a preferred embodiment.
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公开(公告)号：US08743360B2
公开(公告)日：2014-06-03
申请号：US13970463
申请日：2013-08-19
发明人： Baoliang Wang
摘要： A method of controlling a light beam in an optical system includes a light source that directs a collimated light beam along a path, through a sample, and toward the active area of a stationary detector. The method includes the step selectively moving a lens into the path of the light beam for spreading the beam in instances where the path of the beam is altered by the sample between the source and the stationary detector. The detector, therefore, is held stationary. Adjustment means are provided for increasing the intensity characteristic of the light that reaches the detector to account for a decrease in intensity that occurs when the lens is in the path of the light beam to spread the beam.
摘要翻译： 一种控制光学系统中的光束的方法包括：光源，其沿着路径，通过样本并朝向固定检测器的有效区域引导准直光束。 该方法包括步骤：选择性地将透镜移动到光束的路径中，以在光束的路径被源和静态检测器之间的样本改变的情况下扩散光束。 因此，检测器保持静止。 提供了调节装置，用于增加到达检测器的光的强度特性，以解决当透镜在光束的路径中扩散光束时发生的强度的降低。
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公开(公告)号：US20040114142A1
公开(公告)日：2004-06-17
申请号：US10730583
申请日：2003-12-08
发明人： Baoliang Wang
IPC分类号： G01J004/00
CPC分类号： G03F7/7085 , G01J4/04 , G01N21/19 , G01N21/23 , G01N21/33 , G03F7/70966
摘要： Provided are systems and methods for precisely measuring birefringence properties of optical elements, especially those elements that are used in deep ultraviolet (DUV) wavelengths. The system includes two photoelastic modulators (PEM) (126, 128) located on opposite sides of the sample (136). Each PEM is operable for modulating the polarity of a light beam that passes though the sample. The system also includes a polarizer (124) associated with one PEM, an analyzer (130) associated with the other PEM, and a detector (132) for measuring the intensity of the light after it passes through the PEMs, polarizer, and analyzer. Described are techniques for determining birefringence properties across a wide range. For example, a dual-wavelength source light embodiment is provided for measuring relatively high levels of birefringence. Also provided is a technique for selecting the most accurate and efficient one of a number of approaches to determining birefringence properties depending upon the estimated value of the birefringence to be detected for a given sample optical element.
摘要翻译： 提供了用于精确测量光学元件的双折射性质的系统和方法，特别是用于深紫外（DUV）波长的那些元件。 该系统包括位于样品（136）的相对侧上的两个光弹性调制器（PEM）（126,128）。 每个PEM可操作用于调制通过样品的光束的极性。 该系统还包括与一个PEM相关联的偏振器（124），与另一个PEM相关联的分析器（130），以及用于在通过PEM，偏振器和分析器之后测量光的强度的检测器（132）。 描述了用于在宽范围内确定双折射性质的技术。 例如，提供双波长源光实施例用于测量相对高水平的双折射。 还提供了一种技术，用于根据对于给定的采样光学元件的待检测的双折射的估计值来选择确定双折射性质的多种方法中最精确和最有效的方法之一。
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公开(公告)号：US20200174289A1
公开(公告)日：2020-06-04
申请号：US16692796
申请日：2019-11-22
发明人： John Freudenthal
摘要： Apparatus include a photoelastic modulator (PEM) optical element, a controller having a frequency generator configured to produce a frequency signal at a selected frequency based on a clock signal of the controller wherein the controller is configured to produce a PEM driving signal based on the frequency signal, a PEM transducer coupled to the PEM optical element and the controller and configured to drive the PEM with the PEM driving signal, and a detector optically coupled to the PEM optical element and configured to receive a PEM modulated output and to produce a PEM detection signal that includes a PEM modulation signal, wherein the controller is configured to receive the PEM detection signal and to extract the PEM modulation signal from the PEM detection signal using the frequency signal and the clock signal.
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公开(公告)号：US20180283948A1
公开(公告)日：2018-10-04
申请号：US15765698
申请日：2016-10-06
发明人： Baoliang Wang
CPC分类号： G01J3/447 , G01J3/0205 , G01J3/0224 , G01J4/04 , G01J2004/001 , G01N21/19 , G01N21/21 , G01N21/253 , G01N2021/216
摘要： Example embodiments of methods, apparatus, and systems for measuring polarimetric parameters using spectroscopy are disclosed herein. Particular embodiments concern circular dichroism (CD) spectrometers that use a vertically aligned beam. In such embodiments, the solution being analyzed may have a top surface that forms a convex or concave meniscus, creating a surface through which the measuring beam passes that may refract the beam in undesirable ways. Accordingly, particular embodiments of the disclosed technology include one or more meniscus-compensating (meniscus-effect-reducing) components or subsystems. These components and/or subsystems can be used alone or in combination with one another to reduce the undesirable refractive effects caused by the meniscus at the solution's surface, thereby improving the resulting quality of the spectroscopy measurement and potentially improving the speed with which CD spectroscopy can be performed.
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公开(公告)号：US09841372B2
公开(公告)日：2017-12-12
申请号：US14866612
申请日：2015-09-25
发明人： John Freudenthal , Baoliang Wang
摘要： This invention is directed to methods of unambiguously measuring the absolute retardance, δA of an optical sample. A method for measuring absolute retardance of an optical sample includes directing light comprising a plurality of wavelengths through a polarization state generator source, the optical sample, and a polarization state analyzer, detecting, at an imaging device, retardance measurement light emanating from the optical sample after also passing through the polarization state analyzer at the plurality of wavelengths, determining a measurement retardance associated with the detected retardance measurement light at each of the wavelengths, and determining an absolute retardance associated with the optical sample based on the measurement retardances determined at each of the wavelengths.
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